Integrated multilayered microfludic devices and methods for making the same

• US 6,572,830 B1
• Filed: 06/21/1999
• Issued: 06/03/2003
• Est. Priority Date: 10/09/1998
• Status: Expired due to Term

• Current Assignee: Google Technology Holdings LLC (Alphabet Inc.)
• Original Assignee: Motorola, Inc. (Motorola Solutions, Inc.)
• Inventors: Naclerio, Nicholas J., Wilcox, David, Marrero, Robert, Chan, Yuk-Tong, Briscoe, Cynthia Ann Gorsuch, Foley, Barbara McNeil, Gallagher, Sean Ross, Yu, Huinan, Huang, Rong-Fong, Burdon, Jeremy W., Grodzinski, Piotr, Dai, Xunhu
• Primary Examiner(s): Warden, Jill
• Assistant Examiner(s): STARSIAK, JOHN S
• Application Number:
  US09/337,086
• Time in Patent Office: 1,443 Days
• Field of Search: 422/129, 422/186, 422/186.29, 422/240, 156/89.11, 156/89.12, 219/678, 219/687, 219/756
• US Class Current: 422/186.29
• CPC Class Codes: B01J 19/0093 Microreactors, e.g. miniaturised or microfabricated reactors laboratory containers with capillary fluid transport in microfabricated channels or chambers B01L3/5027
• CPC Class Codes: B01J 2219/00317 Microwell devices, i.e. having large numbers of wells
• CPC Class Codes: B01J 2219/00351 Means for dispensing and evacuation of reagents
• CPC Class Codes: B01J 2219/00495 Means for heating or cooling the reaction vessels
• CPC Class Codes: B01J 2219/00783 Laminate assemblies, i.e. the reactor comprising a stack of plates
• CPC Class Codes: B01J 2219/00835 Comprising catalytically active material
• CPC Class Codes: B01J 2219/00873 Heat exchange
• CPC Class Codes: B01J 2219/00966 pH
• CPC Class Codes: B01L 2200/0689 Sealing
• CPC Class Codes: B01L 2200/12 Specific details about manufacturing devices
• CPC Class Codes: B01L 2300/0627 Sensor or part of a sensor is integrated
• CPC Class Codes: B01L 2300/0645 Electrodes
• CPC Class Codes: B01L 2300/0874 Three dimensional network
• CPC Class Codes: B01L 2300/0883 Serpentine channels
• CPC Class Codes: B01L 2300/0887 Laminated structure
• CPC Class Codes: B01L 2300/12 Specific details about materials
• CPC Class Codes: B01L 2300/18 Means for temperature control
• CPC Class Codes: B01L 2300/1822 using Peltier elements
• CPC Class Codes: B01L 2400/0415 electrical forces, e.g. electrokinetic
• CPC Class Codes: B01L 2400/0439 ultrasonic vibrations, vibrating piezo elements
• CPC Class Codes: B01L 3/502707 : characterised by the manufacture of the container or its components by shaping or joining plastic parts B29C59/00, B29C65/00; by laminating B32B37/00; manufacture of microstructural devices in general B81C
• CPC Class Codes: B01L 3/50273 : characterised by the means or forces applied to move the fluids micropumps F04B19/006, of the membrane type F04B43/043
• CPC Class Codes: B01L 3/502738 : characterised by integrated valves microvalves F16K99/0001
• CPC Class Codes: B01L 7/00 : Heating or cooling apparatus autoclaves B01J3/04; Heat insulating devices
• CPC Class Codes: B01L 7/52 : with provision for submitting samples to a predetermined sequence of different temperatures, e.g. for treating nucleic acid samples amplification or hybridisation processes per se C12Q1/68; controlling sequential reactions for synthesis B01J19/0046
• CPC Class Codes: B32B 18/00 : Layered products essentially comprising ceramics, e.g. refractory products
• CPC Class Codes: B32B 2038/042 : Punching
• CPC Class Codes: B32B 2311/06 : Platinum
• CPC Class Codes: B32B 2311/08 : Silver
• CPC Class Codes: B32B 2315/02 : Ceramics
• CPC Class Codes: B81B 2201/058 : Microfluidics not provided for in B81B2201/051 - B81B2201/054
• CPC Class Codes: B81C 1/00119 : Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
• CPC Class Codes: B81C 2201/019 : Bonding or gluing multiple substrate layers
• CPC Class Codes: C04B 2235/6562 : Heating rate
• CPC Class Codes: C04B 2237/341 : Silica or silicates
• CPC Class Codes: C04B 2237/343 : Alumina or aluminates
• CPC Class Codes: C04B 2237/348 : Zirconia, hafnia, zirconates or hafnates
• CPC Class Codes: C04B 2237/50 : Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
• CPC Class Codes: C04B 2237/62 : Forming laminates or joined articles comprising holes, channels or other types of openings
• CPC Class Codes: C04B 2237/68 : Forming laminates or joining articles wherein at least one substrate contains at least two different parts of macro-size, e.g. one ceramic substrate layer containing an embedded conductor or electrode
• CPC Class Codes: C04B 2237/704 : of one or more of the ceramic layers or articles
• CPC Class Codes: C40B 60/14 : for creating libraries
• CPC Class Codes: F04B 19/006 : Micropumps F04B43/043 and F04B43/095 take precedence
• CPC Class Codes: F28D 2021/0029 : Heat sinks
• CPC Class Codes: F28D 9/00 : Heat-exchange apparatus having stationary plate-like or laminated conduit assemblies for both heat-exchange media, the media being in contact with different sides of a conduit wall F28F3/083, F28F3/086 take precedence
• CPC Class Codes: F28F 13/00 : Arrangements for modifying heat-transfer, e.g. increasing, decreasing F28F1/00 - F28F11/00 take precedence
• CPC Class Codes: F28F 2260/02 : having microchannels
• CPC Class Codes: G01N 2030/025 : Gas chromatography
• CPC Class Codes: G01N 2030/528 : Monolithic sorbent material
• CPC Class Codes: G01N 2035/00158 : Elements containing microarrays, i.e. "biochip"
• CPC Class Codes: G01N 2035/00237 : Handling microquantities of analyte, e.g. microvalves, capillary networks
• CPC Class Codes: G01N 30/60 : Construction of the column
• CPC Class Codes: G01N 30/6004 : end pieces
• CPC Class Codes: G01N 30/6069 : with compartments or bed substructure
• CPC Class Codes: G01N 30/6095 : Micromachined or nanomachined, e.g. micro- or nanosize
• CPC Class Codes: H05K 1/0272 : Adaptations for fluid transport, e.g. channels, holes
• CPC Class Codes: H05K 1/0306 : Inorganic insulating substrates, e.g. ceramic, glass
• CPC Class Codes: H05K 3/4611 : by laminating two or more circuit boards H05K3/4652 takes precedence
• CPC Class Codes: H05K 3/4629 : laminating inorganic sheets comprising printed circuits, e.g. green ceramic sheets

