Heat-treating methods and systems

• US 6,594,446 B2
• Filed: 12/04/2000
• Issued: 07/15/2003
• Est. Priority Date: 12/04/2000
• Status: Expired due to Term

• Current Assignee: Mattson Technology, Inc. (Beijing Economic & Technology Development Area), BeiJing E-Town Semiconductor Technology Co., Ltd.
• Original Assignee: Vortek Industries Ltd. (Beijing Economic & Technology Development Area)
• Inventors: Elliott, J. Kiefer, Camm, David Malcolm
• Primary Examiner(s): Walberg, Teresa
• Assistant Examiner(s): FUQUA, SHAWNTINA T
• Application Number:
  US09/729,747
• Publication Number:
  US 20020067918A1
• Time in Patent Office: 953 Days
• Field of Search: 219/390, 219/405, 219/411, 219/388, 219/121.6, 392/416, 392/418, 392/423, 392/424, 118/724, 118/725, 118/50.1
• US Class Current: 392/416
• CPC Class Codes: C30B 31/12 Heating of the reaction chamber
• CPC Class Codes: F27D 19/00 Arrangements of controlling devices
• CPC Class Codes: F27D 2019/0003 Monitoring the temperature or a characteristic of the charge and using it as a controlling value
• CPC Class Codes: F27D 2099/0026 with a generator of electromagnetic radiations
• CPC Class Codes: H01L 21/268 using electromagnetic radiation, e.g. laser radiation
• CPC Class Codes: H01L 21/2686 using incoherent radiation
• CPC Class Codes: H01L 21/324 Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering H01L21/20 - H01L21/288 and H01L21/302 - H01L21/322 take precedence
• CPC Class Codes: H01L 21/67115 mainly by radiation
• CPC Class Codes: Y10S 438/928 Front and rear surface processing

Abstract

Methods and systems for heat-treating a workpiece are disclosed. A first method involves increasing a temperature of the workpiece over a first time period to an intermediate temperature, and heating a surface of the workpiece to a desired temperature greater than the intermediate temperature, the heating commencing within less time following the first time period than the first time period. A second method involves pre-heating the workpiece from an initial temperature to an intermediate temperature, and heating a surface of the workpiece to a desired temperature greater than the intermediate temperature by an amount less than or equal to about one-fifth of a difference between the intermediate and initial temperatures. A third method involves irradiating a first side of the workpiece to pre-heat the workpiece to an intermediate temperature, and irradiating a second side of the workpiece to heat the second side to a desired temperature greater than the intermediate temperature.

Claims

1. A method of heat-treating a workpiece, the method comprising:

a) increasing a temperature of the workpiece over a first time period to an intermediate temperature, wherein increasing comprises pre-heating said workpiece at a rate of at least 250°

C. per second; and

b) heating a surface of the workpiece to a desired temperature greater than said intermediate temperature, said heating commencing within less time following said first time period than said first time period.

2. The method of claim 1 wherein increasing comprises pre-heating said workpiece at a rate of at least 400°

C. per second.

3. A method of heat-treating a workpiece, the method comprising:

a) increasing a temperature of the workpiece over a first time period to an intermediate temperature, wherein increasing comprises pre-heating the workpiece to said intermediate temperature; and

b) heating a surface of the workpiece to a desired temperature greater than said intermediate temperature, said heating commencing within less time following said first time period than said first time period, wherein heating comprises heating said surface to a desired temperature greater than said intermediate temperature by an amount less than or equal to about one-fifth of a difference between said intermediate and initial temperatures.

4. The method of claim 3 wherein pre-heating comprises irradiating a first side of the workpiece to pre-heat the workpiece to said intermediate temperature, and wherein heating comprises irradiating a second side of the workpiece to heat said second side to said desired temperature.

5. A system for heat-treating a workpiece, the system comprising:

a) a pre-heating device operable to increase a temperature of the workpiece over a first time period, to an intermediate temperature, wherein said pre-heating device is operable to pre-heat said workpiece at a rate of at least 250°

C. per second; and

b) a heating device operable to heat a surface of the workpiece to a desired temperature greater than said intermediate temperature, and operable to commence said heating within less time following said first time period than said first time period.

6. The system of claim 5 wherein said pre-heating device is operable to pre-heat said workpiece at a rate of at least 400°

C. per second.

7. A method of heat-treating a workpiece, the method comprising:

a) pre-heating the workpiece from an initial temperature to an intermediate temperature; and

b) heating a surface of the workpiece to a desired temperature greater than said intermediate temperature by an amount less than or equal to about one-fifth of a difference between said intermediate and initial temperatures.

8. The method of claim 7 wherein heating said surface to said desired temperature comprises heating said surface to a desired temperature greater than said intermediate temperature by an amount less than or equal to about one-tenth of said difference between said intermediate and initial temperatures.

