Controller/detector interfaces for microfluidic systems
First Claim
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1. A microfluidic device comprising:
- a body structure having an interior portion;
a microscale channel network disposed in the interior portion of the body structure;
a plurality of ports disposed through a portion of the body structure in fluid communication with said microscale channel network; and
a plurality of electrical conduits independently coupling the plurality of ports with a plurality of electrical contact pads disposed on a first exterior surface of the body structure;
wherein at least one of said electrical conduits has a thickness less than 1500 Å and
comprises at least a first metal component made of titanium/tungsten alloy.
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Abstract
The present invention is generally directed to improved methods, structures and systems for interfacing microfluidic devices with ancillary systems that are used in conjunction with such devices. These systems typically include control and monitoring systems for controlling the performance of the processes carried out within the device, e.g., controlling internal fluid transport and direction, monitoring and controlling environmental conditions and monitoring results of the processes performed, e.g., detection.
58 Citations
10 Claims
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1. A microfluidic device comprising:
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a body structure having an interior portion;
a microscale channel network disposed in the interior portion of the body structure;
a plurality of ports disposed through a portion of the body structure in fluid communication with said microscale channel network; and
a plurality of electrical conduits independently coupling the plurality of ports with a plurality of electrical contact pads disposed on a first exterior surface of the body structure;
wherein at least one of said electrical conduits has a thickness less than 1500 Å and
comprises at least a first metal component made of titanium/tungsten alloy.- View Dependent Claims (2, 3, 4, 5, 6)
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7. A microfluidic device comprising:
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a body structure having an interior portion;
a microscale channel network disposed in the interior portion of the body structure;
a plurality of ports disposed through a portion of the body structure in fluid communication with said microscale channel network; and
a plurality of electrical conduits independently coupling the plurality of ports with a plurality of electrical contact pads disposed on a first exterior surface of the body structure; and
wherein at least one of said electrical conduits has a thickness less than 1500 Å and
comprises at least a first metal component and a platinum conductive layer overlaying the first metal component, and wherein the first metal component is selected from the group of tungsten, palladium, ruthenium, iridium, osmium and rhodium.- View Dependent Claims (8, 9)
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10. A microfluidic device comprising:
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a body structure having an interior portion;
a microscale channel network disposed in the interior portion of the body structure;
a plurality of ports disposed through a portion of the body structure in fluid communication with said microscale channel network; and
a plurality of electrical conduits independently coupling the plurality of ports with a plurality of electrical contact pads disposed on a first exterior surface of the body structure; and
wherein at least one of said electrical conduits has a thickness less than 1500 Å and
comprises at least a first metal component made of titanium/tungsten alloy with a platinum overlayer that does not substantially degrade under applied current densities greater than 10 mA/cm2.
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Specification