Gas bearings for use with vacuum chambers and their application in lithographic projection apparatuses

• US 6,603,130 B1
• Filed: 04/17/2000
• Issued: 08/05/2003
• Est. Priority Date: 04/19/1999
• Status: Expired due to Term

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Vijfvinkel, Jakob, Bisschops, Theodorus H. J., Soemers, Hermanus M. J. R., Bouwer, Adrianus G., Driessen, Johannes C., Renkens, Michael J. M.
• Primary Examiner(s): Lee, John R.
• Assistant Examiner(s): Vanore, David A.
• Application Number:
  US09/551,223
• Time in Patent Office: 1,205 Days
• Field of Search: 250/440.11, 250/441.11, 250/442.11, 250/492.1, 250/492.2, 250/492.21, 250/492.22, 250/492.3, 355/53, 355/72, 355/76, 310/10, 310/12
• US Class Current: 250/492.1
• CPC Class Codes: F16C 2300/62 low pressure, e.g. elements operating under vacuum conditions
• CPC Class Codes: F16C 29/025 Hydrostatic or aerostatic this type of bearing for rotary parts F16C32/06
• CPC Class Codes: F16C 32/0614 the gas being supplied under pressure, e.g. aerostatic bearings
• CPC Class Codes: F16C 33/748 flowing to or from the sealing gap, e.g. vacuum seals with differential exhaust
• CPC Class Codes: G03F 7/70716 Stages
• CPC Class Codes: G03F 7/70808 Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
• CPC Class Codes: G03F 7/70816 Bearings
• CPC Class Codes: G03F 7/70841 Constructional issues related to vacuum environment, e.g. load-lock chamber

Abstract

A bearing for use in a vacuum chamber comprises a gas bearing discharging pressurised gas into a gap between two members to maintain a predetermined separation between those members. To avoid the gas forming the gas bearing being an unacceptable leak into the vacuum chamber, a vacuum pump is provided between the vacuum chamber and the gas bearing.

Claims

1. A lithographic projection apparatus, comprising:

a radiation system constructed to supply a projection beam of radiation;

a first object table provided with a mask holder to hold a mask;

a second object table provided with a substrate holder to hold a substrate;

a projection system constructed and arranged to image an irradiated portion of the mask onto a target portion of the substrate;

a vacuum chamber having a wall enclosing at least one of said first and second object tables, said vacuum chamber wall having an aperture therein;

a moveable sealing member constructed and arranged to seal said aperture;

a bearing constructed and arranged to bear said sealing member and maintain a gap between said sealing member and said vacuum chamber wall, said bearing comprising;

a gas bearing adapted to provide pressurized gas into said gap thereby to generate forces tending to hold said sealing member away from said vacuum chamber wall; and

an evacuation system spaced apart from said gas bearing constructed and arranged to remove said gas from said gap.

2. An apparatus according to claim 1, wherein said sealing member comprises a sealing plate moveable parallel to said vacuum chamber wall;

and said gas bearing and evacuation system are provided in said vacuum chamber wall to surround said aperture.

4. An apparatus according to claim 1, further comprising a conduit providing a fluid communication between said gap and a reservoir at a pressure higher than that of said vacuum chamber and lower than that of said pressurized gas.

5. An apparatus according to claim 4, wherein said conduit comprises an elongate groove in one surface defining said gap.

6. An apparatus according to claim 1, wherein a distance along said gap between a point of supply of gas to form said gas bearing and said evacuation system is greater than a distance between said evacuation system and an adjacent vacuum chamber.

7. An apparatus according to claim 1, wherein said evacuation system comprises an elongate vacuum groove in one surface defining said gap;

a vacuum pump; and

vacuum conduits connecting said elongate vacuum groove to said vacuum pump.

8. An apparatus according to claim 7, wherein said evacuation system further comprises at least one second elongate vacuum groove generally parallel to said elongate vacuum groove and provided on the other side thereof than said gas bearing, a second vacuum pump and vacuum conduits connecting said second elongate vacuum groove to said second vacuum pump, said second vacuum pump drawing a deeper vacuum than said vacuum pump.

9. An apparatus according to claim 1, wherein said gas bearing comprises an elongate groove in one surface defining said gap;

and gas supply conduits structured to supply gas under pressure to said elongate groove.

10. An apparatus according to claim 1, wherein said gas bearing comprises a plurality of spaced apart indentations in one surface defining said gap, said indentations being filled with porous material;

and gas supply conduits structured to supply gas under pressure to said indentations.

