Micromechanical optical switch
First Claim
1. An optical communication device comprising:
- a circulator operable to receive an input optical signal;
a first receiver coupled to a first output of the circulator;
a second receiver coupled to a second output of the circulator; and
an optical switching element coupled between the circulator and the second receiver, the optical switching element operable to selectively communicate the optical signal for receipt by the first or second receiver depending on an application of a control signal to the switching element;
wherein the optical switching element comprises;
a fixed layer disposed outwardly from a substrate; and
a unitary movable mirror assembly disposed outwardly from the fixed layer and forming with the fixed layer an optical cavity, the moveable mirror assembly operable to move relative to the fixed layer in response to a voltage applied to the moveable mirror assembly to affect a change in an optical characteristic of the optical cavity.
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Accused Products
Abstract
An optical switch element is described, which includes a fixed layer disposed outwardly from a substrate and a movable mirror assembly disposed outwardly from the fixed layer. The moveable mirror assembly is operable to move relative to the fixed layer responsive to a voltage applied to the movable mirror assembly. In a particular embodiment, the movable mirror assembly includes an inner strip spaced apart from the fixed layer by a first distance and an outer strip disposed approximately adjacent to the inner strip and spaced apart from the fixed layer by a second distance which is greater than the first distance. The optical transmission of the optical switch element changes depending on the position of the movable mirror assembly.
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Citations
33 Claims
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1. An optical communication device comprising:
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a circulator operable to receive an input optical signal;
a first receiver coupled to a first output of the circulator;
a second receiver coupled to a second output of the circulator; and
an optical switching element coupled between the circulator and the second receiver, the optical switching element operable to selectively communicate the optical signal for receipt by the first or second receiver depending on an application of a control signal to the switching element;
wherein the optical switching element comprises;
a fixed layer disposed outwardly from a substrate; and
a unitary movable mirror assembly disposed outwardly from the fixed layer and forming with the fixed layer an optical cavity, the moveable mirror assembly operable to move relative to the fixed layer in response to a voltage applied to the moveable mirror assembly to affect a change in an optical characteristic of the optical cavity.
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2. An optical processing device comprising:
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a demultiplexer operable to receive a multiple wavelength input optical signal and to separate the multiple wavelength signal into a plurality of wavelength signals; and
an array of optical communication elements operable to receive at least some of the plurality of wavelength signals and to provide an optical processing function to the received wavelength signal, at least one of the optical communication elements comprising;
a fixed layer disposed outwardly from a substrate; and
a unitary movable mirror assembly disposed outwardly from the fixed layer and forming with the is fixed layer an optical cavity, the moveable mirror assembly operable to move relative to the fixed layer in response to a voltage applied to the moveable mirror assembly to affect a change in an optical characteristic of the optical cavity;
wherein the optical communication element is operable to change between a substantially transmissive state and a less than substantially transmissive state in response to the applied voltage. - View Dependent Claims (3, 4, 5, 6)
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7. An optical processing device comprising:
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an optical tap operable to split off at least a portion of the optical signal;
a demultiplexer operable to receive the at least a portion of the optical signal and to separate the at least a portion of the optical signal into a plurality of wavelength signals; and
an array of optical communication elements operable to receive at least some of the plurality of wavelength signals and to provide an optical processing function to the received wavelength signal, at least one of the optical communication elements comprising;
a fixed layer disposed outwardly from a substrate; and
a unitary movable mirror assembly disposed outwardly from the fixed layer and forming with the fixed layer an optical cavity, the moveable mirror assembly operable to move relative to the fixed layer in response to a voltage applied to the moveable mirror assembly to affect a change in an optical characteristic of the optical cavity;
wherein the optical communication element is operable to change between a substantially transmissive state and a less than substantially transmissive state in response to the applied voltage. - View Dependent Claims (8, 9, 10, 11, 12)
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13. An optical communication device comprising:
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a circulator operable to receive an input optical signal;
a first receiver coupled to a first output of the circulator;
a second receiver coupled to a second output of the circulator; and
an optical switching element coupled between the circulator and the second receiver, the optical switching element operable to selectively communicate the optical signal for receipt by the first or second receiver depending on an application of a control signal to the switching element;
wherein the optical switching element comprises;
a fixed layer disposed outwardly from a substrate; and
a unitary movable mirror structure disposed outwardly from the fixed layer and forming with the fixed layer a cavity, the moveable mirror structure operable to move relative to the fixed layer in response to a voltage applied to the moveable mirror structure to affect a change in a characteristic of the optical communication device.
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14. An optical processing device comprising:
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a demultiplexer operable to receive a multiple wavelength input optical signal and to separate the multiple wavelength signal into a plurality of wavelength signals; and
an array of optical communication elements operable to receive at least some of the plurality of wavelength signals and to provide an optical processing function to the received wavelength signal, at least one of the optical communication elements comprising;
a fixed layer disposed outwardly from a substrate; and
a unitary movable mirror structure disposed outwardly from the fixed layer and forming with the fixed layer a cavity, the moveable mirror structure operable to move relative to the fixed layer in response to a voltage applied to the moveable mirror structure to affect a change in a characteristic of the optical processing device;
wherein the optical communication element is operable to change between a substantially transmissive state and a less than substantially transmissive state in response to the applied voltage. - View Dependent Claims (15, 16, 17)
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18. An optical processing device comprising:
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an optical tap operable to split off at least a portion of the optical signal;
a demultiplexer operable to receive the at least a portion of the optical signal and to separate the at least a portion of the optical signal into a plurality of wavelength signals; and
an array of optical communication elements operable to receive at least some of the plurality of wavelength signals and to provide an optical processing function to the received wavelength signal, at least one of the optical communication elements comprising;
a fixed layer disposed outwardly from a substrate; and
a unitary movable mirror structure disposed outwardly from the fixed layer and forming with the fixed layer a cavity, the moveable mirror structure operable to move relative to the fixed layer in response to a voltage applied to the moveable mirror structure to affect a change in a characteristic of the optical processing device;
wherein the optical communication element is operable to change between a substantially transmissive state and a less than substantially transmissive state in response to the applied voltage. - View Dependent Claims (19, 20, 21, 22)
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23. An optical processing device comprising:
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a demultiplexer operable to receive a multiple wavelength input optical signal and to separate the multiple wavelength signal into a plurality of wavelength signals; and
an array of optical communication elements operable to receive at least some of the plurality of wavelength signals and to provide an optical processing function to the received wavelength signal, at least one of the optical communication elements comprising;
a fixed layer disposed outwardly from a substrate; and
a unitary movable mirror structure disposed outwardly from the fixed layer and forming with the fixed layer a cavity, the moveable mirror structure operable to move relative to the fixed layer in response to a voltage applied to the moveable mirror structure to affect a change in a characteristic of the optical processing device. - View Dependent Claims (24, 25, 26, 27)
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28. An optical processing device comprising:
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an optical tap operable to split off at least a portion of the optical signal;
a demultiplexer operable to receive the at least a portion of the optical signal and to separate the at least a portion of the optical signal into a plurality of wavelength signals; and
an array of optical communication elements operable to receive at least some of the plurality of wavelength signals and to provide an optical processing function to the received wavelength signal, at least one of the optical communication elements comprising;
a fixed layer disposed outwardly from a substrate; and
a unitary movable mirror structure disposed outwardly from the fixed layer and forming with the fixed layer a cavity, the moveable mirror structure operable to move relative to the fixed layer in response to a voltage applied to the moveable mirror structure to affect a change in a characteristic of the optical processing device. - View Dependent Claims (29, 30, 31, 32, 33)
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Specification