Integrated multilayered microfludic devices and methods for making the same
First Claim
1. A substantially monolithic microfluidic device comprising:
- (a) a substantially monolithic ceramic body, wherein said monolithic ceramic body defines a cavity, an inlet passage to said cavity, and an outlet passage from said cavity; and
(b) a microwave heater integrated into said substantially monolithic ceramic body.
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Accused Products
Abstract
A multilayered microfluidic device having a substantially monolithic structure is formed by sintering together a plurality of green-sheet layers. The substantially monolithic structure has an inlet port for receiving fluid, an outlet port for releasing fluid, and an interconnection between the inlet port and the outlet port. The substantially monolithic structure may also include a variety of components to enable useful interaction with the fluid, such as electrically conductive pathways, heaters, fluid sensors, fluid motion transducers, and optically transmissive portions. The components are preferably fabricated using thick-film or green-sheet technology and are preferably co-fired with and sintered to the green-sheet layers to become integral with the substantially monolithic structure.
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Citations
13 Claims
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1. A substantially monolithic microfluidic device comprising:
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(a) a substantially monolithic ceramic body, wherein said monolithic ceramic body defines a cavity, an inlet passage to said cavity, and an outlet passage from said cavity; and
(b) a microwave heater integrated into said substantially monolithic ceramic body. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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Specification