Overload resistant differential pressure sensor
First Claim
1. A differential pressure sensor comprising:
- a rigid carrier plate arranged between first and second diaphragm plates, said carrier plate having congruent concave depressions on opposite sides of said carrier plate;
a decentered duct penetrating said carrier plate perpendicularly to the plane of said first and second diaphragm plates, said duct hydraulically coupling said depressions to each other;
first and second measuring chambers, each of said chambers limited by said carrier plate and an associated one of said first and said second diaphragm plates;
said first and said second diaphragm plates in the region of said associated one of said first and said second measuring chambers are each formed congruently as pressure sensitive measuring diaphragms in relation to an associated one of concave depressions in said carrier plate; and
an incompressible fluid filling said first and second measuring chambers and said duct.
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Accused Products
Abstract
A differential pressure sensor has a first and a second measuring chamber. Each measuring chamber is limited by a rigid carrier plate and a diaphragm plate, which is formed in the region of the measuring chamber as a pressure-sensitive measuring diaphragm. To design the differential pressure sensor to be resistant to overloading, the carrier plate is arranged between a first and a second diaphragm plate and has congruent concave depressions on opposite sides in the plane of the plate. The depressions are connected to one another by a decentered duct, penetrating the carrier plate perpendicularly to the plane of the plates. In the region of the measuring chambers, the diaphragm plates are formed congruently in relation to the depressions as pressure-sensitive measuring diaphragms. The measuring chambers and the duct are filled with an incompressible fluid.
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Citations
19 Claims
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1. A differential pressure sensor comprising:
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a rigid carrier plate arranged between first and second diaphragm plates, said carrier plate having congruent concave depressions on opposite sides of said carrier plate;
a decentered duct penetrating said carrier plate perpendicularly to the plane of said first and second diaphragm plates, said duct hydraulically coupling said depressions to each other;
first and second measuring chambers, each of said chambers limited by said carrier plate and an associated one of said first and said second diaphragm plates;
said first and said second diaphragm plates in the region of said associated one of said first and said second measuring chambers are each formed congruently as pressure sensitive measuring diaphragms in relation to an associated one of concave depressions in said carrier plate; and
an incompressible fluid filling said first and second measuring chambers and said duct. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method for making a differential pressure sensor with first and second measuring chambers comprising:
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a. providing congruent concave depressions on opposite sides of a rigid carrier plate in the plane of said carrier plate;
b. arranging said carrier plate between first and second diaphragm plates, said first and second diaphragm plates formed congruently in the region of an associated one of said concave depressions as first and second pressure sensitive measuring diaphragms;
c. hydraulically coupling said concave depressions to each other by a decentered duct which penetrates said carrier plate perpendicularly to the plane of said first and second diaphragm plates; and
d. filling said measuring chamber and said duct with an incompressible fluid. - View Dependent Claims (14, 15, 16, 17, 18, 19)
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Specification