Display device

• US 6,593,990 B1
• Filed: 04/21/1999
• Issued: 07/15/2003
• Est. Priority Date: 03/26/1997
• Status: Expired due to Term

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Yamazaki, Shunpei
• Primary Examiner(s): Ton, Toan
• Assistant Examiner(s): NGUYEN, DUNG T
• Application Number:
  US09/295,397
• Time in Patent Office: 1,546 Days
• Field of Search: 349/42, 349/43, 349/138, 257/59, 257/72
• US Class Current: 349/138
• CPC Class Codes: G02F 1/1362 Active matrix addressed cells G02F1/134336, G02F1/134363 take precedence

Abstract

There is disclosed a structure for radiating heat generated by TFTs in a liquid crystal panel. A DLC film 125 is provided on a resin interlayer film 123 disposed on the TFTs 105, 109, and 113. The DLC film 125 can be easily formed on the resin film, and has high heat conductivity, so that the film can be made to function as a heat radiating layer.

Claims

1. A device having at least one active matrix panel, said active matrix panel comprising:

a substrate having an insulating surface;

an active matrix circuit comprising first thin film transistors formed over the substrate;

a driving circuit comprising second thin film transistors for driving the active matrix circuit;

a first insulating film formed over the first and second thin film transistors;

at least one drain electrode formed on the first insulating film and electrically connected to a drain region of at least one of the first thin film transistors through a contact hole of the first insulating film;

a second insulating film formed over the first insulating film and the drain electrode;

an electromagnetic shield pattern formed over the second insulating film;

a fourth insulating film comprising an inorganic material on at least the electromagnetic shield pattern;

a third insulating film comprising an organic resin formed over the second and fourth insulating films and the electromagnetic shield pattern; and

at least one reflective pixel electrode formed over the third insulating film and electrically connected to the drain electrode through a hole opened through the third insulating film, the electromagnetic shield pattern and the second insulating film,

wherein the third insulating film extends into a gap between the reflective pixel electrode and an inner edge of the opening of the electromagnetic shield pattern,

wherein the third insulating film extends into a gap between the reflective pixel electrode and an inner edge of the opening of the fourth insulating film.

2. A device according to claim 1 wherein the first interlayer insulating film comprises silicon oxide.

3. A device according to claim 1 wherein the pixel electrodes comprise aluminum.

4. A device according to claim 1 wherein the substrate is a glass substrate.

5. A device according to claim 1 wherein the first thin film transistors are of an N-channel type.

6. A device according to claim 1 wherein each of the first and second thin film transistors is of a top-gate type.

7. A device according to claim 1 wherein each of the first and second thin film transistors is of a bottom-gate type.

8. A device according to claim 1 wherein the second interlayer insulating film comprises a material selected from the group consisting of polyimide, polyimide amide, polyamide, acryl, and epoxy.

9. A device according to claim 1 wherein the drain electrode comprises a pair of first layers comprising titanium and a second layer comprising aluminum interposed therebetween.

10. A device according to claim 1 wherein the third interlayer insulating film comprises polyimide.

11. A device according to claim 1 wherein the device is an EL display device.

12. A device according to claim 1 wherein the device is a portable information processing terminal, which comprises a main body, an integrated circuit in the main body, the active matrix panel, a camera portion for incorporating a picture image, and an operation switch.

13. A head mount display using the active matrix panel according to claim 1.

14. A device according to claim 1 further comprising an antenna wherein said active matrix panel displays a map information received by said antenna from an artificial satellite.

15. A device according to claim 1 wherein said device is a portable telephone, which comprises a main body, an antenna, an audio output portion, said active matrix panel, an operation switch, and an audio input portion.

16. A video camera having the active matrix panel according to claim 1.

17. A device according to claim 1 wherein said device is a projector having said active matrix panel, a light source, an optical system and a screen.

18. A device having at least one active matrix panel, said active matrix panel comprising:

a substrate having an insulating surface;

an active matrix circuit comprising first thin film transistors formed over the substrate;

a driving circuit comprising second thin film transistors for driving the active matrix circuit;

a first insulating film formed over the first and second thin film transistors;

at least one drain electrode formed on the first insulating film and electrically connected to a drain of at least one of the first thin film transistors through a contact hole of the first insulating film;

a second insulating film comprising an organic resin formed over the first insulating film and the drain electrode;

at least one pixel electrode formed over the second insulating film and electrically connected to one of the first thin film transistors via the drain electrode,

wherein an insulating layer comprising silicon nitride is formed between the first and second insulating films and is formed over the drain electrode.

19. A device according to claim 18 wherein the first interlayer insulating film comprises silicon oxide.

20. A device according to claim 18 wherein the pixel electrodes comprises aluminum.

21. A device according to claim 18 wherein the substrate is a glass substrate.

22. A device according to claim 18 wherein each of the first and second thin film transistors is of a top-gate type.

23. A device according to claim 18 wherein each of the first and second thin film transistors is of a bottom-gate type.

24. A device according to claim 18 wherein the second interlayer insulating film comprises a material selected from the group consisting of polyimide, polyimide amide, polyamide, acryl, and epoxy.

