MEMS-based electrically isolated analog-to-digital converter

• US 6,593,870 B2
• Filed: 10/18/2001
• Issued: 07/15/2003
• Est. Priority Date: 10/18/2001
• Status: Expired due to Term

• Current Assignee: Longitude Licensing Limited (Vector Capital Corporation)
• Original Assignee: Rockwell Automation Technologies Incorporated (Allen-Bradley Co., Inc.)
• Inventors: Galecki, Steven M., Kretschmann, Robert J., Harris, Richard D., Annis, Jeffrey R., Herbert, Patrick C., Lucak, Mark A., Knieser, Michael J., Dummermuth, Ernst H.
• Primary Examiner(s): JEAN PIERRE, PEGUY
• Application Number:
  US09/982,726
• Publication Number:
  US 20030076249A1
• Time in Patent Office: 635 Days
• Field of Search: 341/155, 341/143, 310/307, 310/306, 333/262, 438/52
• US Class Current: 341/155
• CPC Class Codes: H03M 3/368 of noise other than the quantisation noise already being shaped inherently by delta-sigma modulators
• CPC Class Codes: H03M 3/43 the quantiser being a single bit one
• CPC Class Codes: H03M 3/438 the modulator having a higher order loop filter in the feedforward path

Abstract

An isolated-ADC and a method for providing isolated analog-to-digital conversion are disclosed. The isolated-ADC includes a microelectromechanical system (MEMS), a comparator, and a digital-to-analog converter (DAC). The MEMS includes a beam element supported from a substrate for movement with respect to an axis, first and second actuators and a sensor. The first and second actuators are capable of exerting respective forces upon the beam element causing the beam element to move in response to analog input and feedback signals, respectively. The sensor detects changes in position of the beam element and produces a position signal indicative thereof. The comparator generates a digital signal based upon a comparison of the position signal with a reference value. Based on the digital signal, the DAC generates the feedback signal, and the isolated-ADC produces a digital output signal.

Claims

1. An isolated-ADC providing isolation between an analog input signal and a digital output signal, the isolated-ADC comprising:

a microelectromechanical system (MEMS) including;

a substrate;

a beam element supported from the substrate for movement with respect to an axis relative to the substrate;

a first actuator attached to the beam element, wherein the first actuator is capable of exerting a first force upon the beam element causing the beam element to move with respect to the axis, and wherein the first force is dependent upon the analog input signal provided to the isolated-ADC;

a sensor communicating with the beam element to detect a change in position of the beam element and to produce a position signal indicative of the position of the beam element; and

a second actuator attached to the beam element, wherein the second actuator is capable of exerting a second force upon the beam element based upon a feedback signal;

a comparator electrically coupled to the sensor, wherein the comparator generates a digital signal based upon a comparison of the position signal with a reference value representative of a reference position of the beam element; and

a digital-to-analog converter (DAC) electrically coupled between the second actuator and the comparator, wherein the DAC generates the feedback signal at least in partial dependence upon the digital signal;

wherein the digital output signal is further produced by a processing device within the isolated-ADC in dependence upon the digital signal, the digital output signal being an indication of, and electrically isolated from, the analog input signal.

2. The isolated-ADC of claim 1, wherein each of the first and second actuators is selected from the group consisting of:

a Lorentz force motor, an electrostatic motor, a piezoelectric motor, a thermal-expansion motor, and a mechanical-displacement motor.

3. The isolated-ADC of claim 1, wherein the sensor is selected from the group consisting of a capacitive sensor, a piezoelectric sensor, a photoelectric sensor, a resistive sensor, and an optical switching sensor.

4. The isolated-ADC of claim 1, wherein the comparator is a single-bit analog-to-digital converter that outputs a high value when the position signal exceeds the reference value and otherwise outputs a low value.

5. The isolated-ADC of claim 1, wherein the processing device includes a digital filter and a decimator that generate the digital output signal based upon the digital signal.

6. The isolated-ADC of claim 5, wherein the digital signal is a bit stream and the digital output signal is a serial number indicative of a magnitude of the analog input signal.

7. The isolated-ADC of claim 1, wherein the DAC is a single-bit DAC.

8. The isolated-ADC of claim 1, wherein the beam element is a beam attached to the substrate for sliding motion along the axis, wherein the axis is parallel to an adjacent surface of the substrate, and wherein at least a portion of the beam element between the first actuator and the sensor is an electrical insulator to electrically isolate the first actuator from the sensor.

