Method and apparatus for monitoring tool health
First Claim
1. A method for monitoring health of a tool, comprising:
- receiving at least one measured tool parameter related to the processing of a workpiece in a tool;
receiving a model selection trigger;
selecting a tool health model based on the model selection trigger;
generating at least one predicted tool parameter based on the selected tool health model and the measured tool parameter; and
generating a tool health rating for the tool based on a comparison between the measured tool parameter and the predicted tool parameter.
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Abstract
A method for monitoring health of a tool includes receiving at least one tool parameter related to the processing of a workpiece in a tool; receiving a model selection trigger; selecting a tool health model based on the model selection trigger; generating at least one predicted tool parameter based on the selected tool health model; and generating a tool health rating for the tool based on a comparison between the measured tool parameter and the predicted tool parameter. A tool health monitor includes a library of tool health models, a model selector, and a fault detection and classification unit. The model selector is adapted to receive a model selection trigger and select a tool health model based on the model selection trigger. The fault detection and classification unit is adapted to receive at least one tool parameter related to the processing of a workpiece in a tool, generate at least one predicted tool parameter based on the selected tool health model, and generate a tool health rating for the tool based on a comparison between the received tool parameter and the predicted tool parameter.
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Citations
51 Claims
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1. A method for monitoring health of a tool, comprising:
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receiving at least one measured tool parameter related to the processing of a workpiece in a tool;
receiving a model selection trigger;
selecting a tool health model based on the model selection trigger;
generating at least one predicted tool parameter based on the selected tool health model and the measured tool parameter; and
generating a tool health rating for the tool based on a comparison between the measured tool parameter and the predicted tool parameter. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
selecting a second tool health model in response to identifying the degraded tool condition; and
generating a second tool health rating based on the second tool health model and the measured tool parameter.
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14. The method of claim 13, wherein selecting the second tool health model further comprises selecting the second tool health model having a higher precision than the first tool health model.
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15. The method of claim 1, wherein selecting the tool health model further comprises selecting the tool health model from a library of tool health models.
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16. The method of claim 15, wherein the tool is adapted to process the workpiece in accordance with a base operating recipe, and the library of tool health models is associated with the base operating recipe.
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17. The method of claim 15, wherein the tool is adapted to process the workpiece in accordance with one of a plurality of base operating recipes, and the library of tool health models includes subsets of tool health models, each subset being associated with a particular one of the base operating recipes.
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18. A manufacturing system, comprising:
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a tool adapted to process a workpiece; and
a tool health monitor adapted to receive at least one tool parameter related to the processing of a workpiece in the tool, receive a model selection trigger, select a tool health model based on the model selection trigger, generate at least one predicted tool parameter based on the selected tool health model and the measured tool parameter, and generate a tool health rating for the tool based on a comparison between the received tool parameter and the predicted tool parameter. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34)
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35. A tool health monitor, comprising:
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a library of tool health models;
a model selector adapted to receive a model selection trigger and select at least one of the tool health models based on the model selection trigger; and
a fault detection and classification unit adapted to receive at least one tool parameter related to the processing of a workpiece in a tool, generate at least one predicted tool parameter based on the selected tool health model and the received tool parameter, and generate a tool health rating for the tool based on a comparison between the received tool parameter and the predicted tool parameter. - View Dependent Claims (36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50)
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51. A manufacturing system, comprising:
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means for receiving at least one tool parameter related to the processing of a workpiece in a tool;
means for receiving a model selection trigger;
means for selecting a tool health model based on the model selection trigger and the received tool parameter;
means for generating at least one predicted tool parameter based on the selected tool health model; and
means for generating a tool health rating for the tool based on a comparison between the measured tool parameter and the predicted tool parameter.
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Specification