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Magnetically-packaged optical MEMs device

  • US 6,574,026 B2
  • Filed: 12/07/2000
  • Issued: 06/03/2003
  • Est. Priority Date: 12/07/2000
  • Status: Expired due to Term
First Claim
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1. A magnetically-packaged optical micro-electro-mechanical (MEMS) device comprising:

  • a) a mirror layer having a frame and at least one mirror, each mirror movably connected to the frames;

    b) an actuator layer having at least one conductive path and at least one electrode, each electrode capable of inducing movement in the mirror;

    c) at least one spacer to separate the mirror layer and the actuator layer by a vertical gap spacing, the spacing being separate from or part of the mirror layer and/or the actuator;

    d) a first body of magnetic material disposed distally with respect to the mirror layer or secured thereto;

    e) a second body of magnetic material disposed distally with respect to the actuator layer or secured thereto;

    f) wherein the mirror layer, spacer and actuator layer are held in laterally-aligned and vertically spaced relation by magnetic attractive force between the first and second bodies of magnetic material.

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