9. The isolated-ADC of claim 1, wherein the MEMS further includes a damping element.

10. The isolated-ADC of claim 1, wherein the comparator, the DAC and the processing device are all implemented on an application specific integrated circuit (ASIC) chip.

11. The isolated-ADC of claim 1, wherein at least one of:

at least one of the actuators comprises more than one actuator element, and

the sensor comprises more than one sensor element.

12. An isolated-ADC providing isolation between an analog input signal and a digital output signal, the isolated-ADC comprising:

a microelectromechanical system (MEMS) including;

a substrate;

a beam element supported from the substrate for movement with respect to an axis relative to the substrate;

a first actuator attached to the beam element, wherein the first actuator is capable of exerting a first force upon the beam element causing the beam element to move with respect to the axis, and wherein the first force is dependent upon the analog input signal provided to the isolated-ADC;

a sensor communicating with the beam element to detect a change in position of the beam element and to produce a position signal indicative of the position of the beam element; and

a second actuator attached to the beam element, wherein the second actuator is capable of exerting a second force upon the beam element based upon a first feedback signal;

a comparator electrically coupled to the sensor, wherein the comparator generates a digital signal based upon a comparison of the position signal with a reference value representative of a reference position of the beam element; and

a differentiator electrically coupled to the comparator, wherein the differentiator generates an intermediate signal related to a derivative of the digital signal;

wherein the first feedback signal includes at least one of a first analog signal component based upon the intermediate signal and a second analog signal component based upon the digital signal; and

wherein the digital output signal is further produced by a processing device within the isolated-ADC in dependence upon the digital signal, the digital output signal being an indication of, and electrically isolated from, the analog input signal.

13. The isolated-ADC of claim 12, wherein each of the first and second actuators is selected from the group consisting of:

a Lorentz force motor, an electrostatic motor, a piezoelectric motor, a thermal-expansion motor, and a mechanical-displacement motor.

14. The isolated-ADC of claim 12, wherein the sensor is selected from the group consisting of a capacitive sensor, a piezoelectric sensor, a photoelectric sensor, a resistive sensor, and an optical switching sensor.

15. The isolated-ADC of claim 12, wherein the comparator is a single-bit analog-to-digital converter that outputs a high value when the position signal exceeds the reference value and otherwise outputs a low value.

16. The isolated-ADC of claim 12, wherein the processing device includes a digital filter and a decimator that generate the digital output signal based upon the digital signal.

17. The isolated-ADC of claim 16, wherein the digital signal is a bit stream and the digital output signal is a serial number indicative of a magnitude of the analog input signal.

18. The isolated-ADC of claim 12, wherein the beam element is a beam attached to the substrate for sliding motion along the axis, wherein the axis is parallel to an adjacent surface of the substrate, and wherein at least a portion of the beam element between the first actuator and the sensor is an electrical insulator to electrically isolate the first actuator from the sensor.

19. The isolated-ADC of claim 12, wherein the MEMS further includes a damping element.

20. The isolated-ADC of claim 12, wherein the differentiator digitally differentiates the digital signal and multiplies it by a factor to obtain the intermediate signal.

21. The isolated-ADC of claim 20, wherein the factor is one, and wherein the multiple of the digital signal is one times the digital signal.

22. The isolated-ADC of claim 12, further comprising

an adder coupled to the differentiator and to the comparator, wherein the adder generates a sum signal that is the sum of the intermediate signal and a multiple of the digital signal; and

a digital-to-analog converter (DAC) electrically coupled between the second actuator and the adder, wherein the DAC generates the feedback signal based upon the sum signal such that the feedback signal includes both the first analog signal component based upon the intermediate signal and the second analog signal component based upon the digital signal.

23. The isolated-ADC of claim 22, wherein the DAC is a two-bit DAC.

24. The isolated-ADC of claim 22, wherein the comparator, the differentiator, the adder, the DAC and the processing device are all implemented on a single application specific integrated circuit (ASIC) chip.

25. The isolated ADC of claim 12, further comprising

a first digital-to-analog converter (DAC) electrically coupled to the differentiator, wherein the first DAC converts the intermediate signal into the first analog signal component;

and

a second DAC electrically coupled to the comparator, wherein the second DAC converts the digital signal into the second analog signal component.

