Pressure transducer with compensation for thermal transients

• US 6,588,280 B1
• Filed: 04/22/2002
• Issued: 07/08/2003
• Est. Priority Date: 04/22/2002
• Status: Expired due to Term

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Mathew, Santhi E., Quigley, Claudia J., Mindlin, Leonid, Poulin, James M.
• Primary Examiner(s): OEN, WILLIAM L
• Application Number:
  US10/127,630
• Time in Patent Office: 442 Days
• Field of Search: 737/08, 737/18, 737/24, 737/53, 361/283.1, 361/283.2, 361/283.3, 361/283.4
• US Class Current: 73/708
• CPC Class Codes: G01L 9/0072 using variations in capacitance
• CPC Class Codes: G01L 9/125 with temperature compensating means non electric temperature compensating means G01L19/04

Abstract

A method is disclosed for providing transient temperature compensation in a pressure transducer. The transducer includes a capacitive pressure sensor, the pressure sensor including a diaphragm, at least part of the diaphragm moving in response to changes in a pressure. The transducer may further include an electronic circuit which generates an uncompensated output signal representative of the pressure. The disclosed method generates a compensated output signal according to a function of the uncompensated output signal and a difference between a temperature of the pressure sensor and a temperature of the ambient environment.

Claims

1. A method of providing temperature compensation in a pressure transducer, comprising:

(A) providing a pressure transducer, the transducer including;

(a) a capacitive pressure sensor, the pressure sensor including a diaphragm, at least part of the diaphragm moving in response to changes in a pressure;

(b) an electronic circuit, the circuit generating an uncompensated output signal representative of the pressure;

(B) generating a first output signal representative of a temperature of an ambient environment;

(C) generating a second output signal representative of a temperature of the pressure sensor;

(D) generating a temperature compensated output signal according to a first function of the uncompensated output signal, and a difference between the first and second output signals.

2. A method according to claim 1, further comprising generating the compensated output signal by summing the uncompensated output signal with a second function of the difference between the first and second output signals.

3. A method according to claim 2, wherein the second function of the difference between the first and second output signals comprises a product of a constant value and a third function of the difference between the first and second output signals.

4. A method according to claim 3, wherein the third function comprises the second output signal minus the first output signal plus an offset value.

5. A method according to claim 3, wherein the constant value is a quotient of a first number and a second number, the first number representing a change in the uncompensated signal measured during a period when the temperature of the ambient environment is changing, the second number representing a change in the third function measured during the period.

6. A method of providing temperature compensation in a pressure transducer, comprising:

(A) providing a pressure transducer, the transducer including;

(a) a capacitive pressure sensor, the pressure sensor including a diaphragm, at least part of the diaphragm moving in response to changes in a pressure;

(b) an electronic circuit, the circuit generating an uncompensated output signal representative of the pressure;

(B) generating a compensated output signal by summing the uncompensated output signal and a transient temperature compensation term, the transient temperature compensation term being a function of a temperature of the pressure sensor and of the temperature of an ambient environment.

7. A method according to claim 6, the transient temperature compensation term being a product of a first term and a second term, the first term being a gain, the second term being a function of a difference between the temperature of the pressure sensor and of the temperature of the ambient environment.

8. A method according to claim 7, wherein the function of the difference between the temperature of the pressure sensor and of the temperature of the ambient environment comprises the temperature of the pressure sensor minus the temperature of the ambient environment plus an offset.

9. A method according to claim 7, wherein the function of the difference between the temperature of the pressure sensor and of the temperature of the ambient environment comprises subtracting a signal representative of the temperature of the ambient environment from a signal representative of the temperature of the pressure sensor and adding an offset.