Auto-switching gas delivery system utilizing sub-atmospheric pressure gas supply vessels

• US 6,581,623 B1
• Filed: 05/01/2000
• Issued: 06/24/2003
• Est. Priority Date: 07/16/1999
• Status: Expired due to Fees

• Current Assignee: Advanced Technology Materials, Inc. (Entegris Incorporated)
• Original Assignee: Advanced Technology Materials, Inc. (Entegris Incorporated)
• Inventors: Dietz, James, Carpenter, Kent
• Primary Examiner(s): Walton, George L.
• Application Number:
  US09/562,300
• Time in Patent Office: 1,149 Days
• Field of Search: 137/111, 137/240, 137/486, 137/487.5, 137/597, 137/884, 137/601.18, 137/115.03, 137/115.08, 137/115.09, 137/115.13, 137/118.04, 137/119.06, 137/119.07, 137/601.19, 137/112, 137/113, 137/614.17, 951/03, 700/11, 700/12, 700/282, 702/138
• US Class Current: 137/113
• CPC Class Codes: B01D 53/0454 Controlling adsorption controlling temperature swing adsorption B01D53/0462, controlling pressure swing adsorption B01D53/047
• CPC Class Codes: F17C 13/02 Special adaptations of indicating, measuring, or monitoring equipment measuring in general G01
• CPC Class Codes: F17C 13/045 Automatic change-over switching assembly for bottled gas systems with two (or more) gas containers
• CPC Class Codes: F17C 2205/0142 bundled in parallel
• CPC Class Codes: F17C 2205/0146 with details of the manifold
• CPC Class Codes: F17C 2205/0323 Valves
• CPC Class Codes: F17C 2205/0326 electrically actuated
• CPC Class Codes: F17C 2205/0329 manually actuated
• CPC Class Codes: F17C 2223/0123 gaseous, e.g. CNG, GNC
• CPC Class Codes: F17C 2223/038 Subatmospheric pressure
• CPC Class Codes: F17C 2227/042 with change-over from one vessel to another
• CPC Class Codes: F17C 2250/032 using computers
• CPC Class Codes: F17C 2250/034 using wireless transmissions
• CPC Class Codes: F17C 2250/0439 Temperature
• CPC Class Codes: F17C 2250/0636 Flow or movement of content
• CPC Class Codes: F17C 2265/06 Fluid distribution
• CPC Class Codes: F17C 2270/0518 Semiconductors
• CPC Class Codes: F17C 2270/0545 Tools
• CPC Class Codes: F17C 9/00 Methods or apparatus for discharging liquefied or solidified gases from vessels not under pressure
• CPC Class Codes: G05D 7/0658 the plurality of throttling means being arranged for the control of a single flow from a plurality of converging flows G05D7/0652 takes precedence; ratio control G05D11/13
• CPC Class Codes: Y10T 137/0324 : With control of flow by a condition or characteristic of a fluid
• CPC Class Codes: Y10T 137/2569 : Control by depletion of source
• CPC Class Codes: Y10T 137/2579 : Flow rate responsive
• CPC Class Codes: Y10T 137/2594 : Choke
• CPC Class Codes: Y10T 137/2657 : Flow rate responsive
• CPC Class Codes: Y10T 137/7759 : Responsive to change in rate of fluid flow
• CPC Class Codes: Y10T 137/7761 : Electrically actuated valve
• CPC Class Codes: Y10T 137/87249 : Multiple inlet with multiple outlet
• CPC Class Codes: Y10T 137/87539 : Having guide or restrictor
• CPC Class Codes: Y10T 137/8803 : Also carries head of other valve

Abstract

An auto-switching sub-atmospheric pressure gas delivery system, for dispensing gas to a gas-consuming process unit, e.g., a semiconductor manufacturing tool, without the occurrence of pressure spikes or flow perturbations.

Claims

1. An auto-switching sub-atmospheric pressure gas delivery system, comprising:

a gas dispensing manifold;

a plurality of sub-atmospheric pressure gas supply vessels, each said gas supply vessel being joined to the gas dispensing manifold and including a vessel valve that is selectively openable to establish gas flow communication of the gas supply vessel with the gas dispensing manifold, and selectively closeable to terminate gas flow communication of the gas supply vessel with the gas dispensing manifold;

a plurality of flow control valves in the gas dispensing manifold positioned in the manifold downstream from the vessel valve of the associated sub-atmospheric pressure gas supply vessel, each control valve associated with a corresponding upstream and downstream pressure transducer and one of the plurality of sub-atmospheric pressure gas supply vessels;

