Surface micromachined optical system with reinforced mirror microstructure

• US 6,600,587 B2
• Filed: 04/23/2001
• Issued: 07/29/2003
• Est. Priority Date: 04/23/2001
• Status: Expired due to Term

• Current Assignee: NeoPhotonics Corporation (Lumentum Holdings Inc.)
• Original Assignee: MEMX, Inc. (Lumentum Holdings Inc.)
• Inventors: Sniegowski, Jeffry J., Rodgers, M. Steven
• Primary Examiner(s): Juba, Jr., John
• Application Number:
  US09/840,698
• Publication Number:
  US 20020154422A1
• Time in Patent Office: 827 Days
• Field of Search: 359/223, 359/224, 359/225, 359/290, 359/295, 359/846, 359/849, 359/291, 359/848
• US Class Current: 359/224.1
• CPC Class Codes: B81B 2201/045 Optical switches
• CPC Class Codes: B81B 2203/0109 Bridges
• CPC Class Codes: B81B 2203/053 Translation according to an axis perpendicular to the substrate
• CPC Class Codes: B81B 2203/058 Rotation out of a plane parallel to the substrate
• CPC Class Codes: B81B 3/007 For controlling stiffness, e.g. ribs
• CPC Class Codes: G02B 26/00 Optical devices or arrangements for the control of light using movable or deformable optical elements control of light by modification of the optical properties of the media of the elements involved therein G02F1/00
• CPC Class Codes: G02B 26/0833 the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD G02B26/0825 takes precedence; micromechanical devices in general B81B

Abstract

Various embodiments of reinforced mirror microstructures for a surface micromachined optical system are disclosed. Multi-layered and structurally reinforced mirror microstructures are disclosed, including both two and three-layer microstructures. Adjacent structural layers in these multi-layered mirror microstructures may be structurally reinforced and interconnected by a plurality of vertically disposed columns, or by a plurality of at least generally laterally extending rails or ribs, or some combination thereof. Various embodiments of a single layered mirror microstructure with a structural reinforcement assembly that cantilevers from a lower surface thereof is also disclosed.

Claims

1. A surface micromachined optical system that comprises:

a first substrate;

a first mirror microstructure disposed in spaced relation to and movably interconnected with said first substrate; and

a first actuator interconnected with said first minor microstructure, wherein said first minor microstructure comprises;

a first structural layer disposed in spaced relation to said first substrate;

a second structural layer disposed in spaced relation to said first structural layer, wherein said first structural layer is disposed between said second structural layer and said first substrate; and

a plurality of at least generally laterally extending first rails that extend between and fixedly interconnect said first and second structural layers, wherein each said first rail is fixed to each of said first and second structural layers such that said first structural layer, said second structural layer, and said plurality of first rails collectively move together in response to said first actuator.

2. A system, as claimed in claim 1, wherein:

said first and second structural layers are at least substantially vertically aligned.

3. A system, as claimed in claim 1, wherein:

said first and second structural layers are polysilicon, wherein said plurality of first rails are polysilicon, and wherein said first substrate is silicon.

4. A system, as claimed in claim 1, wherein:

said second structural layer comprises first and second oppositely disposed surfaces, wherein said first surface projects toward said first structural layer, and wherein said second surface comprises an optically reflective surface.

5. A system, as claimed in claim 1, wherein:

said second structural layer comprises first and second oppositely disposed surfaces, wherein said first surface projects toward said first structural layer, and wherein said first mirror microstructure further comprises a first optically reflective layer that is deposited on said second surface.

6. A system, as claimed in claim 5, wherein:

said first optically reflective layer comprises a material selected from the group consisting of gold, silver, and aluminum.

7. A system, as claimed in claim 1, wherein:

said plurality of first rails structurally reinforce said second structural layer.

8. A system, as claimed in claim 1, wherein:

said plurality of first rails are at least generally axially extending.

