Micromirror array having adjustable mirror angles

• US 6,600,591 B2
• Filed: 06/12/2001
• Issued: 07/29/2003
• Est. Priority Date: 06/12/2001
• Status: Active Grant

• Current Assignee: Altera Corporation (Intel Corporation)
• Original Assignee: Network Photonics, Inc.
• Inventors: Anderson, Robert, Roth, Richard, Staple, Bevan
• Primary Examiner(s): LESTER, EVELYN A
• Application Number:
  US09/880,230
• Publication Number:
  US 20020186449A1
• Time in Patent Office: 777 Days
• Field of Search: 345/108, 345/85, 345/110, 385/14-18, 359/290, 359/291, 359/295, 359/298, 359/223, 359/224
• US Class Current: 359/291
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: Y10S 359/904 Micromirror

Abstract

A method and system are provided for operating an array of such optical micromirrors. Electrodes associated with each of a plurality of optical micromirrors within the array are sequentially actuated by applying a voltage to each such electrode for a fixed time. The voltage applied to each of the electrodes is selected so that the optical micromirror with which that electrode is associated is positioned in a certain tilted position. The step of sequentially actuating electrodes is repeated to maintain the tilted positions of the plurality of optical micromirrors.

Claims

1. A method for operating an array of optical micromirrors, each such optical micromirror including a structural film connected with a substrate by a structural linkage and having at least one electrode configured to tilt the structural film upon application of a voltage, the method comprising:

sequentially actuating electrodes associated with each of a plurality of optical micromirrors within the array by applying a voltage to each such electrode for a fixed time, wherein the voltage for each such electrode is selected to position the associated optical micromirror in a certain tilted position; and

repeating the step of sequentially actuating electrodes to maintain the tilted positions of the plurality of optical micromirrors.

2. The method recited in claim 1 wherein the voltage selected for each electrode is less than a snap-in voltage for its associated optical micromirror.

3. The method recited in claim 2 wherein at least one of the plurality of optical micromirrors comprises a torsion-beam micromirror.

4. The method recited in claim 2 wherein at least one of the plurality of optical micromirrors comprises a cantilever micromirror.

5. The method recited in claim 1 wherein at least one of the plurality of optical micromirrors includes:

a first actuator linkage connected with the structural film on a first side of the structural linkage and connected with a first linear actuator on a second side of the structural linkage;

a second actuator linkage connected with the structural film on the second side of the structural linkage and connected with a second linear actuator on the first side of the structural linkage;

a first electrode configured to move the first linear actuator upon actuation; and

a second electrode configured to move the second linear actuator upon actuation.

6. The method recited in claim 1 wherein at least one of the plurality of optical micromirrors includes a hard stop formed over the substrate at a position closer to the structural linkage than the at least one electrode.

7. The method recited in claim 1 wherein the voltage applied to a first electrode differs from the voltage applied to a second electrode.

8. The method recited in claim 1 wherein the fixed time the voltage is applied to a first electrode differs from the fixed time the voltage is applied to a second electrode.

9. The method recited in claim 1 further comprising retrieving the voltage to be applied to each electrode from a memory.

10. The method recited in claim 9 further comprising changing the voltage to be applied to at least one of the electrodes in the memory.

11. The method recited in claim 10 wherein changing the voltage results in at least one of the micromirrors being switched.

12. The method recited in claim 10 wherein changing the voltage is performed in response to a change in an external condition.

13. The method recited in claim 1 further comprising switching the tilted position of at least one of the plurality of optical micromirrors by changing the voltage applied to the electrode associated with such at least one of the plurality of optical micromirrors.

14. The method recited in claim 1 further comprising switching the tilted position of at least one of the plurality of optical micromirrors by resonantly driving the electrode associated with such at least one of the plurality of optical micromirrors.

15. The method recited in claim 1 wherein the array forms part of a wavelength router for directing a plurality of spectral bands to a plurality of output ports.

16. The method recited in claim 15 wherein the tilted positions of the plurality of optical micromirrors approximately equalize the intensity of the plurality of spectral bands at the plurality of output ports.

