×

Micromechanical device and method for non-contacting edge-coupled operation

  • US 6,583,921 B2
  • Filed: 12/21/2000
  • Issued: 06/24/2003
  • Est. Priority Date: 12/28/1999
  • Status: Active Grant
First Claim
Patent Images

1. A method of operating a micromechanical device comprising:

  • providing a micromechanical device comprising a deflectable member and at least one non-contacting capture electrode supported by a substrate;

    electrostatically deflecting said deflectable member; and

    stopping said deflection of said deflectable member using electrostatic attraction between said non-contacting capture electrode and said deflectable member.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×