Abstract

A multilayered microfluidic device having a substantially monolithic structure is formed by sintering together a plurality of green-sheet layers. The substantially monolithic structure has an inlet port for receiving fluid, an outlet port for releasing fluid, and an interconnection between the inlet port and the outlet port. The substantially monolithic structure may also include a variety of components to enable useful interaction with the fluid, such as electrically conductive pathways, heaters, fluid sensors, fluid motion transducers, and optically transmissive portions. The components are preferably fabricated using thick-film or green-sheet technology and are preferably co-fired with and sintered to the green-sheet layers to become integral with the substantially monolithic structure.

Claims

1. A substantially monolithic microfluidic device comprising:

(a) a substantially monolithic ceramic body, wherein said monolithic ceramic body defines a cavity, an inlet passage to said cavity, and an outlet passage from said cavity; and

(b) a microwave heater integrated into said substantially monolithic ceramic body.

2. The device according to claim 1, further comprising a heat sink, wherein said heat sink is integrated into said substantially monolithic ceramic body.

3. The device according to claim 2, wherein said heat sink is a thermoelectric cooler.

4. The device according to claim 1, further comprising a plurality of cavities.

5. The device according to claim 4, wherein said plurality of cavities are substantially thermally isolated from each other.

6. The device according to claim 1 further comprising a pump, wherein said pump is integrated into said substantially monolithic ceramic body.

7. The device according to claim 6, wherein said pump is selected from the group consisting of electroosmotic pumps, electrohydrodynamic pumps, and magnetic bead pumps.

8. The device according to claim 1, wherein said substantially monolithic ceramic body has a window into said cavity.

9. The device according to claim 1, further comprising a valve in said cavity, said inlet passage to said cavity, said outlet passage from said cavity, or any combination thereof.

10. The device according to claim 1 further comprising a substantially integrated means for generating a magnetic field.

11. The device according to claim 1 further comprising a sensor selected from the group consisting of a temperature sensor, a pH sensor, and a fluid sensor.

12. The device according to claim 1 further comprising a temperature sensor, wherein said temperature sensor is integrated into said substantially monolithic ceramic body.

13. The device according to claim 12, wherein said temperature sensor is selected from the group consisting of an inductive sensor and a resistive sensor.