at least one mass flow controller downstream of said gas manifold and upstream of a process tool to provide a steady-state, uninterrupted flow of gas from the gas supply vessel to the process tool;

a plurality of bleed flow passages, each associated with a corresponding one of the flow control valves in the gas dispensing manifold and arranged to flow gas therethrough in bypassing relationship to the associated flow control valve, at a restricted low flow rate in relation to flow rate of gas through the associated flow control valve when the associated flow control valve is open and gas is flowed therethrough from an associated sub-atmospheric pressure gas supply vessel, wherein a flow conductance of said bleed flow passages ensures a gradual pressure increase downstream of said flow control valves; and

a CPU operatively linked to the valves and pressure transducers, for switching of the gas supply vessels for flow of gas from a selected one of the plurality of gas supply vessels to the manifold until its depletion followed by switching to a new selected one of the plurality of gas supply vessels to the manifold by selectively operating the vessel valves and flow control valves so that dispensing pressure is maintained in the manifold appropriate to prevent destabilizing perturbations of the mass flow controllers from occurring.

2. The auto-switching sub-atmospheric pressure gas delivery system of claim 1, wherein each flow control valve comprises a corresponding valve body with an inlet and an outlet each of which are joined in flow communication with the manifold, and wherein the bleed flow passage associated with a corresponding flow control valve comprises a bleed flow passage through the valve body of said corresponding flow control valve, interconnecting the inlet and outlet and permitting flow of gas therethrough regardless of opened or closed state of said corresponding flow control valve.

3. The auto-switching sub-atmospheric pressure gas delivery system of claim 2, wherein the bleed flow passage comprises a passage drilled through the valve body.

4. The auto-switching sub-atmospheric pressure gas delivery system of claim 1, wherein the bleed flow passage associated with a corresponding flow control valve comprises a bypass loop flow passage connected with the manifold to bypass said corresponding flow control valve, said bypass loop flow passage permitting flow of gas therethrough regardless of opened or closed state of said corresponding flow control valve.

5. The auto-switching sub-atmospheric pressure gas delivery system of claim 4, wherein the bypass loop flow passage has a restricted flow orifice element therein.

6. The auto-switching sub-atmospheric pressure gas delivery system of claim 1, wherein the sub-atmospheric pressure gas supply vessels comprise a gas storage and dispensing vessel containing a physical adsorbent material sorptively retaining gas thereon, and from which gas is dispensable in the gas dispensing operation involving flow of gas out of the manifold.

7. The auto-switching sub-atmospheric pressure gas delivery system of claim 6, wherein the physical adsorbent material comprises a sorbent material selected from the group consisting of zeolites, silica, alumina, and carbon.

8. The auto-switching sub-atmospheric pressure gas delivery system of claim 6, wherein the physical adsorbent material comprises bead activated carbon.

9. The auto-switching sub-atmospheric pressure gas delivery system of claim 6, wherein the gas sorptively retained on the physical adsorbent material comprises a gas dispensed for semiconductor manufacturing.

10. The auto-switching sub-atmospheric pressure gas delivery system of claim 6, wherein the gas sorptively retained on the physical adsorbent material comprises a gas selected from the group consisting of hydride gases, halide gases and gaseous organometallic compounds and complexes.

11. The auto-switching sub-atmospheric pressure gas delivery system of claim 6, wherein the gas sorptively retained on the physical adsorbent material comprises a gas selected from the group consisting of arsine, phosphine, boron trifluoride, boron trichloride, diborane, silane, and halosilanes.

12. The auto-switching sub-atmospheric pressure gas delivery system of claim 1, wherein the plurality of sub-atmospheric pressure gas supply vessels and gas dispensing manifold are contained in a gas cabinet.

13. The auto-switching sub-atmospheric pressure gas delivery system of claim 1, wherein the manifold is coupled in gas feed relationship with a semiconductor manufacturing facility.

14. The auto-switching sub-atmospheric pressure gas delivery system of claim 13, wherein the manifold is coupled in gas feed relationship with the semiconductor manufacturing facility by an interconnecting gas flow line having a mass flow controller disposed therein.

15. The auto-switching sub-atmospheric pressure gas delivery system of claim 1, wherein the controller comprises a central processing unit.

16. The auto-switching sub-atmospheric pressure gas delivery system of claim 1, wherein the controller is programmably arranged to carry out a cycle time program for auto-switching of the sub-atmospheric pressure gas supply vessels into sequential gas flow relationship with the manifold.

17. The auto-switching sub-atmospheric pressure gas delivery system of claim 16, wherein the controller is arranged to selectively operate each of the flow control valves via an associated valve actuator.