26. The isolated ADC of claim 25, further comprising

an adder coupled between the second actuator and the first and second DACs,

wherein the adder sums the first and second analog signal components to generate the first feedback signal such that the first feedback signal includes both the first and second analog signal components, and

wherein each of the first and second DACs are single-bit DACs.

27. The isolated ADC of claim 25, wherein the MEMS further includes a third actuator attached to the beam element, wherein the third actuator is capable of exerting a third force upon the beam element based upon a second feedback signal, wherein the first feedback signal is the first analog signal component and the second feedback signal is the second analog signal component, and wherein each of the first and second DACs are single-bit DACs.

28. An isolated-ADC providing isolation between an analog input signal and a digital output signal, the isolated-ADC comprising:

a microelectromechanical system (MEMS) including;

a substrate;

a beam element supported from the substrate for movement with respect to an axis relative to the substrate;

a first actuator attached to the beam element, wherein the first actuator is capable of exerting a first force upon the beam element causing the beam element to move with respect to the axis, and wherein the first force is dependent upon the analog input signal provided to the isolated-ADC;

a sensor communicating with the beam element to detect a change in position of the beam element and to produce a position signal indicative of the position of the beam element; and

a second actuator attached to the beam element, wherein the second actuator is capable of exerting a second force upon the beam element based upon a feedback signal;

a set of comparators including at least first, second and third comparators that are each electrically coupled to the sensor,

wherein the first comparator generates a first digital signal based upon a comparison of the position signal with a reference value representative of a reference position of the beam element;

wherein the second comparator generates a second digital signal based upon a comparison of the position signal with a first offset value representative of a first reference position offset of the beam element; and

wherein the third comparator generates a third digital signal based upon a comparison of the position signal with a second offset value representative of a second reference position offset of the beam element;

a logical decision device coupled to the first, second and third comparators, wherein the logical decision device generates a feedback bitstream signal that is based on at least the first, second and third digital signals; and

a digital-to-analog converter (DAC) electrically coupled between the second actuator and the logical decision device, wherein the DAC generates the feedback signal in dependence upon the feedback bitstream signal;

wherein the digital output signal is further produced by the isolated-ADC in dependence upon at least one of the first, second and third digital signals, the digital output signal being an indication of, and electrically isolated from, the analog input signal.

29. The isolated-ADC of claim 28, wherein each of the first and second actuators is selected from the group consisting of:

a Lorentz force motor, an electrostatic motor, a piezoelectric motor, a thermal-expansion motor, and a mechanical-displacement motor.

30. The isolated-ADC of claim 28, wherein the sensor is selected from the group consisting of a capacitive sensor, a piezoelectric sensor, a photoelectric sensor, a resistive sensor, and an optical switching sensor.

31. The isolated-ADC of claim 28, wherein the first comparator is a single-bit analog-to-digital converter that outputs a high value when the position signal exceeds the reference value and otherwise outputs a low value.

32. The isolated-ADC of claim 28, further comprising a processing device coupled to the first comparator, the processing device including a digital filter and a decimator that generate the digital output signal based upon the first digital signal.

33. The isolated-ADC of claim 32, wherein the digital signal is a bit stream and the digital output signal is a serial number indicative of a magnitude of the analog input signal.

34. The isolated-ADC of claim 28, wherein the DAC is a single-bit DAC.

35. The isolated-ADC of claim 28, wherein the beam element is a beam attached to the substrate for sliding motion along the axis, wherein the axis is parallel to an adjacent surface of the substrate, and wherein at least a portion of the beam element between the first actuator and the sensor is an electrical insulator to electrically isolate the first actuator from the sensor.

36. The isolated-ADC of claim 28, wherein the MEMS further includes a damping element.

37. The isolated-ADC of claim 28, wherein the first, second and third comparators, the logical decision device, the DAC, and a processing device employed to generate the digital output signal are all implemented on an application specific integrated circuit (ASIC) chip.

38. The isolated-ADC of claim 28, wherein each of the first and second actuators is a Lorentz force motor;

wherein the sensor is selected from the group consisting of a capacitive sensor, a piezoelectric sensor, a photoelectric sensor, a resistive sensor, and an optical switching sensor; and

wherein the Lorentz force motor that is the second actuator is capable of being positioned electrically in series with Lorentz force motors of a plurality of additional actuators of other MEMS devices.

