Method for self alignment of patterned layers in thin film acoustic devices

• US 6,601,276 B2
• Filed: 05/11/2001
• Issued: 08/05/2003
• Est. Priority Date: 05/11/2001
• Status: Expired due to Term

• Current Assignee: Avago Technologies International Sales Pte Limited (Broadcom, Inc.)
• Original Assignee: Agere Systems Incorporated (Broadcom, Inc.)
• Inventors: Barber, Bradley Paul
• Primary Examiner(s): Gartenberg, Ehud
• Assistant Examiner(s): DEVORE, PETER T
• Application Number:
  US09/853,373
• Publication Number:
  US 20020166218A1
• Time in Patent Office: 816 Days
• Field of Search: 29/253.5, 298/32, 310/311, 310/312, 310/313.R, 427/9, 427/100
• US Class Current: 29/25.35
• CPC Class Codes: H04R 17/00 Piezoelectric transducers; Electrostrictive transducers piezoelectric or electrostrictive elements in general H10N30/00; details of piezoelectric or electrostrictive motors, generators or positioners H10N30/00
• CPC Class Codes: Y10T 29/42 Piezoelectric device making
• CPC Class Codes: Y10T 29/49156 with selective destruction of conductive paths

Abstract

The invention relates to manufacturing electromechanical resonators for use in electromechanical filters. Such filters require resonators having different resonant frequencies. Typically all resonators are manufactured having the same resonant frequency and the resonant frequency of selected resonators is altered by the deposition of additional material on selected resonators in the form of additional layers. According to this invention, these layers are formed coextensive with the underlying layers of the resonator by first patterning larger areas of the added material, then masking the patterned areas with masks smaller than the patterned areas and etching both the underlying layer and the patterned area without moving the mask.

Claims

1. A method for fabricating a device, the method comprising:

a. forming an outer layer of a resonator comprising a bottom layer, a transducer layer and said outer layer;

b. forming a first patterned area of a thickness adjusting material over said outer layer of said resonator,

c. masking said first patterned area of said resonator with a mask having a mask area smaller than said patterned area and being fully contained within said first patterned area, and;

d. forming coextensive outer and thickness adjusting layers for said resonator by etching any thickness adjusting material and any outer layer not covered by said mask.

2. The process according with claim 1 wherein said outer layer and said thickness adjusting material have different etch properties and are etched sequentially without moving said mask.

3. The process according to claim 1 wherein after forming said outer layer, and before performing step (b), said outer layer is etched to form an outer layer patterned area, said outer layer patterned area being larger than said first patterned area and wherein in step (6) said first patterned area is formed fully contained within said outer layer patterned area.

4. The process according to claim 1 wherein at least one of said outer layer and thickness adjusting material is conductive.

5. The method according to claim 1 wherein following step (d) there is performed a step

e) of removing said mask.

6. The method of claim 1 wherein said outer layer comprises a material selected from the group consisting of Al, SiO₂, Ti, and Gold, wherein said thickness adjusting material comprises a material selected from the group consisting of Al, SiO₂, Ti, and Gold, and wherein said outer layer material and said thickness adjusting material are selected to exhibit different etching properties.

7. The method of claim 1 wherein the step of depositing a thickness adjusting material over said outer layer comprises depositing said thickness adjusting material to a thickness calculated to produce a desired resonant frequency in said resonator.

8. A method for fabricating a device the method comprising:

a. forming an outer layer of a resonator comprising a bottom layer, a transducer layer and said outer layer;

b. forming a first patterned area of a thickness adjusting material over said outer layer of said resonator,

c. placing a first mask over said first patterned area of said resonator the mask having a mask area smaller than said patterned area and being fully contained within said first patterned area;

d. placing a second mask over said outer layer outside said patterned area; and

e. forming coextensive outer and thickness adjusting material layers for said resonator by etching any thickness adjusting material and any outer layer not covered by said masks thereby forming a first and a second resonator having different resonant frequencies.

9. The method according to claim 8 wherein following step (e) there is performed an additional step of removing the masks.

10. The method according to claim 8 wherein steps (b), (c) and (d) comprise forming more than one patterned areas and placing more than one first and second masks within and without said patterned areas respectively, thereby to form after step (e) a plurality of different resonant frequency resonators.

11. The method according to claim 8 further comprising electrically connecting said first and said second resonators to form a filter.

