Microelectromechanical flexible membrane electrostatic valve device and related fabrication methods
First Claim
1. A MEMS (Micro Electro Mechanical System) valve driven by electrostatic forces, comprising:
- a substrate defining a generally planar surface having an aperture therethrough;
a substrate electrode disposed upon said substrate;
a non-hinged, moveable membrane generally overlying said substrate electrode and said aperture, the membrane comprising an electrode element and a biasing element, wherein the moveable membrane includes a fixed portion attached directly to the generally planar surface of said substrate and a flap-like distal portion extending from the fixed portion, the distal portion being biased to at least partially curl in a non-actuated state and moveable with respect to said substrate electrode; and
at least one resiliently compressible dielectric layer disposed between said substrate electrode and said membrane electrode element, wherein said moveable membrane responds to a voltage differential established between said substrate electrode and said moveable membrane electrode to move said membrane toward said aperture to seal said aperture so as to prevent flow therethrough.
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Accused Products
Abstract
A MEMS (Micro Electro Mechanical System) valve device driven by electrostatic forces is provided. This valve device can provide for fast actuation, large valve force and large displacements while utilizing minimal power. The MEMS valve device includes a substrate having an aperture formed therein, a substrate electrode, a moveable membrane that overlies the aperture and has an electrode element and a biasing element. Additionally, at least one resiliently compressible dielectric layer is provided to insure electrical isolation between the substrate electrode and electrode element of the moveable membrane. In operation, a voltage differential is established between the substrate electrode and the electrode element of the moveable membrane to move the membrane relative to the aperture to thereby controllably adjust the portion of the aperture that is covered by the membrane. Additional embodiments provide for the resiliently compressible dielectric layer to be formed on either or both the substrate electrode and the moveable membrane and provide for either or both the valve seat surface and the valve seal surface. In yet another embodiment the resiliently compressible dielectric layer(s) have a textured surface; either at the valve seat, the valve seal or at both surfaces. In another embodiment of the invention a pressure-relieving aperture is defined within the substrate and is positioned to underlie the moveable membrane. Alternatively, additional embodiments of the present invention provide for MEMS valve arrays driven by electrostatic forces. The MEMS valve array comprises a substrate having a plurality of apertures defined therein. A method for making the MEMS valve device is also provided.
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Citations
28 Claims
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1. A MEMS (Micro Electro Mechanical System) valve driven by electrostatic forces, comprising:
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a substrate defining a generally planar surface having an aperture therethrough;
a substrate electrode disposed upon said substrate;
a non-hinged, moveable membrane generally overlying said substrate electrode and said aperture, the membrane comprising an electrode element and a biasing element, wherein the moveable membrane includes a fixed portion attached directly to the generally planar surface of said substrate and a flap-like distal portion extending from the fixed portion, the distal portion being biased to at least partially curl in a non-actuated state and moveable with respect to said substrate electrode; and
at least one resiliently compressible dielectric layer disposed between said substrate electrode and said membrane electrode element, wherein said moveable membrane responds to a voltage differential established between said substrate electrode and said moveable membrane electrode to move said membrane toward said aperture to seal said aperture so as to prevent flow therethrough. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. A MEMS valve driven by electrostatic forces, comprising:
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a substrate having a generally planar surface;
a first substrate dielectric layer disposed on the generally planar surface of said substrate;
a substrate electrode disposed upon said first substrate dielectric layer;
a second substrate dielectric layer disposed upon said substrate electrode and having a generally planar surface, wherein said substrate, said first substrate dielectric layer, said substrate electrode and said second substrate dielectric layer cooperate to define an aperture therethrough; and
a non-hinged, moveable membrane generally overlying said substrate electrode and said aperture, the moveable membrane comprising a first biasing layer, a membrane electrode layer disposed on said first biasing layer and a second biasing layer disposed on said membrane electrode layer, wherein the moveable membrane includes a fixed portion attached directly to the generally planar surface of said second substrate dielectric layer and a flap-like distal portion extending from the fixed portion, the distal portion being biased to at least partially curl in a non-actuated state and moveable with respect to said substrate electrode, wherein said moveable membrane responds to a voltage differential established between said substrate electrode and said moveable membrane electrode to move said membrane toward said aperture to seal said aperture so as to prevent flow therethrough.
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24. A MEMS valve array driven by electrostatic forces, comprising:
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a substrate that defines a generally planar surface having a plurality of apertures therethrough;
a substrate electrode disposed upon said substrate;
a moveable membrane generally overlying said substrate electrode and said plurality of apertures, the moveable membrane comprising an electrode element and a biasing element, wherein the moveable membrane includes a fixed portion attached directly to the generally planar surface of said substrate and a flap-like distal portion extending from the fixed portion, the distal portion being biased to at least partially curl in a non-actuated state and moveable with respect to said substrate electrode; and
at least one dielectric layer disposed between said substrate electrode and said electrode element, wherein said moveable membrane responds to a voltage differential established between said substrate electrode and said moveable membrane electrode to move said membrane toward said plurality of apertures to thereby controllably adjust the quantity of the plurality of apertures sealed by said moveable membrane so as to prevent flow therethrough.
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25. A MEMS valve array driven by electrostatic forces, comprising:
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a substrate that defines a generally planar surface having a plurality of apertures therethrough;
a plurality of substrate electrodes disposed upon said substrate, wherein each substrate electrode has a corresponding aperture;
a moveable membrane generally overlying said plurality of substrate electrodes and said plurality of apertures, the moveable membrane comprising an electrode element and a biasing element, wherein the moveable membrane includes a fixed portion attached directly to the generally planar surface of said substrate and a flap-like distal portion extending from the fixed portion, the distal portion being biased to at least partially curl in the non-actuated state and moveable with respect to said plurality of substrate electrodes; and
at least one dielectric layer disposed between said substrate electrode and said electrode element, wherein said moveable membrane responds to a voltage differential established between one or more of said substrate electrodes and said electrode element to move said membrane toward said plurality of apertures to thereby controllably adjust the quantity of said plurality of apertures sealed by said moveable membrane so as to prevent flow therethrough. - View Dependent Claims (26, 27)
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28. A MEMS valve array driven by electrostatic forces, comprising:
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a substrate that defines a generally planar surface having a plurality of apertures therethrough, the plurality of apertures disposed in generally parallel, grid-like, formation;
a substrate electrode disposed upon said substrate;
a plurality of moveable membranes that each generally overlie a portion of said substrate electrode and a corresponding aperture of said plurality of apertures, each moveable membranes comprising an electrode element and a biasing element, wherein each moveable membrane includes a fixed portion attached directly to the generally planar surface of said substrate and a flap-like distal portion extending from the fixed portion, the distal portion being biased to at least partially curl in a non-actuated state and moveable with respect to said substrate electrode; and
at least one dielectric layer disposed between said substrate electrode and said electrode element, wherein at least one moveable membrane responds to a voltage differential established between said substrate electrode and at least one electrode element to move said membrane toward said corresponding aperture to thereby controllably adjust the quantity of the plurality of apertures sealed by said moveable membranes so as to prevent flow therethrough.
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Specification