Method of separating a plate-like workpiece held by adhesion on an elastic adsorption pad
First Claim
1. A method of separating a plate-like workpiece held by adhesion on an elastic adhesive pad from the elastic adhesive pad, the elastic adhesive pad having numerous pores in the surface and generating adhesive force when negative pressure is produced by the pores when crushed by restoration force generated by elasticity and adhesion, which method comprises the step of separating the plate-like workpiece from the elastic adhesive pad by air in the pores being expanded by heating the elastic adhesive pad to a predetermined temperature.
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Abstract
A method of separating a plate-like workpiece held by adhesion on an elastic adhesive pad from the pad. The elastic adhesive pad has innumerable pores in its surface and generates adhesive force when negative pressure is produced by the pores, after being crushed, by restoration force generated by elasticity and adhesion. The method includes the step of heating the elastic adhesive pad at a predetermined temperature to separate the plate-like workpiece from the elastic adhesive pad by air expanding in the pores.
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Citations
7 Claims
- 1. A method of separating a plate-like workpiece held by adhesion on an elastic adhesive pad from the elastic adhesive pad, the elastic adhesive pad having numerous pores in the surface and generating adhesive force when negative pressure is produced by the pores when crushed by restoration force generated by elasticity and adhesion, which method comprises the step of separating the plate-like workpiece from the elastic adhesive pad by air in the pores being expanded by heating the elastic adhesive pad to a predetermined temperature.
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