×

Tunable inductor using microelectromechanical switches

  • US 6,573,822 B2
  • Filed: 06/18/2001
  • Issued: 06/03/2003
  • Est. Priority Date: 06/18/2001
  • Status: Expired due to Term
First Claim
Patent Images

1. A tunable inductor comprising:

  • a helical inductor formed on a semiconductor substrate having an input and an output, said helical inductor having a full length that provides a full inductance;

    a full inductance switch disposed between said output and said full length of said helical inductor; and

    at least one microelectromechanical (MEMS) switch disposed between said output and an intermediate location of said helical inductor.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×