Testing apparatus for test piece, testing method, contactor and method of manufacturing the same

• US 6,573,743 B2
• Filed: 03/27/2002
• Issued: 06/03/2003
• Est. Priority Date: 09/14/1998
• Status: Expired due to Fees

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Sato, Takashi
• Primary Examiner(s): Cuneo, Kamand
• Assistant Examiner(s): Tang, Minh N.
• Application Number:
  US10/106,349
• Publication Number:
  US 20020097064A1
• Time in Patent Office: 433 Days
• Field of Search: 324/754, 324/755, 324/759, 324/760, 324/761, 324/765, 439/482, 439/842
• US Class Current: 324/754.07
• CPC Class Codes: G01R 31/31727 Clock circuits aspects, e.g. test clock circuit details, timing aspects for signal generation, circuits for testing clocks G01R31/31725 takes precedence; concerning scan test G01R31/318552, for tester hardware G01R31/31922
• CPC Class Codes: G01R 31/318505 Test of Modular systems, e.g. Wafers, MCM's
• CPC Class Codes: G01R 31/31905 Interface with the device under test [DUT], e.g. arrangements between the test head and the DUT, mechanical aspects, fixture

Abstract

An apparatus of the present invention for testing a test piece comprises a contactor including a clock circuit capable of varying the frequency and a pattern signal generating circuit for generating a test pattern signal in conformity with the frequency of the clock circuit. It is possible for the contactor to further include a comparator circuit. These circuits are controlled by a control signal supplied from a tester. The contactor of the present invention also includes a via hole formed in a surface region of the contactor substrate for receiving the probe terminal, a conductive layer covering the inner circumferential surface of the via hole, and a wiring pattern electrically connected to the conductive layer.

Claims

1. A contactor, comprising:

a contactor substrate including a plurality of terminal holes, a conductive layer formed on the inner circumferential surface of each terminal hole, and a wiring layer electrically connected to said conductive layer; and

a probe terminal having a proximal end portion inserted into a predetermined one of said terminal holes and electrically connected to said conductive layer,

wherein grooves extending in at least two opposite directions are formed alternately on side surfaces of a distal end portion, which is exposed to the outside of said terminal hole, of said probe terminal.

2. A contactor comprising:

a contactor substrate including a plurality of terminal holes, a conductive layer formed on the inner circumferential surface of each terminal hole, and a wiring layer electrically connected to said conductive layer; and

a probe terminal having a proximal end portion inserted into a predetermined one of said terminal holes and electrically connected to said conductive layer; and

a holder for holding said contactor substrate,

wherein grooves extending in at least two opposite directions are formed alternately on side surfaces of a distal end portion, which is exposed to the outside of said terminal hole, of said probe terminal.