In situ optical surface temperature measuring techniques and devices

• US 6,572,265 B1
• Filed: 04/20/2001
• Issued: 06/03/2003
• Est. Priority Date: 04/20/2001
• Status: Expired due to Term

• Current Assignee: LumaSense Technologies Holdings, Inc. (Advanced Energy Industries, Inc. (China)), Hellobrain Com
• Original Assignee: Luxtron Corp. (Advanced Energy Industries, Inc. (China))
• Inventors: Sandhu, Surinder S., Shaver, John Leonard, Gotthold, John P., Stapleton, Terry M., Hoang, Anh N.
• Primary Examiner(s): Gutierrez; Diego
• Assistant Examiner(s): VERBITSKY, GAIL KAPLAN
• Application Number:
  US09/839,857
• Time in Patent Office: 774 Days
• Field of Search: 374/120,161,141,131,208,124,132 385/12,147 250/458.1,459.1,234,578.1
• US Class Current: 374/161
• CPC Class Codes: G01J 1/28 using variation of intensity or distance of source G01J1/34 takes precedence
• CPC Class Codes: G01J 1/58 using luminescence generated by light
• CPC Class Codes: G01J 5/0003 for sensing the radiant heat transfer of samples, e.g. emittance meter
• CPC Class Codes: G01J 5/0007 of wafers or semiconductor substrates, e.g. using Rapid Thermal Processing
• CPC Class Codes: G01J 5/02 Constructional details
• CPC Class Codes: G01J 5/0205 Mechanical elements; Supports for optical elements
• CPC Class Codes: G01J 5/025 Interfacing a pyrometer to an external device or network; User interface
• CPC Class Codes: G01J 5/046 Materials; Selection of thermal materials
• CPC Class Codes: G01J 5/08 Optical arrangements
• CPC Class Codes: G01J 5/0821 Optical fibres
• CPC Class Codes: G01J 5/084 Adjustable or slidable
• CPC Class Codes: G01J 5/0887 Integrating cavities mimicking black bodies, wherein the heat propagation between the black body and the measuring element does not occur within a solid; Use of bodies placed inside the fluid stream for measurement of the temperature of gases; Use of the reemission from a surface, e.g. reflective surface; Emissivity enhancement by multiple reflections
• CPC Class Codes: G01K 1/14 Supports; Fastening devices; Arrangements for mounting thermometers in particular locations
• CPC Class Codes: G01K 11/3213 using changes in luminescence, e.g. at the distal end of the fibres

Abstract

A temperature sensor utilizing optical temperature measuring techniques is constructed to make firm contact with a surface whose temperature is being measured, an example application being the monitoring of semiconductor wafers or flat panel displays while being processed. A cap is mounted near but spaced apart from an end of a lightwave guide, with a resilient element that applies force of the cap against a surface whose temperature is being measured as the cap is urged toward the optical fiber end. An optical temperature sensing element, such as luminescent material or a surface of known emissivity, is carried within the cap. A bellows with a closed end conveniently serves as both the cap and the resilient element. An alternative temperature measuring device installs an optical temperature sensing material within a test substrate behind an optical window, and then views the sensing material through the window.

Claims

1. A sensor for measuring the temperature of a surface of an object, comprising:

a cap having a non-deformable end wall of thermally conducting material and a side wall connected thereto, an outside surface of the end wall being shaped to conform to a shape of the object surface to be measured,

a surface on an inside of the end wall of the cap that emits electromagnetic radiation having a detectable optical characteristic that is proportional to the temperature of the cap end wall,

a light wave guide having one end held within the cap a distance from the radiation emitting element and in optical communication therewith, and

a resilient element connected with the cap in a manner to urge the cap outside surface away from the wave guide one end a limited distance in a manner allowing a limited degree of rotational freedom with respect to the wave guide one end, thereby causing the cap end outside surface to firmly engage the object surface when positioned in contact therewith.

2. The sensor of claim 1, wherein the resilient element includes a spring surrounding said one wave guide end that urges the cap through an opening of a housing a distance away from said one wave guide end that is limited by a stop adjacent said housing opening.

3. The sensor of claim 1, wherein the resilient element is formed as part of the cap side wall.

4. The sensor of claim 3, wherein the cap side wall includes folds that operate to exert a force on the cap end away from the wave guide one end in response to being compressed.

5. The sensor of claim 4, wherein the cap side wall folds operate in a direction substantially perpendicularly with the cap end wall outside surface.

6. The sensor of claim 4, wherein the cap side wall folds operate in a direction substantially parallel with the cap end wall outside surface.

7. The sensor of claim 4, wherein the cap end wall outside surface includes a majority thereof that is planar.

8. The sensor of claim 1, wherein the cap side wall includes the resilient element in the form of a plurality of resilient fingers oriented at an acute angle with a normal to the cap end wall outside surface and that operate to exert a force on the cap end away from the wave guide one end in response to being pushed toward said wave guide one end.

9. The sensor of claim 1, wherein the electromagnetic radiation emitting surface on the inside of the end wall includes a surface of a layer of luminescent material attached to an inside of the cap.

10. The sensor of claim 9, additionally including an optically transparent cover positioned within the cap over the layer of luminescent material.

11. The sensor of claim 1, wherein the electromagnetic radiation emitting surface on the inside of the end wall includes a surface of known emissivity that emits radiation within an infrared range.

12. The sensor of claim 11, wherein the surface of known emissivity includes an inside surface of the cap material.

13. The sensor of claim 1, additionally including a housing with an opening in one end thereof through which the cap end wall outside surface protrudes in a manner that the cap may be pushed through the housing opening against the force of the resilient element.

