Capacitive ceramic relative-pressure sensor
First Claim
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1. A capacitive ceramic relative-pressure sensor comprising:
- a diaphragm having a surface on which a first electrode is deposited; and
a substrate having a bore for guiding reference air from a first surface to an opposite, second surface, the first surface of the substrate being polished and provided with at least a second electrode, which substrate and which diaphragm are soldered or brazed together along the periphery by means of a spacer to form a chamber, which chamber is covered from inside with a thin layer of hydrophobic material that is introduced through the bore after the soldering or brazing.
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Abstract
This relative-pressure sensors has virtually no zero offset at relative humidities up to near the saturation limit. The sensor has a diaphragm (11) having a surface on which a electrode (13) is deposited and a substrate (12) having a bore (23) for guiding reference air from af first surface to an opposite surface. The first surface is polished and provided with at least an addional electrode (15). The substrate and the diaphragm are soldered or brazed together along the periphery by means of a spacer (20) to form a chamber which is covered from inside with a thin layer (24) of hydrophobic material that is introduced through the bore after the soldering or brazing.
49 Citations
4 Claims
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1. A capacitive ceramic relative-pressure sensor comprising:
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a diaphragm having a surface on which a first electrode is deposited; and
a substrate having a bore for guiding reference air from a first surface to an opposite, second surface, the first surface of the substrate being polished and provided with at least a second electrode, which substrate and which diaphragm are soldered or brazed together along the periphery by means of a spacer to form a chamber, which chamber is covered from inside with a thin layer of hydrophobic material that is introduced through the bore after the soldering or brazing. - View Dependent Claims (2, 3, 4)
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Specification
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Current AssigneeEnvec Mess-Und Regeltechnik GmbH + Company
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Original AssigneeEnvec Mess-Und Regeltechnik GmbH + Company
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InventorsHegner, Frank
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Primary Examiner(s)Williams, Hezron
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Assistant Examiner(s)Martir, Lilybett
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Application NumberUS09/592,127Time in Patent Office1,100 DaysField of Search737/18, 737/15, 737/24, 737/23US Class Current73/724CPC Class CodesG01L 19/0654 against moisture or humidityG01L 9/0075 using a ceramic diaphragm, ...
