Semiconductor device having thin film transistors

• US 6,593,592 B1
• Filed: 01/28/2000
• Issued: 07/15/2003
• Est. Priority Date: 01/29/1999
• Status: Expired due to Term

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Fukunaga, Takeshi, Ikeda, Takayuki, Yamazaki, Shunpei
• Primary Examiner(s): ECKERT II, GEORGE C
• Application Number:
  US09/493,411
• Time in Patent Office: 1,264 Days
• Field of Search: 257/59, 257/67, 257/68, 257/71, 257/72
• US Class Current: 257/71
• CPC Class Codes: H01L 27/1237 with a different composition, shape, layout or thickness of the gate insulator in different devices
• CPC Class Codes: H01L 27/124 with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits wiring structures per se H01L23/52
• CPC Class Codes: H01L 27/1255 integrated with passive devices, e.g. auxiliary capacitors
• CPC Class Codes: H01L 27/1259 Multistep manufacturing methods
• CPC Class Codes: H01L 29/66757 Lateral single gate single channel transistors with non-inverted structure, i.e. the channel layer is formed before the gate
• CPC Class Codes: H01L 29/78621 with LDD structure or an extension or an offset region or characterised by the doping profile
• CPC Class Codes: H01L 29/78627 with a significant overlap between the lightly doped drain and the gate electrode, e.g. GOLDD
• CPC Class Codes: H01L 29/78633 with a light shield
• CPC Class Codes: H01L 29/78645 with multiple gate
• CPC Class Codes: H01L 29/78675 with normal-type structure, e.g. with top gate

Abstract

There is provided a semiconductor device including a storage capacitor having sufficient capacity and a minimum area. The storage capacitor of a pixel region has such a structure that a first storage capacitor and a second storage capacitor are stacked one on top of the other and are connected in parallel with each other. At that time, the first storage capacitor comprises a first capacitance electrode formed in the same layer as a drain region, a first dielectric, and a second capacitance electrode formed in the same layer as a gate wiring. The second storage capacitor comprises the second capacitance electrode, a second dielectric, and a third capacitance electrode formed in the same layer as a light-shielding film.

Claims

1. A semiconductor device comprising:

a pixel portion including at least one pixel TFT, at least one storage capacitor, and a pixel electrode connected to the pixel TFT; and

a driver circuit portion for driving said pixel portion,

wherein the pixel portion comprises;

an active layer of the pixel TFT;

first conductive patterns over said active layer with an insulating film interposed therebetween;

a first interlayer insulating film over said first conductive patterns;

light-shielding films over the first conductive patterns with the first insulating film interposed therebetween;

a second interlayer insulating film over the light-shielding films;

a source wiring and a drain wiring on said second interlayer insulating film;

a third interlayer insulating film covering said source wiring and said drain wiring; and

a pixel electrode on said third interlayer insulating film,

wherein said storage capacitor comprises a first storage capacitor and a second storage capacitor connected in parallel with each other,

wherein said first storage capacitor comprises a portion of the active layer of said pixel TFT, the insulating film, and one of the first conductive patterns, and

wherein said second storage capacitance comprises said one of the first conductive patterns, the first interlayer insulating film, and one of the light shielding films.

2. A device according to claim 1, wherein the insulating film comprises silicon, and has a thickness of 5 to 50 nm.

3. A device according to claim 1, wherein the thickness of the insulating film in the pixel region is equal to a thickness of a gate insulating film of a TFT included in said driver circuit portion.

4. A device according to claim 1, wherein said active layer and the portion comprise a semiconductor film.

5. A device according to claim 1, wherein said pixel electrode is selected from an anode and a cathode of an EL element.

6. An electronic instrument comprising a semiconductor device according to claim 5 as a display portion, wherein said electronic instrument is selected from the group consisting of a video camera, a digital camera, a projector, a projection television, a goggle type display, a head mount display, a navigation system, an acoustic reproduction device, a note-type personal computer, a game equipment, a portable information terminal, a mobile computer, a portable telephone, a portable-type game equipment, an electronic book, and an image reproduction devices having a recording medium.

