Micromachined silicon gyro using tuned accelerometer
First Claim
1. An accelerometer gyro for sensing linear acceleration having a sensing element formed from a substantially planar monolithic material, the accelerometer gyro sensing element comprising:
- a frame portion;
a vibrating structure having a top, bottom and sides disposed within said frame portion and connected to said frame portion by a suspension, said vibrating structure and the suspension having a natural frequency of vibration; and
a pendulum disposed within said vibrating structure and connected to said vibrating structure by a flexure joint, the pendulum and the flexure joint being designed to have a natural frequency of oscillation that is related to the natural frequency of vibration of the vibrating structure and suspension.
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Accused Products
Abstract
A micromachined silicon tuned accelerometer gyro is formed out of silicon wafers, by micromachining. The top and bottom cover which include driver, forcer, tuning and guard ring elements mounted therein are micromachined in arrays on silicon-on-insulator (SOI) wafers. The center (driver and sensing) element between the top and bottom is micromachined in an array of four inch diameter silicon wafers. The driver and sensing structure is a tuned pendulum attached by flexure joints to a vibrating structure which is in then suspended by a parallelogram dither suspension. The pendulum is tuned by adjusting the magnitude of a d.c. signal to match the natural frequency of the pendulum to the natural frequency of the vibrating structure. The dither suspension flexures of the vibrating structure is uniquely defined and easily machined but yet provides a dither suspension that restrains the vibrating structure within its vibrating plane with no harmonic distortion.
49 Citations
18 Claims
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1. An accelerometer gyro for sensing linear acceleration having a sensing element formed from a substantially planar monolithic material, the accelerometer gyro sensing element comprising:
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a frame portion;
a vibrating structure having a top, bottom and sides disposed within said frame portion and connected to said frame portion by a suspension, said vibrating structure and the suspension having a natural frequency of vibration; and
a pendulum disposed within said vibrating structure and connected to said vibrating structure by a flexure joint, the pendulum and the flexure joint being designed to have a natural frequency of oscillation that is related to the natural frequency of vibration of the vibrating structure and suspension. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification