Stage assembly including a reaction assembly

• US 6,593,997 B1
• Filed: 11/16/2000
• Issued: 07/15/2003
• Est. Priority Date: 11/16/2000
• Status: Expired due to Fees

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Watson, Doug, Hazelton, Andrew J., Binnard, Mike
• Primary Examiner(s): NGUYEN, HUNG
• Application Number:
  US09/713,911
• Time in Patent Office: 971 Days
• Field of Search: 355/53, 355/72-76, 310/10, 310/12, 318/649, 318/687, 378/34, 378/35
• US Class Current: 355/53
• CPC Class Codes: G03F 7/707 Chucks, e.g. chucking or un-chucking operations or structural details
• CPC Class Codes: G03F 7/70708 being electrostatic; Electrostatically deformable vacuum chucks
• CPC Class Codes: G03F 7/70716 Stages
• CPC Class Codes: G03F 7/70766 Reaction force control means, e.g. countermass

Abstract

A stage assembly (10) for moving and positioning a device (26) is provided herein. The stage assembly (10) includes a stage base (12), a stage (14), a stage mover assembly (16), and a reaction assembly (18). The stage mover assembly (16) moves the stage (14) along an X axis and along a Y axis relative to the stage base (12). The reaction assembly (18) is coupled to the stage mover assembly (16). Uniquely, the reaction assembly (18) counteracts and reduces the reaction forces created by the stage mover assembly (16) in two degrees of freedom that are transferred to a reaction base (102). With this design, stage mover assembly (16) has less influence upon the position of the stage base (12). These features allow for more accurate positioning of the device (26) by the stage assembly (10) and better performance of the stage assembly (10).

Claims

1. A stage assembly that moves a device along an X axis and along a Y axis, the stage assembly comprising:

a device table that retains the device;

a mover assembly connected to the device table, the mover assembly moving along the X axis and the Y axis;

a first X reaction mass that is secured to the mover assembly;

a reaction base that supports the first X reaction mass and allows the first X reaction mass to move relative to the reaction base along the X axis;

a first Y reaction mass that is movable relative to the first X reaction mass; and

a first Y reaction mover connected to the first Y reaction mass, the first Y reaction mover moving relative to the reaction base and generates a Y correction force along the Y axis that is transferred to the reaction base.

2. The stage assembly of claim 1 further comprising a first X reaction mover connected to the first X reaction mass, the first X reaction mover moving the first X reaction mass relative to the reaction base.

3. The stage assembly of claim 2 wherein movement of the device table generates a reaction force about a Z axis, and wherein movement of the first X reaction mass by the first X reaction mover counteracts the reaction force about the Z axis.

4. The stage assembly of claim 2 further comprising (i) a mounting base that supports the reaction base, and (ii) a first X trim mover including a first component that is secured to the first X reaction mass, and a second component that is coupled to the mounting base, the first X trim mover moving the first X reaction mass relative to the mounting base with one degree of freedom.

5. The stage assembly of claim 4 further comprising a second X reaction mass and a second X trim mover including a first component that is secured to the second X reaction mass, and a second component that is coupled to the mounting base, the second X trim mover moving the second X reaction mass relative to the mounting base with one degree of freedom.

6. The stage assembly of claim 5 further comprising a first Y trim mover including a first component that is secured to the first Y reaction mass, and a second component that is coupled to the mounting base, the first Y trim mover moving the first Y reaction mass relative to the mounting base with one degree of freedom.

7. The stage assembly of claim 6 further comprising a second Y reaction mass, a second Y reaction mover that is connected to the second Y reaction mass, and a second Y trim mover, the second Y reaction mover moving the second Y reaction mass relative to the reaction base and generating a Y correction force along the Y axis that is transferred to the reaction base, the second Y trim mover including a first component that is secured to the second Y reaction mass, and a second component that is coupled to the mounting base, the second Y trim mover moving the second Y reaction mass relative to the mounting base with one degree of freedom.

8. The stage assembly of claim 1 wherein the mover assembly includes a first component and a second component that interacts with the first component for causing a force between the first component and the second component, the first component being connected to the first X reaction mass and a second component being connected to the device table.

9. The stage assembly of claim 1 further comprising a second X reaction mass that is secured to the mover assembly, the second X reaction mass moving with at least one degree of freedom relative to the first X reaction mass.

