Structure for electrically connecting microelectromechanical devices, in particular microactuators for hard disk drivers
First Claim
1. A microelectromechanical device comprising:
- a movable part and a fixed part separated by trenches and mechanically connected by spring elements; and
an electrical connection structure including a connection element extending between said movable part and said fixed part, said connection element formed of electrically conductive material and including a plurality of sub-arms connected in parallel and having a common movable anchorage region anchored to said movable part and a common fixed anchorage region anchored to said fixed part.
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Accused Products
Abstract
An electrical connection structure having connection elements which electrically connect a movable part to a fixed part of a microelectromechanical device, for example a microactuator. The movable part and fixed part are separated by trenches and are mechanically connected by spring elements, which determine, together with the connection elements, the torsional rigidity of the microelectromechanical device. Each connection element is formed by multiple sub-arms connected in parallel and having a common movable anchorage region anchored to the movable part, and a common fixed anchorage region anchored to the fixed part, whereby the mechanical resistance of the connection elements is negligible. The sub-arms have a width equal to a sub-multiple of the width necessary in case of a single connection element for the latter to have a preset electrical resistance, which is determined in the design. In particular, the width of the sub-arms is at least equal to the width of the single connection element divided by the number of sub-arms.
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Citations
19 Claims
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1. A microelectromechanical device comprising:
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a movable part and a fixed part separated by trenches and mechanically connected by spring elements; and
an electrical connection structure including a connection element extending between said movable part and said fixed part, said connection element formed of electrically conductive material and including a plurality of sub-arms connected in parallel and having a common movable anchorage region anchored to said movable part and a common fixed anchorage region anchored to said fixed part. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A hard disk driver comprising:
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a suspension;
a microactuator fixed to said suspension, said microactuator comprising;
a movable part and a fixed part being separated from each other by trenches and being mechanically connected to each other by spring elements, and an electrical connection structure including a connection element extending between said movable part and said fixed part and being formed of electrically conductive material, said connection element being formed with plural sub-arms connected in parallel and having a common movable anchorage region anchored to said movable part and a common fixed anchorage region anchored to said fixed part; and
a read/write head connected to said microactuator. - View Dependent Claims (10, 11)
wherein each said connection element is connected to a respective one of said movable anchorage regions and to a respective one of said fixed anchorage regions.
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12. A microelectromechanical electrical interconnection structure comprising:
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a stator formed in a substrate;
a rotor formed in said substrate and spaced apart from said stator;
a plurality of suspension elements movably suspending said rotor relative to said stator;
an electrical connection structure extending between and electrically coupling said rotor and said stator, said electrical connection structure including a connection arm having a plurality of electrically conductive sub-arms formed in parallel between a common movable anchorage point of said rotor and a stationary anchorage point of said stator and having a rectangular cross-section that minimizes structural resistance to relative planar motion between said rotor and said stator. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19)
each of said rotor and said stator further comprises a substantially planar structure formed in said substrate; and
one of said rotor and said stator is formed surrounding an other of said rotor and said stator in said substrate.
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18. The structure according to claim 17, wherein said rotor and said stator are formed for relative rotational planar motion.
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19. The structure according to claim 17, wherein said rotor and said stator are formed for relative transverse planar motion.
Specification