14. The sensor of claim 13, wherein the housing includes an attachment device on an outside surface thereof for removable insertion of the housing into an opening of a support plate, and said wave guide extending through an end of the housing opposite to said one end and terminating a distance from said opposite end in a manner enabling coupling of the wave guide termination to an end of an optical fiber.

15. A temperature measuring sensor, comprising:

a housing having an opening in one end thereof,

a structure including a bellows and a cap having an end wall of thermally conducting material attached to one end of the bellows, said structure being contained within the housing with the cap normally extending through the housing opening but which is moveable toward the housing opening by a force on the cap that counteracts a resilient force exerted by the bellows when compressed by such a force,

a surface within the cap that emits electromagnetic radiation with a detectable optical characteristic that is proportional to the temperature of the cap end wall, and

a light wave guide extending through another end of the bellows and terminating in an end positioned a distance from the radiation emitting surface but in optical communication therewith.

16. The sensor of claim 15, wherein the electromagnetic radiation emitting surface on the inside of the end wall includes a surface of a layer of luminescent material attached to an inside of the cap.

17. The sensor of claim 16, additionally including an optically transparent cover positioned within the cap over the layer of luminescent material.

18. The sensor of claim 15, wherein the electromagnetic radiation emitting surface on the inside of the end wall includes a surface of known emissivity that emits radiation within an infrared range.

19. The sensor of claim 18, wherein the surface of known emissivity includes an inside surface of the material forming the cap.

20. The sensor of claim 15, wherein the housing includes an attachment device on an outside surface thereof for removable insertion of the housing into an opening of a support plate, and said wave guide extends through an end of the housing opposite to said one end and terminating a distance from said opposite end in a manner enabling coupling of the wave guide termination to an end of an optical fiber.

21. Equipment for processing planar substrates, comprising:

a vacuum chamber,

a support within the vacuum chamber that is adapted to horizontally support a lower surface of at least one of the substrates at a defined plane against gravity,

a temperature sensor carried by the substrate support and having a cap with a non-deformable planar end wall of thermally conducting material and a downwardly protruding side wall connected thereto, said cap normally extending upward above the defined plane in the absence of a substrate, said temperature sensor additionally including;

a surface on an inside of the cap end wall that emits electromagnetic radiation having a detectable optical characteristic that is proportional to the temperature of the cap end wall,

a light wave guide fixed with respect to the substrate support and having one end held within the cap a distance from the radiation emitting surface with a void therebetween but in optical communication therewith, and

a resilient element connected with the cap in a manner that the cap outside surface is moved laterally and rotatably with respect to the wave guide to a position coincident with the defined plane under the weight of one of the substrates, thereby causing the cap end outside surface to firmly engage the substrate surface when positioned in contact therewith.

22. The processing equipment of claim 21, wherein the resilient element of the temperature sensor includes a spring surrounding said one wave guide end that urges the cap through an opening of a housing a distance away from said one wave guide end that is limited by a stop adjacent said housing opening.

23. The processing equipment of claim 21, wherein the resilient element is formed as part of the cap side wall.

24. The processing equipment of claim 23, wherein the cap side wall includes folds that operate to exert a force on the cap end away from the wave guide one end in response to being compressed.

25. The processing equipment of claim 21, wherein the cap side wall includes the resilient element in the form of a plurality of resilient fingers oriented at an acute angle with a normal to the cap end wall outside surface and that operate to exert a force on the cap end away from the wave guide one end in response to being pushed toward said wave guide one end.

26. The processing equipment of claim 21, wherein the electromagnetic radiation emitting surface on the inside of the end wall includes a surface of a layer of luminescent material attached to an inside of the cap.

27. The processing equipment of claim 26, additionally including an optically transparent cover positioned within the cap over the layer of luminescent material.

28. The processing equipment of claim 21, wherein the electromagnetic radiation emitting surface on the inside of the end wall includes a surface of known emissivity that emits radiation within an infrared range.

29. The processing equipment of claim 28, wherein the surface of known emissivity includes an inside surface of the cap material.

30. The processing equipment of claim 21, wherein the temperature sensor is removeably held within an aperture of the substrate support, and wherein said wave guide extends through an end of the housing opposite to an end carrying the cap and terminates a distance from said opposite end in a manner enabling coupling of the wave guide termination to an end of an optical fiber.

31. The processing equipment of claim 21, wherein the temperature sensor serves to support the substrate, the resilient element of the temperature sensor being strong enough to support the lower surface of one of the substrates at said defined plane.

32. A method of measuring the temperature of a horizontal bottom surface of a substrate, comprising:

utilizing a vertically positioned light wave guide having an end positioned under the horizontal surface,

providing a cap positioned over the wave guide end but held spaced apart from it by a resilient element in a manner that the cap is moveable toward the optical fiber end and with a limited amount of rotation with respect thereto when the bottom substrate surface is placed thereagainst,

providing a surface within the cap, and in optical communication with the wave guide end, that emits electromagnetic radiation having a detectable optical characteristic that is proportional to the temperature of the cap, and

measuring said detectable optical characteristic of radiation emitted from the cap surface at another end of the wave guide.

33. The method of claim 32, wherein providing a cap spaced apart from the wave guide end by a resilient element includes providing a resiliently compressible bellows surrounding the wave guide end with the cap integrally formed with the bellows across one end thereof.

34. The method of claim 32, wherein providing the electromagnetic radiation emitting surface includes providing a layer of luminescent material attached to an inside of the cap and measuring the detectable optical characteristic of radiation emitted from a surface thereof includes measuring a time of decay of the luminescence in response to excitation radiation.

35. The method of claim 32, wherein the resilient element provided is strong enough to support the substrate.

36. The method of claim 32, wherein the substrate being measured includes either a semiconductor wafer or a flat panel display and the temperature measuring method is occurring while the substrate is being processed.