×

Projector and method of manufacturing a light modulation device

  • US 6,585,379 B2
  • Filed: 01/18/2002
  • Issued: 07/01/2003
  • Est. Priority Date: 11/13/1996
  • Status: Expired due to Term
First Claim
Patent Images

1. A method of manufacturing a light modulation device comprising the steps of:

  • forming a release layer over a heat-resistant substrate;

    forming an intermediate layer over the release layer;

    forming a mirror layer over the intermediate layer;

    connecting the mirror layer with a drive substrate where active elements are formed; and

    facilitating separation of the heat-resistant substrate from the drive substrate by irradiating the release layer with the light, the light causing separation in the release layer.

View all claims
  • 0 Assignments
Timeline View
Assignment View
    ×
    ×