25. A device according to claim 18 wherein the drain electrode comprises a pair of first layers comprising titanium and a second layer comprising aluminum interposed therebetween.

26. A device according to claim 18 wherein the device is an EL display device.

27. A device according to claim 18 wherein the device is a portable information processing terminal, which comprises a main body, an integrated circuit in the main body, the active matrix panel, a camera portion for incorporating a picture image, and an operation switch.

28. A head mount display using the active matrix panel according to claim 18.

29. A device according to claim 18 further comprising an antenna wherein said active matrix panel displays a map information received by said antenna from an artificial satellite.

30. A device according to claim 18 wherein said device is a portable telephone, which comprises a main body, an antenna, an audio output portion, said active matrix panel, an operation switch, and an audio input portion.

31. A video camera having the active matrix panel according to claim 18.

32. A device according to claim 18 wherein said device is a projector having said active matrix panel, a light source, an optical system and a screen.

33. A device having at least one active matrix panel, said active matrix panel comprising:

a substrate having an insulating surface;

an active matrix circuit comprising first thin film transistors formed over the substrate;

a driving circuit comprising second thin film transistors for driving the active matrix circuit;

a first insulating film formed over the first and second thin film transistors;

at least one wiring formed on the first insulating film and electrically connected to one of a source region or a drain region of at least one of the first and second thin film transistors through a contact hole of the first insulating film;

a second insulating film comprising an organic resin formed over the first insulating film and the wiring;

at least one pixel electrode formed over the second insulating film and electrically connected to one of the first thin film transistors,

wherein an insulating layer comprising silicon nitride is formed between the first and second insulating films and is formed on the wiring.

34. A device according to claim 33 wherein the first interlayer insulating film comprises silicon oxide.

35. A device according to claim 33 wherein the pixel electrodes comprise aluminum.

36. A device according to claim 33 wherein the substrate is a glass substrate.

37. A device according to claim 33 wherein each of the first and second thin film transistors is of a top-gate type.

38. A device according to claim 33 wherein each of the first and second thin film transistors is of a bottom-gate type.

39. A device according to claim 33 wherein the second interlayer insulating film comprises a material selected from the group consisting of polyimide, polyimide amide, polyamide, acryl, and epoxy.

40. A device according to claim 33 wherein the at least one wiring comprises a pair of first layers comprising titanium and a second layer comprising aluminum interposed therebetween.

41. A device according to claim 33 wherein the device is an EL display device.

42. A device according to claim 33 wherein the device is a portable information processing terminal, which comprises a main body, an integrated circuit in the main body, the active matrix panel, a camera portion for incorporating a picture image, and an operation switch.

43. A head mount display using the active matrix panel according to claim 33.

44. A device according to claim 33 further comprising an antenna wherein said active matrix panel displays a map information received by said antenna from an artificial satellite.

45. A device according to claim 33 wherein said device is a portable telephone, which comprises a main body, an antenna, an audio output portion, said active matrix panel, an operation switch, and an audio input portion.

46. A video camera having the active matrix panel according to claim 33.

47. A device according to claim 33 wherein said device is a projector having said active matrix panel, a light source, an optical system and a screen.

48. A device having at least one active matrix panel, said active matrix panel comprising:

a substrate having an insulating surface;

an active matrix circuit comprising first thin film transistors formed over the substrate;

a driving circuit comprising second thin film transistors for driving the active matrix circuit;

a first insulating film formed over the first and second thin film transistors;

at least one first electrode formed on the first insulating film and electrically connected to the first thin film transistors;

at least one second electrode formed on the first insulating film and electrically connected to the second thin film transistors;

a second insulating film comprising an organic resin formed over the first insulating film and the first and second electrodes;

at least one pixel electrode formed over the second insulating film and electrically connected to one of the first thin film transistors,

wherein an insulating layer comprising silicon nitride is formed on the first insulating film, the at least one first electrode and the at least second electrode.

49. A device according to claim 48 wherein the first interlayer insulating film comprises silicon oxide.

50. A device according to claim 48 wherein the second interlayer insulating film comprises a material selected from the group consisting of polyimide, polyimide amide, polyamide, acryl, and epoxy.

51. A device according to claim 48 wherein the device is an EL display device.

52. A device according to claim 48 wherein the device is a portable information processing terminal, which comprises a main body, an integrated circuit in the main body, the active matrix panel, a camera portion for incorporating a picture image, and an operation switch.

53. A head mount display using the active matrix panel according to claim 48.

54. A device according to claim 48 further comprising an antenna wherein said active matrix panel displays a map information received by said antenna from an artificial satellite.

55. A device according to claim 48 wherein said device is a portable telephone, which comprises a main body, an antenna, an audio output portion, said active matrix panel, an operation switch, and an audio input portion.

56. A video camera having the active matrix panel according to claim 48.

57. A device according to claim 48 wherein said device is a projector having said active matrix panel, a light source, an optical system and a screen.