20. A method of auto-switching sub-atmospheric pressure gas delivery, comprising:

providing a sub-atmospheric pressure gas delivery system as in claim 1;

flowing gas from a selected one of said plurality of sub-atmospheric pressure gas supply vessels to the gas dispensing manifold at a dispensing pressure, with the vessel valve of said selected one of said gas supply vessels open, the flow control valve associated with the selected one of the gas supply vessels open, and the vessel valve of a second one of said gas supply vessels closed, until pressure in the selected one of the gas supply vessels has declined to a level requiring switchover;

closing the vessel valve of said selected one of said gas supply vessels open and the flow control valve associated therewith, and concurrently opening the vessel valve of the second one of said gas supply vessels while maintaining the flow control valve associated with the second one of said gas supply vessels closed;

bleeding gas from the second one of said gas supply vessels through the bleed flow passage associated with the flow control valve for said second one of said gas supply vessels, until the gas pressure in the manifold rises to dispensing pressure; and

when gas pressure in the manifold has risen to dispensing pressure, opening the flow control valve for said second one of said gas supply vessels.

21. The method of claim 20, wherein each one of the plurality of gas supply vessels is sequentially brought into gas dispensing relationship with the manifold.

22. The method of claim 20, wherein each flow control valve comprises a corresponding valve body with an inlet and an outlet each of which are joined in flow communication with the manifold, and wherein the bleed flow passage associated with a corresponding flow control valve comprises a bleed flow passage through the valve body of said corresponding flow control valve, interconnecting the inlet and outlet and permitting flow of gas therethrough regardless of opened or closed state of said corresponding flow control valve.

23. The method of claim 22, wherein the bleed flow passage comprises a passage drilled through the valve body.

24. The method of claim 20, wherein the bleed flow passage associated with a corresponding flow control valve comprises a bypass loop flow passage connected with the manifold to bypass said corresponding flow control valve, said bypass loop flow passage permitting flow of gas therethrough regardless of opened or closed state of said corresponding flow control valve.

25. The method of claim 24, wherein the bypass loop flow passage has a restricted flow orifice element therein.

26. The method of claim 20, wherein the sub-atmospheric pressure gas supply vessels comprise a gas storage and dispensing vessel containing a physical adsorbent material sorptively retaining gas thereon, and from which gas is dispensable in the gas dispensing operation involving flow of gas out of the manifold.

27. The method of claim 26, wherein the physical adsorbent material comprises a sorbent material selected from the group consisting of zeolites, silica, alumina, and carbon.

28. The method claim 26, wherein the physical adsorbent material comprises bead activated carbon.

29. The method of claim 26, wherein the gas sorptively retained on the physical adsorbent material comprises a gas dispensed for semiconductor manufacturing.

30. The method of claim 26, wherein the gas sorptively retained on the physical adsorbent material comprises a gas selected from the group consisting of hydride gases, halide gases and gaseous organometallic compounds and complexes.

31. The method of claim 26, wherein the gas sorptively retained on the physical adsorbent material comprises a gas selected from the group consisting of arsine, phosphine, boron trifluoride, boron trichloride, diborane, silane, and halosilanes.

32. The method of claim 20, wherein the plurality of sub-atmospheric pressure gas supply vessels and gas dispensing manifold are contained in a gas cabinet.

33. The method of claim 20, wherein the manifold is coupled in gas feed relationship with a semiconductor manufacturing facility.

34. The method of claim 33, wherein the manifold is coupled in gas feed relationship with the semiconductor manufacturing facility by an interconnecting gas flow line having a mass flow controller disposed therein.

35. The method of claim 20, wherein the controller comprises a central processing unit.

36. The method of claim 20, wherein the controller is programmably arranged to carry out a cycle time program for auto-switching of the sub-atmospheric pressure gas supply vessels into sequential gas flow relationship with the manifold.

37. The method of claim 36, wherein the controller is arranged to selectively operate each of the flow control valves via an associated valve actuator.