12. A method for fabricating a device, the method comprising:

a. forming a transducer layer of a resonator comprising a bottom layer, said transducer layer and an outer layer;

b. forming a frequency adjusting layer over said transducer layer, said frequency adjusting layer having a first thickness;

c. patterning said frequency adjusting layer to form a first patterned area of said resonator over said transducer layer;

d. depositing said outer layer over said first patterned area and said transducer layer;

e. placing a mask over said outer layer over said first patterned area, the mask having a mask area smaller than said first patterned area, and the mask area being fully contained within said first area;

f. forming superposed substantially co-extensive patterned areas of said outer layer and said frequency adjusting layer by etching without moving the mask any areas of said outer layer and said frequency adjusting layer not covered by said mask; and

i. removing said mask.

13. The method according to claim 12 wherein said frequency adjusting layer comprises a same transducer material as the transducer layer.

14. The method of claim 12 wherein said outer layer comprises a conductive material and forms an outer electrode of said first resonator.

15. The method of claim 14 further comprising in step (e), placing at least one other mask on said outer layer elsewhere than over the first patterned area, and in step (f) etching all said unmasked areas thereby forming an outer electrode of at least one second resonator, said second resonator having a resonant frequency different from said first resonator frequency.

16. The method according to claim 15 further comprising electrically connecting said first and at least one of said at least one second resonators to form a filter.

17. A method for fabricating a device:

a. forming a frequency adjusting layer on a support;

b. patterning said frequency adjusting layer to form a first patterned area of said device over said support;

c. forming a first conductive layer over said first patterned area;

d. placing a mask over a portion of said first conductive layer that lies over said first patterned area, the mask having a mask area smaller than said first patterned area, and the mask area being fully contained within said first area;

e. forming superposed substantially co-extensive patterned areas of said conductive layer and said frequency adjusting layer by etching without moving said mask, any areas of said frequency adjusting layer and said first conductive layer not covered by said mask;

f. removing said mask;

g. forming a transducer layer over said superposed substantially coextensive patterned areas of said device; and

h. forming a second conductive layer over said transducer layer.

18. The method according to claim 17 further comprising:

in step (d) also placing at least one other mask over a portion of said first conductive layer that lies outside said first patterned area, and etching any areas of said first conductive layer not covered by said at least one other mask, to form at least two resonators having different resonant frequencies.

19. The method according to claim 18 further comprising electrically connecting said at least two resonators to form a filter.

20. A method for fabricating a device, the method comprising:

a. forming an outer layer of said device;

b. depositing a frequency adjusting layer over said outer layer;

c. patterning said frequency adjusting layer to produce a first patterned area of said device over said outer layer;

d. repeating steps (b) and (c) at least once, each time depositing an additional frequency adjusting layer and forming an additional patterned area over a preceding patterned area smaller than said preceding patterned area and fully within said preceding patterned area of said device to form an outermost area of said device;

e. placing a mask over said outermost area, said mask having an area smaller than and being fully contained within said outermost area;

f. forming superposed substantially co-extensive patterned areas of said outer layer and said frequency adjusting layer by etching without moving the mask, any unmasked areas of said frequency adjusting layers and said outer layer, and

g. removing said masking.

21. The method of claim 20 wherein said first outer layer comprises a conductive material and said device is an adjusted resonator.

22. The method of claim 21 further comprising placing at least one other mask over said outer layer in an area other than said patterned areas prior to step (f) whereby following etching in step (g) there is formed at least one additional resonator having a frequency other than the adjusted resonator.

23. A method for fabricating a device, the method comprising:

a. forming a first conductive layer over a resonator support structure;

b. forming a transducer layer over said first conductive layer;

c. forming a second conductive layer over said transducer layer;

d. wherein said first conductive layer, said transducer layer and said second conductive layer have a first combined thickness;

e. depositing a frequency adjusting layer having a thickness over said second conductive layer to form a second combined thickness with said first conductive layer, said transducer layer and said second conductive layer;

f. patterning said frequency adjusting layer to produce a first patterned area on said second conductive layer and to expose said second conductive layer outside said first patterned area;

g. placing a first mask defining a final first transducer area smaller than said first patterned area over said first area, and placing a second mask defining a final second transducer area over said exposed second conductive layer;

h. forming substantially superposed and co-extensive patterned areas of said outer layer and said frequency adjusting layer for said first resonator by etching, without moving the first and second masks, any unmasked areas to sequentially remove said frequency adjusting layer and said second conductive layer in the unmasked areas, wherein said etching forms said first resonator comprising said frequency adjusting layer, said first conductive layer, said transducer layer and said second conductive layer with superposed substantially co-extensive patterned areas of said outer layer and said frequency adjusting layer, and further forms said second resonator comprising said first conductive layer, said transducer layer and said second conductive layer;

i. removing said masks; and

j. electrically connecting said first and said second resonators.

24. The method according to claim 23 further comprising forming an acoustic reflector structure under at least one of the resonators.

25. The method according to claim 23 further comprising forming a cavity under at least one of the resonators.