Multiple local probe measuring device and method
First Claim
1. A local probe measuring device for effecting local measurements referring to a sample, the device comprising:
- a plurality of local probes for local measurements with respect to a sample or a reference surface;
a rigid mechanical coupling between said local probes;
a position adjusting means for commonly adjusting distance and lateral position relations of said local probes with respect to the sample or the reference surface;
a plurality of detection means, each being associated to a particular one of said local probes to independently detect measurement data from local measurements effected by said particular local probe; and
a controller that controls or stabilizes via said position adjusting means said distance and lateral position relations on the basis of certain measurement data which refer to local measurements effected by at least one of said local probes and which reflect said distance relations.
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Accused Products
Abstract
The invention provides a local probe measuring device for effecting local measurements refering to a sample, comprising a plurality of local probes for local measurements with respect to a sample or a reference surface, a measurement condition adjustment arrangement adapted to commonly adjust measurement conditions of said local probes with respect to the sample or the reference surface, a plurality of detection arrangements, each being associated or adapted to be associated to one particular of said local probes and adapted to independently detect measurement data refering to local measurements effected by said particular local probe. Further, methods for effecting local measurements and local manipulations by means of multiple local probes are provided.
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Citations
39 Claims
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1. A local probe measuring device for effecting local measurements referring to a sample, the device comprising:
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a plurality of local probes for local measurements with respect to a sample or a reference surface;
a rigid mechanical coupling between said local probes;
a position adjusting means for commonly adjusting distance and lateral position relations of said local probes with respect to the sample or the reference surface;
a plurality of detection means, each being associated to a particular one of said local probes to independently detect measurement data from local measurements effected by said particular local probe; and
a controller that controls or stabilizes via said position adjusting means said distance and lateral position relations on the basis of certain measurement data which refer to local measurements effected by at least one of said local probes and which reflect said distance relations. - View Dependent Claims (2)
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3. A local probe measuring device for measuring local interactions between a local probe arrangement and a sample, the device comprising:
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a plurality of local probes adapted to interact locally with a sample or a reference surface;
a rigid mechanical coupling between the local probes;
a position adjusting means for commonly adjusting for all of said local probes at least one of a distance of the respective local probe with respect to the sample or the reference surface, and a local interaction of the respective local probe with the sample or the reference surfaces, and for commonly adjusting for all of said local probes at least one of a first lateral coordinate of the respective local probe with respect to the sample or the reference surface, and a second lateral coordinate of the respective local probe with respect to the sample or the reference surface; and
a plurality of detection arrangements, each being associated to a particular one of said local probes and each independently detects a local interaction of said particular local probe with the sample or the reference surface; and
a controller that controls or stabilizes via said position adjusting means for at least one of said local probes at least one of said distance and said local interaction on the basis of detection results obtained for at least one of said local probes via the respective detection arrangement, and said controller controls or stabilizes via said position adjusting means for at least one of said local probes at least one of said first lateral coordinate and said second lateral coordinate on the basis of detection results obtained for at least one of said local probes via the respective detection arrangement. - View Dependent Claims (4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A local probe measuring device for measuring local interactions between a cantilever probe arrangement and a sample, comprising:
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a plurality of cantilever probes that interact locally with a sample or a reference surface;
a rigid mechanical coupling between respective base sections of said cantilever probes;
a position adjusting means for commonly adjusting for all of said cantilever probes;
a distance of the base section of the respective cantilever probe with respect to the sample or the reference surface, a first lateral coordinate of the base section of the respective cantilever probe with respect to the sample or the reference surface, and a second lateral coordinate of the base section of the respective cantilever probe with respect to the sample or the reference surface, said first and second lateral coordinates defining the lateral position of the base section of the cantilever probe with respect to the sample or the reference surface;
a plurality of detection arrangements, each being associated to a particular one of said cantilever probes and each independently detects at least one of a deflection of said particular cantilever probe, a torsion of said particular cantilever probe and a local interaction of said particular cantilever probe with said sample or reference surface; and
a controller that controls or stabilizes via said position adjusting means for at least one of said cantilever probes at least one of said first and second lateral coordinates on the basis of detection results -obtained for at least one of said cantilever probes via the respective detection arrangement. - View Dependent Claims (16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33)
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34. A method of effecting local measurements referring to a sample, the method comprising:
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providing at least two local probes in a positional relation with respect to a sample or a reference surface;
adjusting a distance relation and a lateral positioning relation of the respective local probe for at least one of said local probes with respect to the sample or the reference surface, on the basis of measurements effected with respect to at least one other of said local probes; and
effecting a measurement with respect said at least one local probe with reference to said measurements effected with respect to said at least one other local probe. - View Dependent Claims (35, 36)
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37. A method of effecting local manipulations referring to a sample, the method comprising:
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providing at least two local probes in a positional relation with respect to a sample or a reference surface;
adjusting a distance relation and a lateral positioning relation of the respective local probe with respect to the sample or the reference surface, said distance relation and said lateral positioning relation being adjusted on the basis of measurements effected with respect to at least one other of said local probes; and
manipulating said sample by means of said at least one local probe with reference to said measurements effected with respect to said at least one other local probe. - View Dependent Claims (38, 39)
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Specification