7. An electronic instrument comprising a semiconductor device according to claim 1 as a display portion, wherein said electronic instrument is selected from the group consisting of a video camera, a digital camera, a projector, a projection television, a goggle type display, a head mount display, a navigation system, an acoustic reproduction device, a note-type personal computer, a game equipment, a portable information terminal, a mobile computer, a portable telephone, a portable-type game equipment, an electronic book, and an image reproduction devices having a recording medium.

8. A semiconductor device comprising:

an active layer;

a gate wiring provided opposite to said active layer with a first insulating film interposed therebetween;

a first interlayer insulating film covering said gate wiring;

an opening portion provided in said first interlayer insulating film;

a second insulating film covering said opening portion;

a light-shielding film provided opposite to said gate wiring with the second insulating film interposed therebetween;

a second interlayer insulating film covering said light-shielding film;

a source wiring and a drain wiring on said second interlayer insulating film;

a third interlayer insulating film covering said source wiring and said drain wiring; and

a pixel electrode on said third interlayer insulating film,

wherein said active layer and said gate wiring form a first storage capacitor with said first insulating film interposed therebetween,

wherein said gate wiring and said light-shielding film form a second storage capacitor with said second insulating film interposed therebetween, and

wherein said active layer and said light-shielding film are electrically connected through said pixel electrode.

9. A device according to claim 8, wherein at least one of said first and said second insulating films comprises silicon, and has a thickness of 5 to 50 nm.

10. A device according to claim 8, wherein the thickness of said first insulating film is equal to the thickness of gate insulating films of at least some of TFTs which are included in a driver circuit.

11. A device according to claim 8, wherein said pixel electrode is selected from an anode and a cathode of an EL element.

12. An electronic instrument comprising a semiconductor device according to claim 11 as a display portion, wherein said electronic instrument is selected from the group consisting of a video camera, a digital camera, a projector, a projection television, a goggle type display, a head mount display, a navigation system, an acoustic reproduction device, a note-type personal computer, a game equipment, a portable information terminal, a mobile computer, a portable telephone, a portable-type game equipment, an electronic book, and an image reproduction devices having a recording medium.

13. An electronic instrument comprising a semiconductor device according to claim 8 as a display portion, wherein said electronic instrument is selected from the group consisting of a video camera, a digital camera, a projector, a projection television, a goggle type display, a head mount display, a navigation system, an acoustic reproduction device, a note-type personal computer, a game equipment, a portable information terminal, a mobile computer, a portable telephone, a portable-type game equipment, an electronic book, and an image reproduction devices having a recording medium.

14. A semiconductor device comprising:

a semiconductor island over a substrate;

first conductive patterns adjacent to the semiconductor island with a first insulating film interposed therebetween;

a second insulating film over the first conductive patterns;

second conductive patterns over the second insulating film;

source and drain wirings over the second conductive patterns with a third insulating film interposed therebetween; and

a pixel electrode over the source and drain wirings, the pixel electrode electrically connected to the semiconductor island and one of the second conductive patterns,

wherein a first storage capacitor and a second storage capacitor are formed over the substrate, the first storage capacitor comprising a portion of the semiconductor island, the first insulating film, and one of the first conductive patterns and the second storage capacitor comprising the one of the first conductive patterns, the second insulating film, and another one of the second conductive patterns.

15. A device according to claim 14, wherein at least one of said first and said second insulating films comprise silicon.

16. A device according to claim 14, wherein the thickness of the first insulating film is 5 to 50 nm.

17. A device according to claim 14, wherein at least one of the first conductive patterns is a gate electrode of a thin film transistor formed over the substrate.

18. A device according to claim 14, wherein the semiconductor device is an EL display device.

19. A device according to claim 14, wherein said semiconductor device is at least one electronic equipment selected from the group consisting of a video camera, a digital camera, a projector, a projection television, a goggle type display, a head mount display, a navigation system, an acoustic reproduction device, a note-type personal computer, a game equipment, a portable information terminal, a mobile computer, a portable telephone, a portable-type game equipment, an electronic book, and an image reproduction devices having a recording medium.

20. A semiconductor device comprising:

a pixel portion comprising a plurality of pixels formed over a substrate, each pixel comprising at least one pixel TFT, a pixel electrode electrically connected to the pixel TFT, and first and second storage capacitors connected in parallel with each other;

at least one driver circuit formed over the substrate for driving said pixel portion, the driver circuit comprises at least one driver TFT,

wherein a gate insulating film of the pixel TFT, a gate insulating film of the driver TFT, and an insulating layer of the first storage capacitor are made of the same layer over the substrate, and

wherein a thickness of the insulating layer of the first storage capacitor is smaller than that of the gate insulating film of the pixel TFT.

