Bi-convex solid immersion lens
First Claim
1. A bi-convex immersion lens, comprising:
- an upper convex surface having a first radius of curvature; and
a bottom convex surface having a second radius of curvature;
wherein the second radius of curvature is larger than the first radius of curvature.
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0 Petitions
Accused Products
Abstract
A bi-convex solid immersion lens is disclosed. Unlike conventional plano-convex solid immersion lenses having a flat bottom surface, the disclosed lens has a convex bottom surface. The radius of curvature of the bottom surface is smaller than that of the object to be inspected. This construction allows for a more accurate determination of the location of the inspected feature, and enhances coupling of light between the immersion lens and the inspected object. The disclosed lens is particularly useful for use in microscope for inspection of semiconductor devices and, especially flip-chip (or chip scale) packaged devices. The immersion lens can also be incorporated in a read or read/write head of optical memory media.
78 Citations
19 Claims
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1. A bi-convex immersion lens, comprising:
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an upper convex surface having a first radius of curvature; and
a bottom convex surface having a second radius of curvature;
wherein the second radius of curvature is larger than the first radius of curvature. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A microscope for inspecting an object, comprising:
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an objective lens; and
a bi-convex immersion lens comprising an upper convex surface having a first radius of curvature and a bottom convex surface having a second radius of curvature;
wherein the second radius of curvature is large than the first radius of curvature. - View Dependent Claims (13, 14, 15, 16)
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17. An immersion lens comprising:
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an upper convex surface having a first radius of curvature;
a bottom surface a second radius of curvature and having a substantially small and defined point of contact;
wherein the second radius of curvature is larger than the first radius of curvature. - View Dependent Claims (18, 19)
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Specification