17. A system for operating an array of optical micromirrors, each such optical micromirror including a structural film connected with a substrate by a structural linkage and having at least one electrode configured to tilt the structural film upon application of a voltage, the system comprising:

a multichannel driver having a plurality of lines in communication with electrodes associated with a plurality of optical micromirrors within the array and configured to apply a voltage to such electrodes; and

a controller in communication with the multichannel driver and configured to control the multichannel driver to maintain the plurality of optical micromirrors in a set of certain tilted positions by sequentially actuating the electrodes by applying the voltage for each such electrode for a fixed time, wherein the voltage for each such electrode is selected to maintain the position of the associated optical micromirror in its tilted position.

18. The system recited in claim 17 wherein the voltage selected for each electrode is less than a snap-in voltage for its associated optical micromirror.

19. The system recited in claim 18 wherein at least one of the plurality of optical micromirrors comprises a torsion-beam micromirror.

20. The system recited in claim 18 wherein at least one of the plurality of optical micromirrors comprises a cantilever micromirror.

21. The system recited in claim 17 wherein at least one of the plurality of micromirrors includes:

a first actuator linkage connected with the structural film on a first side of the structural linkage and connected with a first linear actuator on a second side of the structural linkage;

a second actuator linkage connected with the structural film on the second side of the structural linkage and connected with a second linear actuator on the first side of the structural linkage;

a first electrode configured to move the first linear actuator upon actuation; and

a second electrode configured to move the second linear actuator upon actuation.

22. The system recited in claim 17 further comprising a memory in communication with the controller and configured to store voltage values for the voltage to be applied to each of the electrodes.

23. The system recited in claim 22 wherein a first voltage value stored in the memory differs from a second voltage value stored in the memory.

24. The system recited in claim 22 wherein the memory is further configured to store time values for the fixed time the voltage is to be applied to each of the electrodes.

25. The system recited in claim 24 wherein a first time value stored in the memory differs from a second time value stored in the memory.

26. The system recited in claim 22 wherein the memory is a digital memory, the system further comprising a digital-analog converter in communication with the controller and the multichannel driver.

27. The system recited in claim 17 wherein the array forms part of a wavelength router for directing a plurality of spectral bands to a plurality of output ports.

28. The system recited in claim 27 wherein the tilted positions of the plurality of optical micromirrors approximately equalize the intensity of the plurality of spectral bands at the plurality of output ports.

29. A system for operating an array of optical micromirrors, each such optical micromirror including a structural film connected with a substrate by a structural linkage and having at least one electrode configured to tilt the structural film upon application of a voltage, the system comprising:

means for applying a voltage to each of a plurality electrodes associated with a plurality of optical micromirrors within the array; and

means for controlling the means for applying a voltage to maintain the plurality of optical micromirrors in certain tilted positions by sequentially applying the voltage for each such electrode for a fixed time, wherein the voltage for each such electrode is selected to maintain the position of the associated optical micromirror in its tilted position.

30. The system recited in claim 29 further comprising memory means to store voltage values for the voltage to be applied to each of the electrodes.

31. The system recited in claim 29 wherein the array forms part of a wavelength router means for directing a plurality of spectral bands to a plurality of output ports.

32. The system recited in claim 31 wherein the titled positions of the plurality of optical micromirrors approximately equalize the intensity of the plurality of spectral bands at the plurality of output ports.

33. A wavelength router system for receiving, at an input port, light having a plurality of spectral bands and directing subsets of the spectral bands to respective ones of a plurality of output ports, the wavelength router system comprising:

a free-space optical train disposed between the input ports and output ports providing optical paths for routing the spectral bands, the optical train including a dispersive element disposed to intercept light traveling from the input port;

a routing mechanism having an array of optical micromirrors, each such optical micromirror including a structural film connected with a substrate by a structural linkage and having at least one electrode configured to tilt the structural film upon application of a voltage;

a multichannel driver having a plurality of lines in communication with electrodes associated with a plurality of optical micromirrors within the array and configured to apply a voltage to such electrodes; and

a controller in communication with the multichannel driver and configured to control the multichannel driver to maintain the plurality of optical micromirrors in a set of certain tilted positions by sequentially actuating the electrodes by applying the voltage for each such electrode for a fixed time, wherein the voltage for each such electrode is selected to maintain the position of the associated optical micromirror in its tilted position.

34. The wavelength router system recited in claim 33 wherein the set of certain tilted positions is configured to approximately equalize the intensity of the subsets of the spectral bands at the respective ones of the plurality of output ports.

35. The wavelength router system recited in claim 33 further comprising a memory in communication with the controller and configured to store voltage values for the voltage to be applied to each of the electrodes.