21. A device according to claim 20, wherein the gate insulating film of the pixel TFT, the gate insulating film of the driver TFT, and the insulating layer of the first storage capacitor comprise silicon.

22. A device according to claim 20, wherein the thickness of the insulating layer of the first storage capacitor is 5 to 50 nm.

23. A device according to claim 20, wherein gate electrodes of the pixel TFT and the driver TFT comprise the same layer.

24. A device according to claim 20, wherein the semiconductor device is an EL display device.

25. A device according to claim 20, wherein said semiconductor device is at least one electronic equipment selected from the group consisting of a video camera, a digital camera, a projector, a projection television, a goggle type display, a head mount display, a navigation system, an acoustic reproduction device, a note-type personal computer, a game equipment, a portable information terminal, a mobile computer, a portable telephone, a portable-type game equipment, an electronic book, and an image reproduction devices having a recording medium.

26. A semiconductor device comprising:

a semiconductor island over a substrate;

a first insulating film over the semiconductor island;

a plurality of first conductive patterns over the semiconductor island with the first insulating film interposed therebetween;

a second insulating film over the first conductive patterns;

a plurality of second conductive patterns over the first conductive patterns with the second insulating film interposed therebetween;

a pixel electrode over the second conductive patterns, the pixel electrode electrically connected to the semiconductor island and one of the second conductive patterns.

27. A device according to claim 26, wherein at least one of said first and said second insulating films comprise silicon.

28. A device according to claim 26, wherein the thickness of the first insulating film is 5 to 50 nm.

29. A device according to claim 26, wherein the first conductive patterns are made of the same layer as gate electrodes of thin film transistors formed over the substrate.

30. A device according to claim 26, wherein the semiconductor device is an EL display device.

31. A device according to claim 26, wherein said semiconductor device is at least one electronic equipment selected from the group consisting of a video camera, a digital camera, a projector, a projection television, a goggle type display, a head mount display, a navigation system, an acoustic reproduction device, a note-type personal computer, a game equipment, a portable information terminal, a mobile computer, a portable telephone, a portable-type game equipment, an electronic book, and an image reproduction devices having a recording medium.

32. A semiconductor device comprising:

a pixel portion comprising a plurality of pixels formed over a substrate, each pixel comprising at least one pixel TFT, a pixel electrode electrically connected to the pixel TFT, and first and second storage capacitors connected in parallel with each other;

at least one driver circuit formed over the substrate for driving said pixel portion, the driver circuit comprises at least one driver TFT,

wherein the pixel portion comprises;

an active layer of the pixel TFT;

first conductive patterns over said active layer with an insulating film interposed therebetween;

a first interlayer insulating film over said first conductive patterns;

light-shielding films over the first conductive patterns with the first insulating film interposed therebetween;

a second interlayer insulating film over the light-shielding films;

a source wiring and a drain wiring on said second interlayer insulating film;

a third interlayer insulating film covering said source wiring and said drain wiring; and

a pixel electrode on said third interlayer insulating film,

wherein one of light-shielding films is used as an upper electrode of the second storage capacitor, and

wherein a thickness of a portion of the insulating film in the first storage capacitor is smaller than a thickness of another portion of the insulating film in the pixel TFT.

33. A device according to claim 32, wherein the insulating film comprises silicon.

34. A device according to claim 32, wherein the thickness of the insulating film in the first storage capacitor is 5 to 50 nm.

35. A device according to claim 32, wherein some of the first conductive patterns are used as gate electrodes of the pixel TFT and the driver TFT.

36. A device according to claim 32, wherein the semiconductor device is an EL display device.

37. A device according to claim 32, wherein said semiconductor device is at least one electronic equipment selected from the group consisting of a video camera, a digital camera, a projector, a projection television, a goggle type display, a head mount display, a navigation system, an acoustic reproduction device, a note-type personal computer, a game equipment, a portable information terminal, a mobile computer, a portable telephone, a portable-type game equipment, an electronic book, and an image reproduction devices having a recording medium.