10. The stage assembly of claim 9 further comprising a second X reaction mover connected to the second X reaction mass, the second X reaction mover moving the second X reaction mass relative to the first X reaction mass and the reaction base.

11. The stage assembly of claim 10 further comprising a first X reaction mover connected to the first X reaction mass, the first X reaction mover moving the first X reaction mass relative to the reaction base, wherein movement of the device table generates a reaction force about a Z axis, and wherein movement of at least one of the X reaction masses by at least one of the X reaction movers counteracts the reaction force about the Z axis.

12. The stage assembly of claim 9 further comprising a stage base that supports the device table, wherein the first X reaction mass moves with two degrees of freedom relative to the stage base and with one degree of freedom relative to the second X reaction mass, and the second X reaction mass moves with two degrees of freedom relative to the stage base and with one degree of freedom relative to the first X reaction mass.

13. The stage assembly of claim 9 further comprising a stage base that supports the device table, wherein the first X reaction mass moves with three degrees of freedom relative to the stage base and with one degree of freedom relative to the second X reaction mass, and the second X reaction mass moves with three degrees of freedom relative to the stage base and with one degree of freedom relative to the first X reaction mass.

14. The stage assembly of claim 1 further comprising a second X reaction mass that is secured to the mover assembly, wherein movement of the device table generates an X reaction force, and wherein the second X reaction mass moves relative to the reaction base to reduce the X reaction force.

15. The stage assembly of claim 1 further comprising a stage base that supports the device table, wherein the first X reaction mass moves with three degrees of freedom relative to the stage base.

16. The stage assembly of claim 1 further comprising a stage base that supports the device table, wherein the reaction base moves with three degrees of freedom relative to the stage base.

17. The stage assembly of claim 1 further comprising a stage base that supports the device table, and a second X reaction mass that is secured to the mover assembly, wherein movement of the device table generates reaction forces, and the second X reaction mass moves with two degrees of freedom relative to the stage base to reduce the reaction forces.

18. The stage assembly of claim 1 further comprising a stage base that supports the device table, and a second X reaction mass that is secured to the mover assembly, wherein movement of the device table generates reaction forces, and the second X reaction mass moves with three degrees of freedom relative to the stage base to reduce the reaction forces.

19. The stage assembly of claim 1 further comprising a stage base that supports the device table, wherein movement of the device table generates reaction forces, and wherein the first X reaction mass moves with three degrees of freedom relative to the stage base to reduce the reaction forces.

20. The stage assembly of claim 1 wherein the mover assembly includes an X stage mover that moves the device table along an X axis, the X stage mover including a moving component that is connected to the device table and a reaction component that interacts with the moving component, the reaction component being secured to the first X reaction mass.

21. The stage assembly of claim 1 wherein the mover assembly includes a first X stage mover and a second X stage mover that are connected to the device table and that move the device table along an X axis, wherein movement of the device table generates an X reaction force, and wherein movement of the first X reaction mass reduces the X reaction force that is transferred to the reaction base.

22. The stage assembly of claim 1 wherein the mover assembly includes a Y stage mover that is connected to the device table and moves the device table along a Y axis, and an X stage mover that is connected to the Y stage mover and moves the device table along an X axis.

23. An exposure apparatus including the stage assembly of claim 1.

24. A device manufactured with the exposure apparatus according to claim 23.

25. A wafer on which an image has been formed by the exposure apparatus of claim 23.

26. A stage assembly that moves a device along an X axis and along a Y axis, the stage assembly comprising:

a device table that retains the device;

a mover assembly connected to the device table, the mover assembly moving the device table along the X axis and the Y axis;

a first X reaction mass that is secured to the mover assembly;

a second X reaction mass that is secured to the mover assembly;

a reaction base that supports the first X reaction mass and the second X reaction mass and allows the first X reaction mass and the second X reaction mass to move relative to the reaction base along the X axis;

a first Y reaction mass;

a first Y reaction mover connected to the first Y reaction mass, the first Y reaction mover moving the first Y reaction mass relative to the reaction base and generating a first Y correction force along the Y axis that is transferred to the reaction base;

a second Y reaction mass; and

a second Y reaction mover connected to the second Y reaction mass, the second Y reaction mover moving the second Y reaction mass relative to the reaction base and generating a second Y correction force along the Y axis that is transferred to the reaction base.

27. The stage assembly of claim 26 further comprising a reaction mover assembly connected to at least one of the X reaction masses, wherein movement of the device table generates a reaction force about a Z axis, and wherein the reaction mover assembly moves at least one of the X reaction masses to reduce the reaction force around the Z axis that are transferred to the reaction base.