39. The isolated-ADC of claim 38, wherein the first offset value is reset after each occurrence of the position signal changing from being below the reference value to being above the reference value, and wherein the second offset value is reset after each occurrence of the position signal changing from being above the reference value to below the reference value.

40. The isolated-ADC of claim 28, wherein the set of comparators includes at least one additional comparator that is electrically coupled to the sensor, wherein the at least one additional comparator generates at least one additional digital signal based upon a comparison of the position signal with at least one additional offset value representative of at least one additional reference position offset of the beam element, wherein the logical decision device is coupled to the at least one additional comparator and generates the feedback bitstream signal based at least in part upon the at least one additional digital signal.

41. The isolated-ADC of claim 40, wherein the at least one additional comparator includes a fourth comparator and a fifth comparator, wherein the at least one additional offset value includes a third offset value that is provided to the fourth comparator and a fourth offset value that is provided to the fifth comparator, wherein the third offset value is at a higher level than the first offset value and the fourth offset value is at a lower level than the second offset value, wherein the fourth comparator generates a fourth digital signal based upon a comparison of the position signal with the third offset value and the fifth comparator generates a fifth digital signal based upon a comparison of the position signal with the fourth offset value, and wherein the logical decision device is able to determine a quantity related to a slope of the position signal based upon the first, second, third, fourth and fifth digital signals.

42. An isolated-ADC providing isolation between an analog input signal and a digital output signal, the isolated-ADC comprising:

a microelectromechanical system (MEMS) including;

a substrate;

a beam element supported from the substrate for movement with respect to an axis relative to the substrate;

a first actuator attached to the beam element, wherein the first actuator is capable of exerting a first force upon the beam element causing the beam element to move with respect to the axis, and wherein the first force is dependent upon the analog input signal provided to the isolated-ADC;

a sensor communicating with the beam element to detect a change in position of the beam element and to produce a position signal indicative of the position of the beam element; and

a second actuator attached to the beam element, wherein the second actuator is capable of exerting a second force upon the beam element based upon a feedback signal;

a differential amplifier electrically coupled to the sensor, wherein the differential amplifier generates two intermediate signals based upon a comparison of the position signal with a reference value representative of a reference position of the beam element;

a comparator bias circuit including a comparator that receives the two intermediate signals and in response generates a digital signal; and

a digital-to-analog converter (DAC) electrically coupled between the second actuator and the comparator bias circuit, wherein the DAC generates the feedback signal dependent upon the digital signal,

wherein the digital output signal is further produced by the isolated-ADC in dependence upon the digital signal, the digital output signal being an indication of, and electrically isolated from, the analog input signal.

43. The isolated-ADC of claim 42, wherein the comparator bias circuit includes first, second and third pairs of resistors and two capacitors, wherein the two intermediate signals are provided to high and low inputs of the comparator within the comparator bias circuit by way of the two resistors of the first pair of resistors, wherein the comparator within the comparator bias circuit outputs high and low output signals, wherein the high output signal is the digital signal and is further coupled to the low input by way of the two resistors of the second pair of resistors, wherein the low output signal is coupled to the high input by way of the two resistors of the third pair of resistors, wherein the high output signal is further coupled to a junction between the two resistors of the third pair of resistors, and wherein the low output signal is further coupled to a junction between the two resistors of the second pair of resistors.

44. The isolated-ADC of claim 42, wherein the comparator bias circuit includes first, second and third pairs of resistors and two capacitors, wherein the two intermediate signals are provided to high and low inputs of the comparator within the comparator bias circuit by way of the two resistors of the first pair of resistors, wherein the comparator within the comparator bias circuit outputs high and low output signals, wherein the high output signal is the digital signal and is further coupled to the low input by way of the two resistors of the second pair of resistors, wherein the low output signal is coupled to the high input by way of the two resistors of the third pair of resistors, wherein a first of the two capacitors is coupled between a junction between the two resistors of the third pair of resistors and a ground, and wherein a second of the two capacitors is coupled between a junction between the two resistors of the second pair of resistors and the ground.

