Micro-mechanical polarization-based modulator

• US 6,590,695 B1
• Filed: 02/26/2002
• Issued: 07/08/2003
• Est. Priority Date: 02/26/2002
• Status: Expired due to Term

• Current Assignee: Eastman Kodak Company
• Original Assignee: Eastman Kodak Company
• Inventors: Kurtz, Andrew F., Ramanujan, Sujatha
• Primary Examiner(s): Schwartz, Jordan M.
• Assistant Examiner(s): STULTZ, JESSICA T
• Application Number:
  US10/084,716
• Time in Patent Office: 497 Days
• Field of Search: 359/291, 359/298, 359/256, 359/301, 359/247-249, 359/250-258, 359/483, 359/259, 359/295, 359/245
• US Class Current: 359/291
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 5/3058 comprising electrically conductive elements, e.g. wire grids, conductive particles

Abstract

A micro-mechanical spatial light modulator for modulating a polarization state of an incident beam (20) comprises a plurality of rotatable elements. Each of the rotatable elements (170) comprises a plurality of structures (300). The structures are spaced apart at sub-wavelength distances relative to the wavelength of the incident beam (20). Each of the plurality of structures (300) exhibits an interaction with the polarization state of the incident beam. An actuator is coupled to each of the rotatable elements. The actuator is capable of controllably positioning the rotatable element to any two positions, and each of the positions has a corresponding polarization state. A substrate (110) supports each plurality of rotatable elements and houses each actuator.

Claims

1. A micro-mechanical spatial light modulator for modulating a polarization state of an incident beam comprising:

a plurality of rotatable elements, wherein each of said rotatable element comprises an optic with a polarization optical layer;

wherein each of said polarization optical layers are comprised of a plurality of optical micro-structures fabricated in a pattern with features spaced apart within sub-wavelength distances relative to a wavelength of said incident beam, wherein each of said plurality of structures interacts with said polarization state of said incident beam;

a plurality of micro-motors coupled to each of said rotatable element, wherein said micro-motors are capable of controllably positioning said rotatable element to any of a plurality of positions, wherein each of said positions has a corresponding polarization state;

wherein each of said polarization optical layers, are formed on said micro-motors; and

a substrate for supporting each of said plurality of rotatable elements and said micro-motors.

2. The spatial light modulator of claim 1 wherein each of said micro-motors comprises a stator with a series of stator poles and a rotor with a series of rotor poles.

3. The spatial light modulator of claim 2 wherein said polarization optical layers are formed on top of each of said rotors.

4. The spatial light modulator of claim 2 wherein a mask covers an upper flange of a flange bearing of each of said rotors.

5. The spatial light modulator of claim 4 wherein said mask absorbs light.

6. The spatial light modulator of claim 4 wherein said mask scatters light.

7. The spatial light modulator of claim 1 wherein each of said micro-motors is moved electrostatically.

8. The spatial light modulator of claim 1 wherein said optic, including said polarization optical layer, overhangs a rotor and a stator of said micro-motor.

9. The spatial light modulator of claim 1 wherein a light shield covers portions of internal surfaces of said micro-motor which might otherwise reflect light in an undesirable manner.

10. The spatial light modulator of claim 9 wherein said light shield absorbs light.

11. The spatial light modulator of claim 9 wherein said light shield scatters light.

12. The spatial light modulator of claim 1 wherein:

each of said polarization optical layers exhibits form birefringence and functions as a waveplate, providing a known retardation phase change; and

a reflective layer located beneath each of said polarization optical layers.

13. The spatial light modulator of claim 12, wherein said waveplate is a quarter wave plate.

14. The spatial light modulator of claim 12, wherein said optical layers are optimized for operation in the visible spectrum.

15. The spatial light modulator of claim 12 wherein said structures are spaced apart at a pitch of p˜

λ

/4 or less.

16. The spatial light modulator of claim 1 wherein:

said polarization optical layers comprise a wire grid polarizer with a pattern of alternating wires and grooves; and

light absorbing layers are located beneath said polarization optical layers.

17. The spatial light modulator of claim 16, wherein wires comprising said wire grid polarizer comprise a stratified substructure of alternating metal and dielectric layers.