58. A device having at least one active matrix panel, said active matrix panel comprising:

a substrate having an insulating surface;

an active matrix circuit comprising first thin film transistors formed over the substrate;

a driving circuit comprising second thin film transistors for driving the active matrix circuit;

a first insulating film formed over the first and second thin film transistors;

at least one first electrode formed on the first insulating film and electrically connected to the first thin film transistors;

at least one second electrode formed on the first insulating film and electrically connected to the second thin film transistors;

a second insulating film comprising an organic resin formed over the first insulating film and the first and second electrodes;

an electromagnetic shield pattern formed on the second insulating film;

a third insulating film formed over the second insulating film and the electromagnetic shield pattern; and

at least one pixel electrode formed over the third insulating film and electrically connected to one of the first thin film transistors,

wherein an insulating layer comprising silicon nitride is formed on the first insulating film, the at least one first electrode and the at least second electrode.

59. A device according to claim 58 wherein the first interlayer insulating film comprises silicon oxide.

60. A device according to claim 58 wherein the device is an EL display device.

61. A device according to claim 58 wherein the device is a portable information processing terminal, which comprises a main body, an integrated circuit in the main body, the active matrix panel, a camera portion for incorporating a picture image, and an operation switch.

62. A head mount display using the active matrix panel according to claim 58.

63. A device according to claim 58 further comprising an antenna wherein said active matrix panel displays a map information received by said antenna from an artificial satellite.

64. A device according to claim 58 wherein said device is a portable telephone, which comprises a main body, an antenna, an audio output portion, said active matrix panel, an operation switch, and an audio input portion.

65. A video camera having the active matrix panel according to claim 58.

66. A device according to claim 58 wherein said device is a projector having said active matrix panel, a light source, an optical system and a screen.

67. A device having at least one active matrix panel, said active matrix panel comprising:

a substrate having an insulating surface;

an active matrix circuit comprising first thin film transistors formed over the substrate;

a driving circuit comprising second thin film transistors for driving the active matrix circuit;

a first insulating film formed over the first and second thin film transistors;

at least one first electrode formed on the first insulating film and electrically connected to the first thin film transistors;

at least one second electrode formed on the first insulating film and electrically connected to the second thin film transistors;

an insulating layer formed on the first insulating film and covering the first electrode and the second electrode wherein the insulating film comprises silicon nitride;

a capacitor forming electrode formed on the insulating layer comprising silicon nitride to form a capacitor associated with the first thin film transistor;

a second insulating film comprising an organic resin formed on the insulating layer comprising silicon nitride and the capacitor forming electrode;

at least one pixel electrode formed over the second insulating film and electrically connected to one of the first thin film transistors.

68. A device according to claim 67 wherein the device is an EL display device.

69. A device according to claim 67 wherein the device is a portable information processing unit terminal, which comprises a main body, an integrated circuit in the main body, the active matrix panel, a camera portion for incorporating a picture image, and an operation switch.

70. A head mount display using the active matrix panel according to claim 67.

71. A device according to claim 67 wherein further comprising an antenna wherein said active matrix panel displays a map information received by said antenna from an artificial satellite.

72. A device according to claim 67 wherein said device is a portable telephone, which comprises a main body, an antenna, an audio output portion, said active matrix panel, an operation switch, and an audio input portion.

73. A video camera having the active matrix panel according to claim 67.

74. A device according to claim 67 wherein said device is a projector having said active matrix panel, a light source, an optical system and a screen.

75. A device having at least one active matrix panel, said active matrix panel comprising:

a substrate having an insulating surface;

an active matrix circuit comprising first thin film transistors formed over the substrate;

a driving circuit comprising second thin film transistors for driving the active matrix circuit;

a first insulating film formed over the first and second thin film transistors;

at least one wiring formed on the first insulating film and electrically connected to at least one of the first and second thin film transistors;

an insulating layer comprising silicon nitride formed on the first insulating film and the at least one wiring;

a second insulating film comprising an organic resin formed over the first insulating film and the at least one wiring with the insulating layer interposed therebetween;

an electromagnetic shield pattern formed on the second insulating film;

a third insulating film comprising an organic resin formed over the second insulating film and the electromagnetic shield pattern; and

at least one pixel electrode formed over the third insulating film and electrically connected to one of the first thin film transistors.

76. A device according to claim 75 wherein the device is an EL display device.

77. A device according to claim 75 wherein the device is a portable information processing unit terminal, which comprises a main body, an integrated circuit in the main body, the active matrix panel, a camera portion for incorporating a picture image, and an operation switch.

78. A head mount display using the active matrix panel according to claim 75.

79. A device according to claim 75 wherein further comprising an antenna wherein said active matrix panel displays a map information received by said antenna from an artificial satellite.

80. A device according to claim 75 wherein said device is a portable telephone, which comprises a main body, an antenna, an audio output portion, said active matrix panel, an operation switch, and an audio input portion.

81. A video camera having the active matrix panel according to claim 75.

82. A device according to claim 75 wherein said device is a projector having said active matrix panel, a light source, an optical system and a screen.