45. The isolated-ADC of claim 42, wherein the DAC is a single-bit DAC.

46. The isolated-ADC of claim 42, wherein each of the first and second actuators is selected from the group consisting of:

a Lorentz force motor, an electrostatic motor, a piezoelectric motor, a thermal-expansion motor, and a mechanical-displacement motor.

47. The isolated-ADC of claim 42, wherein the sensor is selected from the group consisting of a capacitive sensor, a piezoelectric sensor, a photoelectric sensor, a resistive sensor, and an optical switching sensor.

48. The isolated-ADC of claim 42, further comprising a processing device including a digital filter and a decimator that generate the digital output signal based upon the digital signal.

49. The isolated-ADC of claim 42, wherein the digital signal is a bit stream and the digital output signal is a serial number indicative of a magnitude of the analog input signal.

50. The isolated-ADC of claim 42, wherein at least one of:

at least one of the actuators comprises more than one actuator element, and

the sensor comprises more than one sensor element.

51. The isolated-ADC of claim 42, wherein the beam element is a beam attached to the substrate for sliding motion along the axis, wherein the axis is parallel to an adjacent surface of the substrate, and wherein at least a portion of the beam element between the first actuator and the sensor is an electrical insulator to electrically isolate the first actuator from the sensor.

52. The isolated-ADC of claim 42, wherein the MEMS further includes a damping element.

53. The isolated-ADC of claim 42, wherein the differential amplifier, the comparator bias circuit, the DAC, and a processing device employed to generate the digital output signal are all implemented on an application specific integrated circuit (ASIC) chip.

54. An isolated-ADC providing isolation between an analog input signal and a digital output signal, the isolated-ADC comprising:

a microelectromechanical system (MEMS) including;

a substrate;

a beam element supported from the substrate for movement with respect to an axis relative to the substrate;

a first actuator attached to the beam element, wherein the first actuator is capable of exerting a first force upon the beam element causing the beam element to move with respect to the axis, and wherein the first force is dependent upon the analog input signal provided to the isolated-ADC;

a sensor communicating with the beam element to detect a change in position of the beam element and to produce a position signal indicative of the position of the beam element;

a second actuator attached to the beam element, wherein the second actuator is capable of exerting a second force upon the beam element based upon a feedback signal; and

a damping element coupled to the beam element, wherein the damping element tends to generate a third force when the beam element moves, the third force tending to counter the at least one of the first and second forces causing the movement;

a first comparator electrically coupled to the sensor, wherein the first comparator generates a first digital signal based upon a comparison of the position signal with a reference value representative of a reference position of the beam element; and

a digital-to-analog converter (DAC) electrically coupled between the first comparator and the second actuator, wherein the DAC generates the feedback signal in dependence upon the first digital signal;

wherein the digital output signal is further produced by the isolated-ADC in dependence upon the first digital signal, the digital output signal being an indication of, and electrically isolated from, the analog input signal.

55. The isolated-ADC of claim 54, further comprising a differentiator and an adder, wherein the differentiator differentiates the digital signal to produce an intermediate signal, and wherein the adder sums the intermediate signal and the digital signal and provides a result to the DAC.

56. The isolated-ADC of claim 54, further comprising

second and third comparators that are each electrically coupled to the sensor,

wherein the second comparator generates a second digital signal based upon a comparison of the position signal with a first offset value representative of a first reference position offset of the beam element; and

wherein the third comparator generates a third digital signal based upon a comparison of the position signal with a second offset value representative of a second reference position offset of the beam element; and

a logical decision device coupled to the first, second and third comparators, wherein the logical decision device generates a feedback bitstream signal that is based on at least the first, second and third digital signals, wherein the feedback bitstream signal is provided to the DAC.

57. The isolated-ADC of claim 56, further comprising a differential amplifier and a comparator bias circuit that includes the comparator, wherein the differential amplifier is coupled between the sensor and the comparator bias circuit.

58. An isolated-ADC comprising:

a microelectromechanical means for adding an analog input signal to a feedback signal and producing a position signal in response to the analog input and feedback signals;

a means for generating a digital output signal based upon the position signal; and

a means for generating the feedback signal based upon the position signal;

wherein, the digital output signal is electrically isolated from the analog input signal.

