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Method and an apparatus for measuring the flying height with sub-nanometer resolution

  • US 6,590,667 B1
  • Filed: 07/24/2000
  • Issued: 07/08/2003
  • Est. Priority Date: 07/27/1999
  • Status: Active Grant
First Claim
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1. A method for measuring a distance between a sliding object and a transparent disk with sub-nanometer resolution, wherein the distance is regarded as a nanometer specimen, comprising steps of:

  • a) providing a sampling light beam with adjustable initial polarization state by phase modulation, and with variable incident angles, which is controlled by an optical control subsystem, relative to said air film and forming a first reflected light beam of said sampling light beam relative to said air film;

    b) guiding said first reflected light beam of said sampling light beam through said optical control subsystem to form a return light beam traveling in the opposite direction to said first reflected light beam, wherein said return light beam being incident to the specimen again at said detecting site, therefore a second reflected light beam of said returned light beam is formed, while said second reflected light beam exits from the said optical control subsystem in the opposite direction to the said sampling light beam, it is to form a signal light beam;

    c) guiding said signal light beam through an analyzer and the detectors for detection of intensity and phase change of said signal light beam; and

    d) partially dividing said signal light beam to form an observing light beam, which is guided to a microscope and used as a light source for observation of said detecting site on said specimen.

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