9. The method of claim 7 wherein heating said surface to said desired temperature comprises heating said surface to a desired temperature greater than said intermediate temperature by an amount less than or equal to about one-twentieth of said difference between said intermediate and initial temperatures.

10. The method of claim 7 wherein said desired temperature is at least about 1050°

C.

11. The method of claim 7 wherein pre-heating comprises pre-heating the workpiece for a time period greater than a thermal conduction time of the workpiece.

12. The method of claim 7 wherein heating comprises heating said surface for a time period less than a thermal conduction time of the workpiece.

13. The method of claim 7 wherein pre-heating comprises irradiating the workpiece.

14. The method of claim 13 wherein irradiating comprises exposing the workpiece to electromagnetic radiation produced by an arc lamp.

15. The method of claim 13 wherein irradiating comprises exposing the workpiece to electromagnetic radiation produced by at least one filament lamp.

16. The method of claim 7 wherein pre-heating comprises pre-heating said workpiece at a rate of at least 250°

C. per second.

17. The method of claim 7 wherein pre-heating comprises pre-heating said workpiece at a rate of at least 400°

C. per second.

18. The method of claim 7 wherein heating said surface of the workpiece comprises irradiating said surface.

19. The method of claim 18 wherein irradiating comprises exposing said surface to electromagnetic radiation produced by a flash lamp.

20. The method of claim 18 wherein irradiating comprises moving a laser beam across said surface.

21. The method of claim 7 further comprising producing an indication of a temperature of the workpiece.

22. The method of claim 21 wherein heating said surface comprises commencing said heating in response to an indication that said temperature of the workpiece is at least said intermediate temperature.

23. The method of claim 7 further comprising absorbing radiation reflected and thermally emitted by the workpiece.

24. The method of claim 22 wherein absorbing comprises absorbing said radiation in a radiation absorbing environment.

25. The method of claim 22 wherein absorbing comprises absorbing said radiation in at least one radiation absorbing surface.

26. The method of claim 25 further comprising cooling said at least one radiation absorbing surface.

27. The method of claim 7 wherein pre-heating comprises irradiating a first side of the workpiece to pre-heat the workpiece to said intermediate temperature, and wherein heating comprises irradiating a second side of the workpiece to heat said second side to said desired temperature.

28. A system for heat-treating a workpiece, the system comprising:

a) a pre-heating device operable to pre-heat the workpiece from an initial temperature to an intermediate temperature; and

b) a heating device operable to heat a surface of the workpiece to a desired temperature greater than said intermediate temperature by an amount less than or equal to about one-fifth of a difference between said intermediate and initial temperatures.

29. The system of claim 28 wherein said heating device is operable to heat said surface to a desired temperature greater than said intermediate temperature by an amount less than or equal to about one-tenth of said difference between said intermediate and initial temperatures.

30. The system of claim 28 wherein said heating device is operable to heat said surface to a desired temperature greater than said intermediate temperature by an amount less than or equal to about one-twentieth of said difference between said intermediate and initial temperatures.

31. The system of claim 28 wherein said heating device is operable to heat said surface to at least about 1050°

C.

32. The system of claim 28 wherein said pre-heating device is operable to pre-heat the workpiece for a time period greater than a thermal conduction time of the workpiece.

33. The system of claim 28 wherein said heating device is operable to heat said surface for a time period less than a thermal conduction time of the workpiece.

34. The system of claim 28 wherein said pre-heating device comprises means for irradiating the workpiece.

35. The system of claim 28 wherein said pre-heating device comprises an irradiance source operable to irradiate the workpiece.

36. The system of claim 35 wherein said irradiance source comprises an arc lamp.

37. The system of claim 35 wherein said irradiance source comprises at least one filament lamp.

38. The system of claim 28 wherein said pre-heating device comprises a hot body locatable to pre-heat the workpiece.

39. The system of claim 28 wherein said pre-heating device is operable to pre-heat said workpiece at a rate of at least 250°

C. per second.

40. The system of claim 28 wherein said pre-heating device is operable to pre-heat said workpiece at a rate of at least 400°

C. per second.

41. The system of claim 28 wherein said heating device comprises means for irradiating said surface.

42. The system of claim 28 wherein said heating device comprises an irradiance source operable to irradiate said surface.

43. The system of claim 42 wherein said irradiance source comprises a flash lamp.

44. The system of claim 41 wherein said irradiance source comprises a laser.

45. The system of claim 28 further comprising a temperature indicator operable to produce an indication of a temperature of the workpiece.

46. The system of claim 45 wherein said heating device is operable to commence said heating in response to an indication from said temperature indicator that said temperature of the workpiece is at least said intermediate temperature.

47. The system of claim 28 further comprising a radiation absorbing environment operable to absorb radiation reflected and thermally emitted by the workpiece.

