Sputtering target, method of making same, and high-melting metal powder material
First Claim
1. A sputtering target obtained by performing pressure sintering of a powder obtained by introducing a powder material mainly composed of a refractory metal into a thermal plasma into which a hydrogen gas has been introduced, said powder material being mainly composed of Ta or Ru and the shape of particles of said powder material being spherical or analogous to a sphere.
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Abstract
There is provided a method of making a high-melting metal powder which has high purity and excellent formability and, particularly, of a metal powder of spherical particles made of Ta, Ru, etc. having a higher melting point than iron. There is also provided a target of high-melting metal or its alloy, which is made by the sintering under pressure of these powders and which has high purity and a low oxygen concentration and shows high density and a fine and uniform structure. A powder metal material mainly composed of a high-melting metal material is introduced into a thermal plasma into which hydrogen gas has been introduced, thereby to accomplish refining and spheroidizing. Further, an obtained powder is pressed under pressure by hot isostatic pressing, etc.
95 Citations
5 Claims
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1. A sputtering target obtained by performing pressure sintering of a powder obtained by introducing a powder material mainly composed of a refractory metal into a thermal plasma into which a hydrogen gas has been introduced, said powder material being mainly composed of Ta or Ru and the shape of particles of said powder material being spherical or analogous to a sphere.
- 2. A refractory metal powder material, said powder having a purity of not less than 99.999%, an oxygen concentration of not more than 100 ppm, and having a shape of a sphere or analogous thereto.
Specification