Tunable inductor using microelectromechanical switches

• US 6,573,822 B2
• Filed: 06/18/2001
• Issued: 06/03/2003
• Est. Priority Date: 06/18/2001
• Status: Expired due to Term

• Current Assignee: Intel Corporation
• Original Assignee: Intel Corporation
• Inventors: Ma, Qing, Rao, Valluri, Cheng, Peng
• Primary Examiner(s): MAI, ANH T
• Application Number:
  US09/884,738
• Publication Number:
  US 20020190835A1
• Time in Patent Office: 715 Days
• Field of Search: 336/200, 336/223, 336/87, 336/73
• US Class Current: 336/223
• CPC Class Codes: H01F 17/0006 Printed inductances printed coils for dynamo-electric machines H02K3/26; printed circuits H05K
• CPC Class Codes: H01F 21/12 discontinuously variable, e.g. tapped
• CPC Class Codes: H01F 5/003 Printed circuit coils
• CPC Class Codes: H01H 59/0009 making use of micromechanics
• CPC Class Codes: H01L 24/19 Manufacturing methods of high density interconnect preforms
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/12042 LASER
• CPC Class Codes: H01L 2924/14 Integrated circuits

Abstract

A tunable inductor is disclosed. The tunable inductor comprises a helical or spiral inductor formed on a semiconductor substrate having an input and an output. The helical inductor has a full length that provides a full inductance. Also, a full inductance switch is disposed between the output and the full length of the helical inductor. Finally, at least one microelectromechanical (MEMS) switch is disposed between the output and an intermediate location of the helical inductor.

Claims

1. A tunable inductor comprising:

a helical inductor formed on a semiconductor substrate having an input and an output, said helical inductor having a full length that provides a full inductance;

a full inductance switch disposed between said output and said full length of said helical inductor; and

at least one microelectromechanical (MEMS) switch disposed between said output and an intermediate location of said helical inductor.

2. The inductor of claim 1, wherein said MEMS switch is a membrane switch.

3. The inductor of claim 1, wherein said MEMS switch is a cantilever beam switch.

4. The inductor of claim 1, wherein said helical inductor has at least two segments that are separated by a non-helical structure, wherein said intermediate location is at said non-helical structure.

5. The inductor of claim 1, wherein said helical inductor is substantially a two-dimensional, spiral structure.

6. The inductor of claim 5 wherein said substantially two-dimensional, spiral structure, comprises at least two layers of electrically conductive material, wherein the at least two layers of electrically conductive material comprise a first conductive trace and a second conductive trace.

7. The inductor of claim 1, wherein said spiral inductor is substantially a single-layer, spiral structure.

8. A tunable inductor comprising:

a spiral inductor formed on a semiconductor substrate having an input and an output, said spiral inductor having a full length that provides a full inductance;

a full inductance switch disposed between said output and said full length of said spiral inductor; and

at least one microelectromechanical (MEMS) switch disposed between said output and an intermediate location of said spiral inductor.

9. The inductor of claim 8, wherein said MEMS switch is a cantilever beam switch.

10. The inductor of claim 8, wherein said MEMS switch is a membrane switch.

11. The inductor of claim 8 wherein said substantially spiral inductor comprises at least two layers of electrically conductive material, wherein the at least two layers of electrically conductive material comprise a first conductive trace and a second conductive trace formed into a spiral and said first conductive trace is substantially above said second conductive trace.

12. The inductor of claim 11 wherein said first conductive trace and said second conductive trace is connected by a via and said at least one MEMS switch is connected to said via.

13. The inductor of claim 8 wherein said substantially spiral inductor comprises at least two layers of electrically conductive material, wherein the at least two layers of electrically conductive material comprise a first conductive trace and a second conductive trace formed into a spiral and said first conductive trace is adjacent to said second conductive trace.

14. The inductor of claim 13 wherein said first conductive trace and said second conductive trace is connected by a via and said at least one MEMS switch is connected to said via.

15. A tunable transformer comprising:

a first helical coil formed on a semiconductor substrate;

a second helical coil formed on a semiconductor substrate having an input and an output, said second helical coil having a full length that provides a full inductance, said second helical inductor interwound with said first helical coil;

a full transformer switch disposed between said output and said full length of said second helical coil; and

at least one microelectromechanical (MEMS) switch disposed between said output and an intermediate location of said second helical coil.

16. The transformer of claim 15, wherein said first helical coil is would in a first spiral direction and said second helical coil is wound opposite the first spiral direction.

17. The transformer of claim 16 wherein:

said first and second helical coils comprise at least two layers of electrically conductive material, wherein the at least two layers of electrically conductive material comprise a first conductive trace and a second conductive trace.