Organic substrate having optical layers deposited by magnetron sputtering and method for preparing it
First Claim
1. An organic substrate having an optically-active stack on at least one side thereof wherein said optically-active stack comprises at least one optical layer having a high refractive index and at least one optical layer having a low refractive index, said at least one high refractive index layer being deposited by magnetron sputtering at a pressure of from 1.5 Pa to 5.0 Pa.
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Abstract
An organic substrate having optically-active layers deposited by magnetron sputtering and a preparation process for it are provided. Gas pressure used for carrying out better adhesion by sputtering is high, comprised between 0.8 and 5.0 Pa. Sputtering is particularly suitable for targets of Si, Ti, Zr and organic substrates with or without anti-abrasive coating. Improved adhesion of thin films is obtained.
30 Citations
64 Claims
- 1. An organic substrate having an optically-active stack on at least one side thereof wherein said optically-active stack comprises at least one optical layer having a high refractive index and at least one optical layer having a low refractive index, said at least one high refractive index layer being deposited by magnetron sputtering at a pressure of from 1.5 Pa to 5.0 Pa.
- 5. An organic substrate having an optically-active stack on at least one side thereof wherein said optically-active stack comprises at least one optical layer having a high refractive index and at least one optical layer having a low refractive index, at least one of said layers being deposited by magnetron sputtering at high pressure from 1.5 to 5.0 Pa, said sputtering being carried out with the substrate being located at least at 90 mm from the magnetron.
- 19. An organic substrate having an optically-active stack on at least one side thereof wherein said optically-active stack comprises at least one optical layer having a high refractive index and at least one optical layer having a low refractive index comprising depositing at least one of said optical layers by magnetron sputtering at a pressure from 1.5 Pa to 5.0 Pa.
Specification