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Feature quality in array fabrication

  • US 6,587,579 B1
  • Filed: 01/26/2000
  • Issued: 07/01/2003
  • Est. Priority Date: 01/26/2000
  • Status: Expired due to Fees
First Claim
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1. An apparatus for fabricating an array of features, comprising:

  • a drop deposition system to deposit multiple reagent droplets for each of multiple target feature locations so as to form the array of features;

    an image capture system which provides a set of multiple images of a target feature location, each image of the set representing the target feature location following deposition of a corresponding subset of multiple droplets for that feature; and

    a processor which generates an overlay composite from the image set which comprises a region of overlap of the droplet sub-sets.

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