Pressure transducer with compensation for thermal transients
First Claim
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1. A method of providing temperature compensation in a pressure transducer, comprising:
- (A) providing a pressure transducer, the transducer including;
(a) a capacitive pressure sensor, the pressure sensor including a diaphragm, at least part of the diaphragm moving in response to changes in a pressure;
(b) an electronic circuit, the circuit generating an uncompensated output signal representative of the pressure;
(B) generating a first output signal representative of a temperature of an ambient environment;
(C) generating a second output signal representative of a temperature of the pressure sensor;
(D) generating a temperature compensated output signal according to a first function of the uncompensated output signal, and a difference between the first and second output signals.
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Abstract
A method is disclosed for providing transient temperature compensation in a pressure transducer. The transducer includes a capacitive pressure sensor, the pressure sensor including a diaphragm, at least part of the diaphragm moving in response to changes in a pressure. The transducer may further include an electronic circuit which generates an uncompensated output signal representative of the pressure. The disclosed method generates a compensated output signal according to a function of the uncompensated output signal and a difference between a temperature of the pressure sensor and a temperature of the ambient environment.
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Citations
9 Claims
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1. A method of providing temperature compensation in a pressure transducer, comprising:
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(A) providing a pressure transducer, the transducer including;
(a) a capacitive pressure sensor, the pressure sensor including a diaphragm, at least part of the diaphragm moving in response to changes in a pressure;
(b) an electronic circuit, the circuit generating an uncompensated output signal representative of the pressure;
(B) generating a first output signal representative of a temperature of an ambient environment;
(C) generating a second output signal representative of a temperature of the pressure sensor;
(D) generating a temperature compensated output signal according to a first function of the uncompensated output signal, and a difference between the first and second output signals. - View Dependent Claims (2, 3, 4, 5)
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6. A method of providing temperature compensation in a pressure transducer, comprising:
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(A) providing a pressure transducer, the transducer including;
(a) a capacitive pressure sensor, the pressure sensor including a diaphragm, at least part of the diaphragm moving in response to changes in a pressure;
(b) an electronic circuit, the circuit generating an uncompensated output signal representative of the pressure;
(B) generating a compensated output signal by summing the uncompensated output signal and a transient temperature compensation term, the transient temperature compensation term being a function of a temperature of the pressure sensor and of the temperature of an ambient environment. - View Dependent Claims (7, 8, 9)
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Specification