59. A method of providing a digital output signal based upon an analog input signal, wherein the digital output signal is electrically isolated from the analog input signal, the method comprising:

receiving the analog input signal at a first actuator of a microelectromechanical system (MEMS);

receiving a feedback signal at a second actuator of the MEMS;

generating movement of a beam element of the MEMS by way of the first and second actuators in response to the respective analog input and feedback signals;

sensing a position of the beam element of the MEMS at a sensor of the MEMS;

comparing the sensed position with a reference value;

generating a first digital signal in response to the comparing of the position and the reference value, wherein the first digital signal is at a high level while the sensed position is determined to be greater than the reference value and at a low level while the sensed position is determined to be less than the reference value;

generating, based upon the first digital signal, both the digital output signal and the feedback signal.

60. The method of claim 59, further comprising differentiating the first digital signal to produce an intermediate signal upon which the feedback signal is based.

61. The method of claim 59, wherein the digital output signal is determined from the digital signal by way of a digital filter and a decimator, and wherein the digital output signal is a serial number indicative of the analog input signal.

62. The method of claim 59, further comprising:

comparing the sensed position with a first offset value, and with a second offset value;

generating second and third digital signals in response to the comparing of the position with the first and second offset values, respectively, wherein the first, second and third digital signals are respectively at high levels while the sensed position is determined to be greater than the reference value, the first offset value and the second offset value, and wherein the first, second and third digital signals are respectively at low levels while the sensed position is determined to be less than the reference value, the first offset value and the second offset value;

processing at a logical decision device the first, second and third digital signals to obtain a feedback bitstream signal;

generating the feedback signal from the feedback bitstream signal by way of a digital-to-analog converter (DAC).

63. The method of claim 62, further comprising:

setting the first offset value equal to the position upon the occurrence of a period following a time at which the position changes from being below the reference value to being above the reference value; and

setting the second offset value equal to the position upon the occurrence of the first period following a time at which the position changes from being above the reference value to being below the reference value.

64. The method of claim 61, further comprising:

comparing the sensed position with a plurality of offset values at a plurality of respective comparators;

generating a plurality of additional digital signals in response to the comparing of the position with the plurality of offset values, respectively;

processing at a logical decision device the first digital signal and the plurality of additional digital signals to obtain a feedback bitstream signal;

generating the feedback signal from the feedback bitstream signal by way of a digital-to-analog converter (DAC).

65. The method of claim 61, wherein each of the first and second actuators is a Lorentz force motor, and wherein the sensor is selected from the group consisting of a capacitive sensor, a piezoelectric sensor, a photoelectric sensor, a resistive sensor, and an optical switching sensor.

66. The method of claim 61, wherein each of the first and second actuators is selected from the group consisting of:

a Lorentz force motor, an electrostatic motor, a piezoelectric motor, a thermal-expansion motor, and a mechanical-displacement motor, and wherein the sensor is selected from the group consisting of a capacitive sensor, a piezoelectric sensor, a photoelectric sensor, a resistive sensor, and an optical switching sensor.

67. A method of providing a digital output signal based upon an analog input signal, wherein the digital output signal is electrically isolated from the analog input signal, the method comprising:

receiving the analog input signal at a first actuator of a microelectromechanical system (MEMS);

receiving a first feedback signal at a second actuator of the MEMS;

generating movement of a beam element of the MEMS by way of the first and second actuators in response to the respective analog input and first feedback signals;

sensing a position of the beam element of the MEMS at a sensor of the MEMS;

comparing the sensed position with a reference value;

generating a first digital signal in response to the comparing of the position and the reference value, wherein the first digital signal is at a high level while the sensed position is determined to be greater than the reference value and at a low level while the sensed position is determined to be less than the reference value;

generating the digital output signal based upon the first digital signal; and

differentiating the first digital signal to obtain an intermediate signal, wherein the first feedback signal is based upon at least one of the intermediate signal and the first digital signal.

68. The method of claim 67, wherein the intermediate signal is added to a multiple of the first digital signal to produce a digital sum signal, and the digital sum signal is converted into the first feedback signal by way of a two-bit digital-to-analog converter (DAC).

69. The method of claim 67, wherein the intermediate signal and the first digital signal are respectively converted into first and second analog signal components by respective single-bit digital-to-analog converters (DAC), and wherein the first and second analog signal components are added at a summing device to produce the first feedback signal.

