Method of integrating scatterometry metrology structures directly into die design

• US 6,602,723 B1
• Filed: 04/02/2001
• Issued: 08/05/2003
• Est. Priority Date: 04/02/2001
• Status: Active Grant

• Current Assignee: Globalfoundries US Incorporated (GlobalFoundries, Inc.)
• Original Assignee: Advanced Micro Devices, Inc.
• Inventors: Stirton, James Broc, Markle, Richard J.
• Primary Examiner(s): PERT, EVAN T
• Application Number:
  US09/824,285
• Time in Patent Office: 855 Days
• Field of Search: 438/16, 438/5, 438/7, 438/8, 438/9, 438/14, 438/15, 438/17, 438/18, 438/10, 438/11, 438/12
• US Class Current: 438/5
• CPC Class Codes: G01N 21/4788 Diffraction for sizing particles G01N15/0205
• CPC Class Codes: H01L 22/34 Circuits for electrically characterising or monitoring manufacturing processes, e. g. whole test die, wafers filled with test structures, on-board-devices incorporated on each die, process control monitors or pad structures thereof, devices in scribe line switching, multiplexing, gating devices G01R19/25; process control with lithography, e.g. dose control, G03F7/20; structures for alignment control by optical means G03F7/70633

Abstract

The present invention is directed to a method of incorporating metrology grating structures into die design. In one embodiment, the invention is directed to a wafer comprised of a semiconducting substrate, a plurality of production die formed on the substrate, and at least one non-production die formed on the substrate, the non-production die having at least one grating structure formed therein that will ultimately be measured in subsequent metrology tests. The present invention is also directed to a method that comprises providing a semiconducting substrate, forming at least one production integrated circuit device in a plurality of production die formed on the substrate, and forming at least one grating structure in the non-production die. The method further comprises illuminating at least one of the grating structures formed in the non-production die and measuring light reflected off of the illuminated grating structure to generate an optical characteristic trace for the illuminated grating structure formed in the non-production die.

Claims

1. A method, comprising:

providing a semiconducting substrate;

forming at least one production integrated circuit device in each of a plurality of production die formed on said substrate;

converting at least one of said plurality of production die to a non-production die by forming at least one grating structure in said at least one production die;

illuminating said at least one grating structure formed in said non-production die; and

measuring light reflected off of said illuminated grating structure to generate an optical characteristic trace for said illuminated grating structure formed in said non-productive die.

2. The method of claim 1, wherein providing a semiconducting substrate comprises providing a semiconducting substrate comprised of polysilicon.

3. The method of claim 1, wherein forming at least one production integrated circuit device in each of a plurality of production die formed on said substrate comprises forming at least one production integrated circuit device in each of a plurality of production die formed on said substrate, said production integrated circuit device comprised of at least one of a microprocessor, an application specific integrated circuit, and a memory device.

4. The method of claim 1, wherein forming at least one grating structure in at least one non-production die comprises forming a plurality of grating structures in at least one non-production die.

5. The method of claim 1, wherein forming at least one grating structure in at least one non-production die formed on said substrate comprises forming at least three grating structures in at least one non-production die formed on said substrate.

6. The method of claim 1, wherein forming at least one grating structure in at least one non-production die formed on said substrate comprises forming a plurality of grating structures in each of a plurality of non-production die formed on said substrate.

7. The method of claim 1, wherein illuminating said at least one grating structure formed in said non-production die comprises illuminating said at least one grating structure formed in said non-production die using a scatterometry tool.

8. The method of claim 1, wherein forming at least one grating structure in at least one non-production die formed on said substrate comprises forming a plurality of grating structures of differing sizes in at least one non-production die formed on said substrate.

9. The method of claim 1, wherein forming at least one grating structure in at least one non-production die formed on said substrate comprises forming a plurality of grating structures of the same approximate size in at least one non-production die formed on said substrate.

10. The method of claim 1, wherein forming a plurality of grating structures in at least one non-production die formed on said substrate comprises forming a plurality of grating structures in at least one non-production die formed on said substrate, said grating structures being comprised of a plurality of lines.

11. The method of claim 1, wherein forming at least one grating structure in at least one non-production die formed on said substrate comprises forming a plurality of grating structures in at least one non-production die formed on said substrate, said grating structures being comprised of a plurality of trenches.

12. The method of claim 1, wherein forming at least one grating structure in at least one non-production die formed on said substrate comprises forming a plurality of grating structures in at least one non-production die formed on said substrate, at least some of said grating structures being oriented in different directions.

13. The method of claim 1, wherein forming at least one grating structure in at least one non-production die formed on said substrate comprises forming a plurality of grating structures in at least one non-production die formed on said substrate, at least some of said grating structures being oriented in the same direction.

14. The method of claim 1, further comprising forming an additional grating structure in at least one of a plurality of scribe lines of said wafer.

15. The method of claim 14, further comprising illuminating and measuring light reflected off of said additional grating structure.

16. A method, comprising:

providing a semiconducting substrate comprised of polysilicon;

forming at least one production integrated circuit device in each of a plurality of production die formed on said substrate;

converting a first group of the plurality of production die to a plurality of non-production die by forming a plurality of grating structures in each of the plurality of production die in said first group;

illuminating at least one of said plurality of grating structures formed in said non-production die; and

measuring light reflected off of said illuminated grating structure to generate an optical characteristic trace for said illuminated grating structure formed in said non-productive die.

17. The method of claim 16, wherein forming at least one production integrated circuit device in a plurality of production die formed on said substrate comprises forming at least one production integrated circuit device in a plurality of production die formed on said substrate, said production integrated circuit device comprised of at least one of a microprocessor, an application specific integrated circuit, and a memory device.

18. The method of claim 16, wherein forming a plurality of grating structures in each of a plurality of non-production die formed on said substrate comprises forming at least three grating structures in each of a plurality of non-production die formed on said substrate.

19. The method of claim 16, wherein illuminating at least one of said plurality of grating structures formed in said non-production die comprises illuminating at least one of said plurality of grating structures formed in said non-production die using a scatterometry tool.

20. The method of claim 16, wherein forming a plurality of grating structures in each of a plurality of non-production die formed on said substrate comprises forming a plurality of grating structures of differing sizes in each of a plurality of non-production die formed on said substrate.

21. The method of claim 16, wherein forming a plurality of grating structures in each of a plurality of one non-production die formed on said substrate comprises forming a plurality of grating structures of the same approximate size in each of a plurality of non-production die formed on said substrate.

22. The method of claim 16, wherein forming a plurality of grating structures in each of a plurality of non-production die formed on said substrate comprises forming a plurality of grating structures in each of a plurality of non-production die formed on said substrate, said grating structures being comprised of a plurality of lines.

23. The method of claim 16, wherein forming a plurality of grating structures in each of a plurality of non-production die formed on said substrate comprises forming a plurality of grating structures in each of a plurality of non-production die formed on said substrate, said grating structures being comprised of a plurality of trenches.

24. The method of claim 16, wherein forming a plurality of grating structures in each of a plurality of non-production die formed on said substrate comprises forming a plurality of grating structures in each of a plurality of non-production die formed on said substrate, at least some of said grating structures being oriented in different directions.

25. The method of claim 16, wherein forming a plurality of grating structures in each of a plurality of non-production die formed on said substrate comprises forming, a plurality of grating structures in each of a plurality of non-production die formed on said substrate, at least some of said grating structures being oriented in the same direction.

26. The method of claim 16, further comprising forming an additional grating structure in at least one of a plurality of scribe lines of said wafer.

27. The method of claim 26, further comprising illuminating and measuring light reflected off of said additional grating structure.