18. An auto-switching sub-atmospheric pressure gas delivery system comprising a gas cabinet containing a gas delivery manifold arranged for delivering gas from the gas cabinet, and a plurality of gas supply vessels each coupled in latent gas flow communication with the manifold for said delivery of gas from the gas cabinet from a selected one of the plurality of gas supply vessels, with means for valvably establishing gas flow from the selected one of the plurality of gas supply vessels to the manifold and valvably isolating selected other(s) of the plurality of gas supply vessels from gas flow communication with the manifold, a pressure transducer associated with each of the supply vessels, a CPU communicating with the pressure transducer associated with each of the supply vessels for auto-switching of the vessels in sequence for flow of gas from a selected one of the plurality of gas supply vessels to the manifold until its depletion followed by switching of a new selected one of the plurality of gas supply vessels to the manifold and isolation of the selected other(s) of the plurality of gas supply vessels, and restricted flow means for flowing gas from a selected one of the gas supply vessels at auto-switching thereof into gas flow communication with the manifold to pressurize the manifold prior to valvably establishing gas flow from the selected one of the plurality of gas supply vessels to the manifold, wherein a flow conductance of said restricted flow means ensures a gradual pressure increase downstream of said flow control valves.

19. A method of dispensing gas from an assembly of sub-atmospheric pressure gas supply vessels secured to a valved manifold arranged to selectively connect successive ones of the gas supply vessels in sequence to the manifold, by opening of an associated valve isolating a selected vessel from gas communication with the manifold and closing of an associated valve of a vessel depleted of gas, said method comprising restrictively flowing gas from the selected vessel into the manifold to gradually pressurize the manifold to an operating pressure level during switchover of gas supply from said vessel depleted of gas, to a previously isolated selected vessel.

38. An auto-switching sub-atmospheric pressure gas delivery method comprising providing a gas cabinet containing a gas delivery manifold arranged for delivering gas from the gas cabinet, and a plurality of gas supply vessels each coupled in latent gas flow communication with the manifold for said delivery of gas from the gas cabinet from a selected one of the plurality of gas supply vessels, with means for valvably establishing gas flow from the selected one of the plurality of gas supply vessels to the manifold and valvably isolating selected other(s) of the plurality of gas supply vessels from gas flow communication with the manifold, and auto-switching the vessels in sequence for flow of gas from a selected one of the plurality of gas supply vessels to the manifold until its depletion followed by switching of a new selected one of the plurality of gas supply vessels to the manifold and isolation of the selected other(s) of the plurality of gas supply vessels, and flowing gas from a selected one of the gas supply vessels at auto-switching thereof into gas flow communication with the manifold to gradually pressurize the manifold prior to establishing gas flow from the selected one of the plurality of gas supply vessels to the manifold.

39. An auto-switchable sub-atmosphericpressure gas delivery system including a plurality of sub-atmosphericpressure gas supply vessels coupled to a valved gas dispensing manifold, wherein subsequent to auto-switching an on-line gas supply vessel is arranged to dispense gas for flow through the valved gas dispensing manifold for discharge therefrom, with a flow control valve in the manifold maintained in an open dispensing state during the flow through the valved gas dispensing manifold for discharge therefrom, and comprising means for restrictively flowing gas from the on-line gas supply vessel into the valved gas dispensing manifold to progressively build pressure in the valved gas dispensing manifold to a gas dispensing pressure level for said discharge with the flow control valve in the open dispensing state, and for opening the flow control valve to the open dispensing state after said gas dispensing pressure level has been reached.

40. An auto-switchable sub-atmosphericpressure gas delivery system according to claim 39, wherein said means are selected from the group consisting of:

a bleed flow passage in said flow control valve;

a gas flow by-pass loop associated with said flow control valve;

a valve actuator programmably arranged to actuate said flow control valve in a pressure-building mode selected from the group consisting of;

progressively opening of said flow control valve; and

pulsed opening/closing of said flow control valve.

41. An auto-switchable sub-atmosphericpressure gas delivery system according to claim 40, wherein said valve actuator is programmably arranged by coupling thereof with a central processing unit to actuate said flow control valve.

42. An auto-switchable sub-atmosphericpressure gas delivery system according to claim 41, wherein said means further comprise a pressure monitor in the manifold arranged to monitor manifold pressure in proximity to the on-line gas supply vessel during and subsequent to switchover, with the pressure monitor arranged in a feedback arrangement to the central processing unit so that the valve actuator is responsively operated to actuate said flow control valve.

43. An auto-switchable, sub-atmosphericpressure gas delivery system according to claim 40, wherein said means comprise a valve actuator programmably arranged to actuate said flow control valve in a pressure-building mode.

44. An auto-switchable, sub-atmosphericpressure gas delivery system according to claim 43, wherein said valve actuator is programmably arranged to actuate said flow control valve in a pressure-building mode by progressively opening said flow control valve.

45. An auto-switchable, sub-atmosphericpressure gas delivery system according to claim 43, wherein said valve actuator is programmably arranged to actuate said flow control valve in a pressure-building mode by pulsed opening/closing of said flow control valve.