Feature quality in array fabrication
First Claim
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1. An apparatus for fabricating an array of features, comprising:
- a drop deposition system to deposit multiple reagent droplets for each of multiple target feature locations so as to form the array of features;
an image capture system which provides a set of multiple images of a target feature location, each image of the set representing the target feature location following deposition of a corresponding subset of multiple droplets for that feature; and
a processor which generates an overlay composite from the image set which comprises a region of overlap of the droplet sub-sets.
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Abstract
A method, and apparatus and computer program products for executing the method. The method includes obtaining a set of multiple images of a target feature location on an array of multiple features, each image of the set representing the target feature location following deposition of a corresponding sub-set of multiple droplets for that feature. An overlay composite may be generated from the image set. The overlay composite may be used as a quality control tool, or in interrogating the array or processing results of the interrogation.
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6 Claims
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1. An apparatus for fabricating an array of features, comprising:
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a drop deposition system to deposit multiple reagent droplets for each of multiple target feature locations so as to form the array of features;
an image capture system which provides a set of multiple images of a target feature location, each image of the set representing the target feature location following deposition of a corresponding subset of multiple droplets for that feature; and
a processor which generates an overlay composite from the image set which comprises a region of overlap of the droplet sub-sets. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification