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Cleaning method and cleaning equipment

  • US 6,592,678 B1
  • Filed: 10/12/2000
  • Issued: 07/15/2003
  • Est. Priority Date: 09/09/1997
  • Status: Expired due to Fees
First Claim
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1. A cleaning method comprising the steps of:

  • dipping an object to be treated in a cleaning bath into which pure water is continuously supplied through a cleaning solution supply pipe, said cleaning solution supply pipe connecting the cleaning bath to a pure water supply source;

    supplying a cleaning solution that is composed by injecting a chemical from a chemical storing container into the pure water flowing through the cleaning solution supply pipe to the cleaning bath;

    detecting a temperature of the cleaning solution in the cleaning bath using temperature detecting means;

    forming a compared signal between a detection signal outputted from the temperature detecting means and a previously given temperature information; and

    controlling an amount of the chemical injected into the pure water on the basis of the temperature of the cleaning solution to thereby control the concentration of the chemical in the cleaning solution.

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