70. The method of claim 67, wherein the intermediate signal and the first digital signal are respectively converted into first and second analog signal components by respective digital-to-analog converters (DAC), wherein the first feedback signal is based upon the first analog signal component, wherein the second analog signal component is provided as a second feedback signal to a third actuator, and wherein the third actuator affects the movement of the beam element in response to the second feedback signal.

71. The method of claim 70, wherein each of the DACs is a single-bit DAC.

72. A method of providing a digital output signal based upon an analog input signal, wherein the digital output signal is electrically isolated from the analog input signal, the method comprising:

receiving the analog input signal at a first actuator of a microelectromechanical system (MEMS);

receiving a feedback signal at a second actuator of the MEMS;

generating movement of a beam element of the MEMS by way of the first and second actuators in response to the respective analog input and feedback signals;

sensing a position of the beam element of the MEMS at a sensor of the MEMS;

comparing the sensed position with a reference value and a plurality of offset values at a plurality of respective comparators;

generating a first digital signal in response to the comparing of the position and the reference value and a plurality of additional digital signals in response to the comparing of the position with the plurality of offset values, respectively;

generating the digital output signal based upon the first digital signal;

processing at a logical decision device the first digital signal and the plurality of additional digital signals to obtain a feedback bitstream signal;

generating the feedback signal from the feedback bitstream signal by way of a digital-to-analog converter (DAC).

73. A method of providing a digital output signal based upon an analog input signal, wherein the digital output signal is electrically isolated from the analog input signal, the method comprising:

receiving the analog input signal at a first actuator of a microelectromechanical system (MEMS);

receiving a feedback signal at a second actuator of the MEMS;

generating movement of a beam element of the MEMS by way of the first and second actuators in response to the respective analog input and feedback signals;

sensing a position of the beam element of the MEMS at a sensor of the MEMS;

providing an indication of the sensed position and a reference value to a differential amplifier;

providing two intermediate signals from the differential amplifier to a comparator bias circuit;

generating a digital signal at the comparator bias circuit based upon the high and low output signals; and

generating, based upon the digital signal, both the digital output signal and the feedback signal.

74. The method of claim 73, wherein the comparator bias circuit includes first, second and third pairs of resistors and two capacitors, wherein the two intermediate signals are provided to high and low inputs of the comparator within the comparator bias circuit by way of the two resistors of the first pair of resistors, wherein the comparator within the comparator bias circuit outputs high and low output signals, wherein the high output signal is the digital signal and is further coupled to the low input by way of the two resistors of the second pair of resistors, wherein the low output signal is coupled to the high input by way of the two resistors of the third pair of resistors.

75. The method of claim 74 wherein the high output signal is further coupled to a junction between the two resistors of the third pair of resistors by a first of the two capacitors, and wherein the low output signal is further coupled to a junction between the two resistors of the second pair of resistors by a second of the two capacitors.

76. The method of claim 74, wherein a first of the two capacitors couples a junction between the two resistors of the third pair of resistors to a ground, and a second of the two capacitors couples a junction between the two resistors of the second pair of resistors to the ground, and wherein the feedback signal is generated from the digital signal by way of a digital-to-analog converter (DAC).

77. A method of providing a digital output signal based upon an analog input signal, wherein the digital output signal is electrically isolated from the analog input signal, the method comprising:

receiving the analog input signal at a first actuator of a microelectromechanical system (MEMS);

receiving a feedback signal at a second actuator of the MEMS;

generating movement of a beam element of the MEMS by way of the first and second actuators in response to the respective analog input and feedback signals;

damping the movement of the beam element of the MEMS by way of a damping element;

sensing a position of the beam element of the MEMS at a sensor of the MEMS;

comparing the sensed position with a reference value;

generating a digital signal in response to the comparing of the position and the reference value, wherein the digital signal is at a high level while the sensed position is determined to be greater than the reference value and at a low level while the sensed position is determined to be less than the reference value;

determining the digital output signal based upon the digital signal; and

generating the feedback signal based upon the digital signal.

78. The method of claim 77, wherein beam element is a beam and the damping element includes a wire in which is induced a current when movement of the beam occurs, wherein the induced current produces a magnetic field that tends to counteract the movement of the beam.

79. The method of claim 77, wherein the damping element includes at least one of a control device to control the induced current and another type of control device.