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Systems and methods for detection of labeled materials

  • US 6,597,000 B2
  • Filed: 07/08/2002
  • Issued: 07/22/2003
  • Est. Priority Date: 05/16/1996
  • Status: Expired due to Term
First Claim
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1. A system for detecting marked regions on a surface, comprising:

  • an excitation radiation source;

    a focusing optics constructed and arranged to focus radiation from said excitation radiation source onto a surface region of a wafer including several chips with probe sequences;

    a focusing system constructed and arranged to displace said wafer to bring at least a portion of said wafer in focus with respect to said focused radiation;

    a radiation direction system constructed and arranged to scan said excitation radiation across several surface regions;

    a translation stage upon which said wafer is mounted, said translation stage being moveable in at least one dimension and being arranged with said radiation direction system to scan a plurality of different chips on said wafer;

    a detector for detecting fluorescent radiation emitted from said surface region in response to said excitation radiation; and

    a data acquisition system for recording an amount of said fluorescent radiation detected as a function of a position on said surface region from which said fluorescent radiation was emitted.

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