9. A system, as claimed in claim 1, wherein:

said plurality of first rails are other than axially extending.

10. A system, as claimed in claim 1, wherein:

said plurality of first rails extend at least generally sinusoidally in at least substantially parallel relation with said first substrate.

11. A system, as claimed in claim 1, wherein:

said plurality of first rails are disposed in at least substantially parallel relation.

12. A system, as claimed in claim 1, wherein:

said plurality of first rails are disposed in non-intersecting relation.

13. A system, as claimed in claim 1, wherein:

each of said plurality of first rails extend at least toward a first point.

14. A system, as claimed in claim 13, wherein:

each of said plurality of said first rails terminate at least substantially equidistantly from said first point.

15. A system, as claimed in claim 13, wherein:

at least one of said plurality of first rails extends closer to said first point than at least one other of said plurality of first rails.

16. A system, as claimed in claim 13, wherein:

at least two of said plurality of first rails intersect at said first point.

17. A system, as claimed in claim 1, wherein:

a first pair of said plurality of first rails extend at least toward a first point, and wherein a second pair of said plurality of first rails extend at least toward a second point which is spaced from said first point.

18. A system, as claimed in claim 1, wherein:

at least two of said plurality of first rails intersect.

19. A system, as claimed in claim 1, wherein:

each of said plurality of first rails are at least generally axially extending, wherein a first portion of said plurality of first rails are disposed in a first orientation in a lateral dimension, and wherein a second portion of said plurality of first rails are disposed in a second orientation in said lateral dimension that is different than said first orientation.

20. A system, as claimed in claim 19, wherein:

said first and second orientations are disposed about 90 degrees relative to each other.

21. A system, as claimed in claim 1, wherein:

said second structural layer comprises an upper surface, wherein a radius of curvature of said upper surface of said second structural layer is at least about 1 meter.

22. A system, as claimed in claim 1, wherein:

at least one of said plurality of first rails is positioned relative to a center of said second structural layer in a lateral dimension such that a reinforcement ratio is no more than about 0.5, wherein said reinforcement ratio is a ratio of a first distance to a second distance, wherein said first distance is a distance from said center to a portion of said at least one of said plurality of first rails, and wherein said second distance is a diameter of said second structural layer.

23. A surface micromachined optical system that comprises:

a first substrate;

a first mirror microstructure disposed in spaced relation to and movably interconnected with said first substrate; and

a first actuator interconnected with said first mirror microstructure, wherein said first mirror microstructure comprises;

a first structural layer that is disposed in spaced relation to said first substrate;

a second structural layer that is disposed in spaced relation to said first structural layer, wherein said first structural layer is disposed between said second structural layer and said first substrate; and

at least one fixed, structural interconnection between said first and second structural layers, wherein said second structural layer comprises an upper surface, wherein a radius of curvature of said upper surface of said second structural layer is at least about 1 meter, wherein said at least one fixed, structural interconnection comprises a plurality of at least generally laterally extending rails that are disposed between and fixedly interconnect said first and second structural layers, and wherein each said rail is fixed to each of said first and second structural layers such that said first structural layer, said second structural layer, and said plurality of rails collectively move together in response to said first actuator.

24. A system, as claimed in claim 23, wherein:

said plurality of rails are disposed in non-intersecting relation.

25. A system, as claimed in claim 23, wherein:

said plurality of rails are disposed in at least substantially parallel relation.

26. A system, as claimed in claim 23, wherein:

said plurality of rails extend at least toward a first point.

27. A system, as claimed in claim 26, wherein:

at least one of said plurality of rails extends closer to said first point that at least one other of said plurality of rails.

28. A system, as claimed in claim 23, wherein:

a first pair of said plurality rails extend at least toward a first point, and wherein a second pair of said plurality of rails extend at least toward a second point that is spaced from said first point.

29. A system, as claimed in claim 23, wherein:

at least two of said plurality of rails intersect at said first point.