Thermal mass flow sensor with improved sensitivity and response time

• US 6,595,049 B1
• Filed: 06/18/1999
• Issued: 07/22/2003
• Est. Priority Date: 06/18/1999
• Status: Expired due to Term

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Maginnis, Thomas O. Jr., Baxter, Wilfred J. Jr.
• Primary Examiner(s): Williams, Hezron
• Assistant Examiner(s): Mack, Corey D.
• Application Number:
  US09/335,953
• Time in Patent Office: 1,495 Days
• Field of Search: 732/02, 732/025, 732/041.1, 732/041.2, 732/042.5, 732/042.7, 732/042.2, 732/042.1
• US Class Current: 73/202.5
• CPC Class Codes: G01F 1/6847 where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
• CPC Class Codes: G01F 5/00 Measuring a proportion of the volume flow

Abstract

A thermal mass flow sensor having superior sensitivity and response time includes a flow sensor tube defining an interior channel for fluid flow between input and output ends, a heating element in thermal communication with a portion of the flow sensor tube for heating a fluid flowing through the tube, a pair of spatially compact thermal sensors located at the upstream and downstream ends of the heating element for sensing the temperature of the fluid flowing through the tube at their respective locations and providing a signal representative of the fluid temperature at those locations, and a pair of thermal grounding members on the flow sensor tube, yet positioned at specified locations substantially beyond the heated portion of the tube, for establishing reference temperatures for the fluid flowing therethrough at those locations.

Claims

1. A thermal mass flow sensor, comprising:

a) a flow sensor tube defining an input end, an output end, and an interior channel for fluid flow between the input and output ends;

b) a heating element in thermal communication with a portion of the flow sensor tube for heating a fluid flowing therethrough, the heating element being made of a material having a low temperature coefficient of resistance and providing a heat density distribution along the portion of the flow sensor tube;

c) a pair of thermal sensors, separate from the heating element, in thermal communication with the flow sensor tube, each sensor located at a respective end of the heating element on the flow sensor tube, for sensing the temperature of the fluid flowing through the flow sensor tube and providing a signal representative of the fluid temperature at the respective thermal sensor locations; and

d) a pair of thermal grounding members on the flow sensor tube spaced a predetermined distance from the ends of the heating element for establishing respective inlet and outlet reference temperatures for the fluid flowing through the flow sensor tube substantially independently of the heat density distribution provided by the heating element along the portion of the flow sensor tube.

2. A thermal mass flow sensor according to claim 1, wherein the heating element comprises a heating coil which is substantially uniformly wound around the flow sensor tube and establishes a substantially uniform heater density over the portion of the flow sensor tube in direct contact with the heating element.

3. A thermal mass flow sensor according to claim 2, wherein the effective length between the thermal grounding members, is approximately equal to twice the length of the heating coil.

4. A thermal mass flow sensor according to claim 3, wherein the heating coil is substantially centered between the thermal grounding members.

5. A thermal mass flow sensor according to claim 4, wherein the length of the portion of thermal sensors on the sensor tube is short relative to the length of the portion of the flow sensor tube in direct contact with the heating coil.

6. A thermal mass flow sensor according to claim 5, wherein the thermal sensors comprise matched thermistors.

7. A thermal mass flow sensor according to claim 5, wherein the thermal sensors comprise heat flux sensors.

8. A thermal mass flow sensor, comprising:

a) a flow sensor tube defining an input end, an output end, and an interior channel for fluid flow between the input and output ends;

b) a heater arrangement, in thermal communication with a portion of the flow sensor tube that heats a fluid flowing therethrough so as to provide a heat density distribution along the portion of the flow sensor tube;

c) a pair of thermal sensors, separate from the heater means, in thermal communication with the flow sensor tube, each sensor located at a respective end of the heater means on the flow sensor tube, for sensing the temperature of the fluid flowing through the flow sensor tube and providing a signal representative of the fluid temperature at the respective thermal sensor locations; and

d) a pair of thermal grounding members on the flow sensor tube spaced a predetermined distance from the ends of the heater means for establishing respective inlet and outlet reference temperatures for the fluid flowing through the flow sensor tube substantially independently of the heat density distribution provided by the heater means along the portion of the flow sensor tube.