48. The system of claim 28 further comprising at least one radiation absorbing surface operable to absorb radiation reflected and thermally emitted by the workpiece.

49. The system of claim 48 further comprising a cooling system operable to cool said at least one radiation absorbing surface.

50. The system of claim 28 wherein said pre-heating device comprises a first irradiance source operable to irradiate a first side of the workpiece to pre-heat the workpiece to said intermediate temperature, and wherein said heating device comprises a second irradiance source operable to irradiate a second side of the workpiece to heat said second side to said desired temperature.

51. A system for heat-treating a workpiece, the system comprising:

a) means for pre-heating the workpiece from an initial temperature to an intermediate temperature; and

b) means for heating a surface of the workpiece to a desired temperature greater than said intermediate temperature by an amount less than or equal to about one-fifth of a difference between said intermediate and initial temperatures.

56. The apparatus of claim 51 wherein said means for heating said surface to said desired temperature comprises means for heating said surface to a desired temperature greater than said intermediate temperature by an amount less than or equal to about one-tenth of said difference between said intermediate and initial temperatures.

57. The apparatus of claim 51 wherein heating said surface to said desired temperature comprises heating said surface to a desired temperature greater than said intermediate temperature by an amount less than or equal to about one-twentieth of said difference between said intermediate and initial temperatures.

58. The apparatus of claim 51 wherein said desired temperature is at least about 1050°

C.

59. The apparatus of claim 51 wherein said means for pre-heating comprises means for pre-heating the workpiece for a time period greater than a thermal conduction time of the workpiece.

60. The apparatus of claim 51 wherein said means for heating comprises means for heating said surface for a time period less than a thermal conduction time of the workpiece.

61. The apparatus of claim 51 wherein said means for pre-heating comprises means for irradiating the workpiece.

62. The apparatus of claim 61 wherein said means for irradiating comprises means for exposing the workpiece to electromagnetic radiation produced by an arc lamp.

63. The apparatus of claim 61 wherein said means for irradiating comprises means for exposing the workpiece to electromagnetic radiation produced by at least one filament lamp.

64. The apparatus of claim 51 wherein said means for pre-heating comprises means for pre-heating said workpiece at a rate of at least 250°

C. per second.

65. The apparatus of claim 51 wherein said means for pre-heating comprises means for pre-heating said workpiece at a rate of at least 400°

C. per second.

66. The apparatus of claim 51 wherein said means for heating said surface of the workpiece comprises means for irradiating said surface.

67. The apparatus of claim 66 wherein said means for irradiating comprises means for exposing said surface to electromagnetic radiation produced by a flash lamp.

68. The apparatus of claim 66 wherein said means for irradiating comprises means for moving a laser beam across said surface.

69. The apparatus of claim 51 further comprising means for producing an indication of a temperature of the workpiece.

70. The apparatus of claim 69 wherein said means for heating said surface comprises means for commencing said heating in response to an indication that said temperature of the workpiece is at least said intermediate temperature.

71. The apparatus of claim 51 further comprising means for absorbing radiation reflected and thermally emitted by the workpiece.

72. The apparatus of claim 71 wherein said means for absorbing comprises a radiation absorbing environment.

73. The apparatus of claim 71 wherein said means for absorbing comprises at least one radiation absorbing surface.

74. The apparatus of claim 73 further comprising means for cooling said at least one radiation absorbing surface.

75. The apparatus of claim 51 wherein said means for pre-heating comprises means for irradiating a first side of the workpiece to pre-heat the workpiece to said intermediate temperature, and wherein said means for heating comprises irradiating a second side of the workpiece to heat said second side to said desired temperature.

52. A method of heat-treating a workpiece, the method comprising:

a) irradiating a first side of the workpiece to pre-heat the workpiece to an intermediate temperature, wherein irradiating said first side comprises irradiating said first side with a radiation intensity sufficient to pre-heat said workpiece at a rate of at least 250°

C. per second; and

b) irradiating a second side of the workpiece to heat said second side to a desired temperature greater than said intermediate temperature.

53. The method of claim 52 wherein irradiating said first side comprises irradiating said first side with a radiation intensity sufficient to pre-heat said workpiece at a rate of at least 400°

C. per second.

54. A system for heat-treating a workpiece, the system comprising:

a) a first irradiance source operable to irradiate a first side of the workpiece to pre-heat the workpiece to an intermediate temperature, wherein said first irradiance source is operable to irradiate said first side with a radiation intensity sufficient to pre-heat said workpiece at a rate of at least 250°

C. per second; and

b) a second irradiance source operable to irradiate a second side of the workpiece to heat said second side to a desired temperature greater than said intermediate temperature.

55. The system of claim 54 wherein said first irradiance source is operable to irradiate said first side with a radiation intensity sufficient to pre-heat said workpiece at a rate of at least 400°

C. per second.