Angular velocity sensor
First Claim
1. An angular velocity sensor comprising:
- (a) a first beam;
(b) a second beam, having a length substantially equal to that of the first beam, disposed substantially in parallel to the first beam;
(c) a third beam, having the length substantially equal to that of the first beam, disposed substantially in parallel to the first beam on an opposite side to the second beam and in the substantially identical plane with the first and the second beams;
(d) a fourth beam connecting each end of the first, the second, and the third beams; and
(e) a fifth beam connecting each other end of the first, the second, and the third beam, wherein the first beam is supportively fixed at a mid-portion thereof.
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Accused Products
Abstract
Here disclosed is an angular velocity sensor with much accuracy, not allowing other vibration components to mix into the Coriolis force component. The angular velocity sensor contains a first through a fifth beams: the first, the second, and the third beams have a length of substantially the same and disposed in a substantially parallel arrangement on a substantially the same plane—with the first beam placed between the second and the third; the fourth connects each one end of the first through the third, while the fifth connects each other end of them. The first beam is supportively fixed at its mid-portion. The first beam serves as a detector; the second serves as a driver; and the third serves as a monitor.
24 Citations
14 Claims
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1. An angular velocity sensor comprising:
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(a) a first beam;
(b) a second beam, having a length substantially equal to that of the first beam, disposed substantially in parallel to the first beam;
(c) a third beam, having the length substantially equal to that of the first beam, disposed substantially in parallel to the first beam on an opposite side to the second beam and in the substantially identical plane with the first and the second beams;
(d) a fourth beam connecting each end of the first, the second, and the third beams; and
(e) a fifth beam connecting each other end of the first, the second, and the third beam, wherein the first beam is supportively fixed at a mid-portion thereof. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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Specification