28. The stage assembly of claim 26 further comprising (i) a mounting base that supports the reaction base, (ii) a first X trim mover that moves the first X reaction mass relative to the mounting base, the first X trim mover including a first component that is secured to the first X reaction mass, and a second component that is coupled to the mounting base, and (iii) a second X trim mover that moves the second X reaction mass relative to the mounting base, the second X trim mover including a first component that is secured to the second X reaction mass, and a second component that is coupled to the mounting base.

29. The stage assembly of claim 28 further comprising (i) a first Y trim mover that moves the first Y reaction mass relative to the mounting base, the first Y trim mover including a first component that is secured to the first Y reaction mass, and a second component that is coupled to the mounting base, and (ii) a second Y trim mover that moves the second Y reaction mass relative to the mounting base, the second Y trim mover including a first component that is secured to the second Y reaction mass, and a second component that is coupled to the mounting base.

30. The stage assembly of claim 29 further comprising a reaction mover assembly connected to at least one of the X reaction masses, wherein movement of the device table generates a reaction force about a Z axis, and wherein the reaction mover assembly moves at least one of the X reaction masses to reduce the reaction force around the Z axis that are transferred to the reaction base.

31. The stage assembly of claim 26, wherein the mover assembly includes a first component and a second component that interacts with the first component for causing a force between the first component and the second component, the first component being connected to at least one of the X reaction masses and a second component being connected to the device table.

32. A stage assembly comprising:

a stage that retains the device;

a stage base that supports the stage;

a mover assembly that includes a first component and a second component that is connected to the stage and interacts with the first component for causing a force between the first component and the second component, the mover assembly moving the stage with at least two degrees of freedom relative to the stage base and generating reaction forces in at least two degrees of freedom; and

a reaction assembly including a reaction base, a first reaction mass that is coupled to the first component of the mover assembly and movable along a first direction, and a second reaction mass that is movable independently from the first reaction mass along a second direction that is different from the first direction, the reaction assembly counteracting the reaction forces in at least two degrees of freedom that are transferred to the reaction base.

33. The stage assembly of claim 32 wherein the reaction assembly moves the first reaction mass relative to the reaction base to reduce the amount of a first reaction force that is transferred to the reaction base in accordance with the movement of the stage in the first direction.

34. The stage assembly of claim 33 wherein the mover assembly imparts a rotation reaction force that acts about the axis that is perpendicular to the first and second directions upon the reaction base, and the reaction assembly generates a rotation correction force on the reaction base that counteracts the rotation reaction force.

35. The stage assembly of claim 34 wherein the reaction assembly includes a first reaction mover connected to the first reaction mass, the first reaction mover moving the first reaction mass relative to the reaction base to generate at least a portion of the rotation correction force.

36. The stage assembly of claim 34 wherein the reaction assembly includes a second reaction mover connected to the second reaction mass, the second reaction mover moving the second reaction mass relative to the reaction base to generate at least a portion of the rotation correction force.

37. The stage assembly of claim 34 wherein the reaction assembly includes a first reaction mover connected to the first reaction mass and a second reaction mover connected to the second reaction mass, and wherein the first reaction mover moves a first reaction mass and the second reaction moves the second reaction mass to generate the rotation correction force.

38. The stage assembly of claim 34 wherein the reaction assembly includes a second reaction mover connected to the second reaction mass, the second reaction mover moving the second reaction mass relative to the reaction base to generate a correction force on the reaction base, the correction force counteracting a second reaction force that is imparted upon the reaction base in accordance with the movement of the stage in the second direction.

39. The stage assembly of claim 34 wherein the mover assembly imparts a rotation reaction force that acts about the axis that is perpendicular to the first and second directions upon the reaction base, and the reaction assembly generates a rotation correction force on the reaction base that counteracts the rotation reaction force.

40. The stage assembly of claim 32 wherein the mover assembly imparts a first reaction force that is transferred to the reaction base in accordance with the movement of the stage in the first direction, a second reaction force that is imparted upon the reaction base in accordance with the movement of the stage in the second direction, and a rotation reaction force that acts about the axis that is perpendicular to the first and second directions, and the reaction assembly generates a second correction force on the reaction base that counteracts the second reaction force and a rotary correction force on the reaction base that counteracts the rotation reaction force.