20. An apparatus according to claim 1, further comprising a support pillar passing through the aperture;

wherein said sealing member comprises a seat displaceable relative to said vacuum chamber wall in at least one degree of freedom and a collar displaceable relative to said seat in at least one degree of freedom, said collar supporting said support pillar;

wherein said bearing is adapted to bear said seat relative to said vacuum chamber wall by providing pressurized gas to a gap between said seat and said vacuum chamber wall and to remove gas from the gap between said seat and said vacuum chamber; and

wherein said bearing is adapted to bear said collar relative to said seat by providing pressurized gas to a gap between said collar and said seat and to remove gas from the gap between said collar and said seat.

21. An apparatus according to claim 20, wherein said bearing is adapted to bear said support pillar relative to said collar by providing pressurized gas to a gap between said collar and said support pillar and to remove gas from the gap between said collar and said support pillar.

22. An apparatus according to claim 21, wherein said seat is displaceable relative to said vacuum chamber wall in at least two degrees of freedom, said collar is displaceable relative to said seat in at least two degrees of freedom and said support pillar is displaceable relative to said collar in at least two degrees of freedom.

3. A lithographic projection apparatus, comprising:

a radiation system constructed to supply a projection beam of radiation;

a first object table provided with a mask holder to hold a mask;

a second object table provided with a substrate holder to hold a substrate;

a projection system constructed and arranged to image an irradiated portion of the mask onto a target portion of the substrate;

a vacuum chamber having a wall enclosing at least one of said first and second object tables, said at least one object table being movable; and

a bearing adapted to displaceably bear said at least one object table against a bearing surface within said vacuum chamber and maintaining a gap therebetween, the bearing comprising;

a gas bearing adapted to provide pressurised gas into said gap thereby to generate forces tending to separate said at least one object table from said bearing surface; and

an evacuation system spaced apart from said gas bearing constructed and arranged to remove gas from said gap, said evacuating system being provided to surround said gas bearing.

13. An apparatus according to claim 3, further comprising a conduit providing a fluid communication between said gap and a reservoir at a pressure higher than that of said vacuum chamber and lower than that of said pressurized gas.

14. An apparatus according to claim 13, wherein said conduit comprises an elongate groove in one surface defining said gap.

15. An apparatus according to claim 3, wherein a distance along said gap between a point of supply of gas to form said gas bearing and said evacuation system is greater than a distance between said evacuation system and an adjacent vacuum chamber.

16. An apparatus according to claim 3, wherein said evacuation system comprises an elongate vacuum groove in one surface defining said gap;

a vacuum pump; and

vacuum conduits connecting said elongate vacuum groove to said vacuum pump.

17. An apparatus according to claim 16, wherein said evacuation system further comprises at least one second elongate vacuum groove generally parallel to said elongate vacuum groove and provided on the other side thereof than said gas bearing, a second vacuum pump and vacuum conduits connecting said second elongate vacuum groove to said second vacuum pump, said second vacuum pump drawing a deeper vacuum than said vacuum pump.

18. An apparatus according to claim 3, wherein said gas bearing comprises an elongate groove in one surface defining said gap;

and gas supply conduits structured to supply gas under pressure to said elongate groove.

19. An apparatus according to claim 3, wherein said gas bearing comprises a plurality of spaced apart indentations in one surface defining said gap, said indentations being filled with porous material;

and gas supply conduits structured to supply gas under pressure to said indentations.

11. A method of manufacturing a device using a lithographic projection apparatus, comprising:

supplying a projection beam of radiation;

holding a mask with a mask holder of a first object table;

holding a substrate with a substrate holder of a second object table;

imaging an irradiated portion of the mask onto a target portion of the substrate;

sealing an aperture defined by a wall of a vacuum chamber of said lithographic projection apparatus with a movable sealing member, said wall of said vacuum chamber enclosing at least one of said first and second object tables;

providing pressurized gas into a gap between said sealing member and said vacuum chamber wall to generate forces tending to hold said sealing member away from said vacuum chamber wall;

removing said gas from said gap; and

exposing said substrate to an image of said mask.

12. A device manufactured according to the method of claim 11.

23. A method according to claim 11, comprising removing said gas from said gap using a pressure higher than that of said vacuum chamber and lower than that of said pressurised gas.

24. A method of manufacturing a device using a lithographic projection apparatus, comprising:

supplying a projection beam of radiation;

holding a mask with a mask holder of a first object table;

holding a substrate with a substrate holder of a second object table;

imaging an irradiated portion of the mask onto a target portion of the substrate;

displaceably bearing at least one of said first and second object tables, in a vacuum chamber, against a bearing surface;

providing pressurised gas into a gap between said bearing surface and said at least one object table to generate forces tending to separate said at least one object table from said bearing surface and maintaining the gap therebetween;

removing gas from said gap; and

exposing said substrate to an image of said mask.

25. A method according to claim 24, comprising removing said gas from said gap using a pressure higher than that of said vacuum chamber and lower than that of said pressurised gas.