18. The spatial light modulator of claim 16 wherein said structures are spaced apart at a pitch of p˜

λ

/4 or less.

22. The spatial light modulator of claim 17 wherein:

said optical micro-structures comprise a wire grid polarizer with a pattern of alternating wires and grooves; and

a light absorbing layer is located beneath each of said structures and attached to a rotor of said micro-motor by means of a support.

19. A micro-mechanical spatial light modulator for modulating a polarization state of an incident beam comprising:

a rotatable element supporting an optic with a polarization optical layer, said polarization optical layer comprising a plurality of optical micro-structures fabricated in a pattern, wherein said optical micro-structures are spaced apart at sub-wavelength distance relative to a wavelength of said incident beam, wherein said optical micro-structures exhibits an interaction with said polarization state of said incident beam; and

a micro-motor coupled to said rotatable element, said micro-motor capable of controllably positioning said rotatable element to any of at least two positions, wherein each of said positions has a corresponding polarization state.

20. The spatial light modulator of claim 19 wherein said polarization optical layers are formed on top of rotors of said micro-motor.

21. The spatial light modulator of claim 19 wherein:

said optical micro-structures exhibit form birefringence and function as a waveplate, providing a known retardation phase change; and

a reflective layer located beneath each of said structures and attached to rotors of said micro-motor by means of a support.

23. A micro-mechanical spatial light modulator for modulating a polarization state of an incident beam comprising:

a plurality of micro-motors each comprised of a rotor and a stator;

a plurality of optical elements each of which is mounted on each of said rotors, wherein each of said optical elements comprises a plurality of spaced apart sub-wavelength optical micro-structures, wherein said optical micro-structures are fabricated in a pattern; and

a driver which provides a signal to each of said micro-motors which causes each of said micro-motors to rotate to a plurality of positions.

24. The spatial light modulator of claim 23 wherein said optical elements are formed on top of said rotors.

25. The spatial light modulator of claim 23 wherein:

said optical micro-structures exhibit form birefringence and function as a waveplate, providing a known retardation phase change; and

a reflective layer located beneath each of said optical elements attached to said rotor by means of a support.

26. The spatial light modulator of claim 23 wherein:

said optical elements comprise a wire grid polarizer with a pattern of alternating wires and grooves; and

a light absorbing layer located beneath each of said optical elements and attached to said rotors by means of a support.

27. A spatial light modulator as in claim 23 wherein each of said plurality of optical elements interacts with said polarization state of said incident beam in relation to an amount of rotation of said optical element.

28. A micro-mechanical spatial light modulator for modulating a polarization state of an incident beam comprising:

a plurality of rotatable elements wherein each of said rotatable element comprises an optic with a polarization optical layer;

wherein said polarization optical layer, comprising optical micro-structures fabricated in a pattern, interacts with said polarization state of said incident beam;

a micro-motor is coupled to each of said rotatable element, said micro-motor capable of controllably positioning said rotatable element to any of a plurality of positions, wherein each of said positions has a corresponding polarization state;

wherein each of said polarization optical layers are formed on said micro-motor; and

a substrate for supporting each of said plurality of rotatable elements and for housing each of said micro-motors.

29. A micro-mechanical spatial light modulator for modulating a polarization state of an incident beam comprising:

a plurality of rotatable elements, wherein each of said rotatable elements comprises an optic with a polarization optical layer;

wherein each of said polarization optical layers are comprised of a plurality of optical micro-structures spaced apart within sub-wavelength distances relative to a wavelength of said incident beam, wherein said optical micro-structures are fabricated with a defined pitch, width, and thickness, and wherein each of said plurality of optical micro-structures interacts with said polarization state of said incident beam;

a plurality of micro-motors coupled to each of said rotatable element, wherein said micro-motors are capable of controllably positioning said rotatable element to any of a plurality of positions, wherein each of said positions has a corresponding polarization state;

wherein each of said polarization optical layers, are formed on said micro-motors;

wherein each of said micro-motors rotates between at least a first and second position to modulate said incident beam; and

a substrate for supporting each of said plurality of rotatable elements and said micro-motors.