Current confinement structure for vertical cavity surface emitting laser

• US 6,589,805 B2
• Filed: 03/26/2002
• Issued: 07/08/2003
• Est. Priority Date: 03/26/2001
• Status: Expired due to Fees

• Current Assignee: Gazillion BITS Incorporated
• Original Assignee: Gazillion BITS Incorporated
• Inventors: Wang, Shih-Yuan, Zhu, Zuhua
• Primary Examiner(s): Mulpuri, Savitri
• Application Number:
  US10/106,991
• Publication Number:
  US 20020177250A1
• Time in Patent Office: 469 Days
• Field of Search: 216/2, 216/39, 216/17, 438/22, 438/24, 438/34, 438/39, 438/40, 438/42, 438/43, 438/46, 438/718, 438/738, 438/739, 438/745
• US Class Current: 438/22
• CPC Class Codes: H01S 2301/166 Single transverse or lateral mode
• CPC Class Codes: H01S 2301/176 Specific passivation layers on surfaces other than the emission facet
• CPC Class Codes: H01S 5/18308 having a special structure for lateral current or light confinement
• CPC Class Codes: H01S 5/18316 Airgap confined
• CPC Class Codes: H01S 5/18333 only above the active layer
• CPC Class Codes: H01S 5/2063 obtained by particle bombardment
• CPC Class Codes: H01S 5/2086 lateral etch control, e.g. mask induced
• CPC Class Codes: H04B 10/503 Laser transmitters

Abstract

A vertical cavity surface emitting laser (VCSEL) structure and fabrication method therefor are described in which a subsurface air, gas, or vacuum current confinement method is used to restrict the area of electrical flow in the active region. Using vertical hollow shafts to access a subsurface current confinement layer, a selective lateral etching process is used to form a plurality of subsurface cavities in the current confinement layer, the lateral etching process continuing until the subsurface cavities laterally merge to form a single subsurface circumferential cavity that surrounds a desired current confinement zone. Because the subsurface circumferential cavity is filled with air, gas, or vacuum, the stresses associated with oxidation-based current confinement methods are avoided. Additionally, because the confinement is achieved by subsurface cavity structures, overall mechanical strength of the current-confining region is maintained.

Claims

1. A method of fabricating a current confinement structure into a partially-constructed VCSEL, said partially-constructed VCSEL having an active layer disposed between an upper set of material layers thereabove and a lower set of material layers therebelow, said partially-constructed VCSEL further comprising a current confinement layer positioned below the upper set of material layers and immediately above the active layer, comprising:

forming at least three hollow vertical shafts extending downward from a top surface of the upper set of material layers to at least a bottom of the current confinement layer, the vertical shafts being laterally positioned outside a desired current confinement zone; and

etching with a selective etchant that laterally etches the current confinement layer substantially faster than it etches any of the upper material layers and substantially faster than it etches the active layer, the current confinement layer thereby being etched away outwardly from an axis of each vertical shaft so as to form a subsurface void around each hollow vertical shaft at the current confinement layer, said etching continuing until the subsurface cavities merge together to form a single subsurface circumferential cavity around the desired current confinement zone.

2. The method of claim 1, further comprising, prior to said forming the at least three vertical shafts, implanting said upper material layers and said current confinement layer in lateral areas lying outside the current confinement zone.

3. The method of claim 2, further comprising subjecting the partially-constructed VCSEL to a predetermined surrounding environment while sealing off the hollow vertical shafts, said predetermined surrounding environment being sufficient to cause the subsurface circumferential cavity to contain a non-solid selected from the group consisting of:

air, vacuum, and inert gas.

4. The method of claim 3, wherein the hollow vertical shafts are sealed off with one or more sealing materials selected from the group consisting of:

a polyimide material, a metallization material, and a dielectric material.

5. The method of claim 1, wherein M>

2 hollow vertical shafts are formed, the hollow vertical shafts being spaced in a roughly circular arrangement outside of the desired current confinement zone and being angularly separated by roughly 360/M degrees around a center of the roughly circular arrangement.

6. The method of claim 5, wherein the number M of hollow vertical shafts is equal to 4.

7. The method of claim 1, wherein the current confinement layer comprises an oxidation-resistant material.

8. The method of claim 1, wherein the current confinement layer comprises a low-bandgap semiconductor material.

9. The method of claim 1, wherein the current confinement layer comprises InGaAs.