Resonant chamber applicator for remote plasma source

• US 6,603,269 B1
• Filed: 06/13/2000
• Issued: 08/05/2003
• Est. Priority Date: 06/13/2000
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Kao, Chien-Teh, Trinh, Son N., Vo, Be Van, Umotoy, Salvador P., Tsai, Kenneth, Edelstein, Sergio, Lei, Lawrence Chung-Lai, Tepman, Avi
• Primary Examiner(s): Wong, Don
• Assistant Examiner(s): Lee, Wilson
• Application Number:
  US09/593,586
• Time in Patent Office: 1,148 Days
• Field of Search: 315/111.21, 315/111.61, 315/111.81, 315/111.41, 315/111.71, 315/111.11, 315/111.31, 315/111.51, 156/345, 250/492.2, 250/504.R, 118/723.ME, 118/723.MW
• US Class Current: 315/111.21
• CPC Class Codes: H01J 37/32192 Microwave generated discharge H01J37/32357, H01J37/32366, H01J37/32394, H01J37/32403 take precedence

Abstract

An improved plasma applicator for remotely generating a plasma for use in semiconductor manufacturing is provided. In one embodiment, a plasma applicator is comprised of a chamber assembly, a removable waveguide adapter and a circular clamp which secures the adapter to the chamber assembly. The chamber assembly includes an aperture plate, a microwave transparent window, a chamber body and a microwave sensor which is mounted on the chamber body. The chamber body has a proximate end opening adapted to admit microwave energy into the cavity and a distal end disposed generally on the opposite side of the cavity from the proximate end opening. The chamber body further has a gas outlet port adapted to permit the flow of an excited gas out of the cavity and a gas inlet port adapted to admit a precursor gas into the cavity. The gas inlet port has a center axis which is disposed between the proximate end opening of the chamber body and the midpoint between the proximate end opening and the distal end of the body.

Claims

1. A plasma applicator comprising:

a generally cylindrically-shaped body having a cavity in which a plasma is generated from a precursor gas;

the body defining a coolant inlet port, a coolant outlet port, and a coolant channel adapted to provide a series coolant flow path from the coolant inlet port to the coolant outlet port;

the coolant channel has a first flow path that follows a generally circular path in one of a clockwise and a counter-clockwise direction substantially around the circumference of the body in fluid communication with a second flow path that follows a generally circular path in the other of the clockwise and the counter-clockwise direction substantially around the circumference of the body;

the body having a proximate end opening adapted to admit microwave energy into the cavity and a distal end disposed generally on the opposite side of the cavity from the proximate end opening;

the body defining a gas outlet port adapted to permit the flow of an excited gas out of the cavity and a gas inlet port adapted to admit the precursor gas into the cavity, the gas inlet port having a center axis disposed between the proximate end opening of the body and the midpoint between the proximate end opening and the distal end of the body;

a first flange disposed on the body;

a window member positioned over the proximate end opening, the window member being substantially transparent to microwave energy and having a substantially planar shape with a first side, a second side and a perimeter edge, the first side facing the cavity;

at least two pins disposed between the perimeter edge of the window member and the body;

an aperture member adjacent to the window member, the aperture member adapted to transfer heat from the window member to the body, the aperture member having an aperture with one of a generally circular shape and a generally oval shape;

an outer member disposed adjacent to the second side of the window member;

a second flange disposed on the outer member;

a clamp adapted to removably attach the second flange to the first flange;

a ring member compressed between the second side of the window member and the outer member; and

a seal member disposed between the ring member and the second side of the window member, the seal member adapted to prevent direct contact between the ring member and the window member.

2. A plasma applicator for use in connection with a precursor gas, comprising:

a generally cylindrically-shaped body having a cavity in which a plasma is generated from said gas, the body having a coolant inlet port, a coolant outlet port, a proximate end opening adapted to admit microwave energy into the cavity and a distal end disposed generally on the opposite side of the cavity from the proximate end opening;

a window member positioned over the proximate end opening, the window member being substantially transparent to microwave energy and having a substantially planar shape with a first side, a second side and a perimeter edge, the first side facing the cavity;

means for introducing a gas into the cavity at a cavity entry point located between the proximate end opening of the body and the midpoint between the proximate end opening and the distal end of the body;

means for attaching a first channel member over an arcuate groove in the body and adjacent to a shoulder portion of a second channel member, thereby defining a first flow path of a coolant channel and defining a first portion of a wall of a second flow path of the coolant channel;

means for securing the second channel member around the body to form a second portion of the wall of the second flow path of the coolant channel, wherein the first flow path follows a generally circular path in one of a clockwise and a counter-clockwise direction substantially around the circumference of the body in fluid communication with the second flow path that follows a generally circular path in the other of the clockwise and the counter-clockwisedirection substantially around the circumference of the body, and wherein the coolant channel is adapted to provide a series coolant flow path from said coolant inlet port to said coolant outlet port;

means for separating the perimeter edge of the window member from the body;

means for transferring heat from the window member to the body while permitting microwave energy to flow through the heat transferring means wherein the heat transferring means includes an aperture member which defines an aperture having a shape which is one of a generally circular shape and a generally oval shape;

an outer member disposed adjacent to the second side of the window member;

a ring member compressed between the second side of the window member and the outer member;

seal means for spacing the ring member from the window member; and

clamp means for clamping the outer member to the body.

3. A plasma applicator for use in connection with a precursor gas and a source of microwave energy, comprising:

a body having a cavity in which a plasma is generated from said precursor gas;

the body having a proximate end opening adapted to admit microwave energy from said source into the cavity and a distal end disposed generally on the opposite side of the cavity from the proximate end opening;

the body defining a gas outlet port adapted to permit the flow of an excited gas out of the cavity and a gas inlet port adapted to admit the precursor gas into the cavity, the gas inlet port having a center axis disposed between the proximate end opening of the body and the midpoint between the proximate end opening and the distal end of the body.

4. The plasma applicator of claim 3 further comprising:

a window member positioned over the proximate end opening, the window member being substantially transparent to microwave energy and having a substantially planar shape with a first side and a second side, the first side facing the cavity;

wherein

the center axis is disposed approximately 0.875 inches from the first side of the window member.

5. The plasma applicator of claim 3 further comprising:

a window member positioned over the proximate end opening, the window member being substantially transparent to microwave energy and having a substantially planar shape with a first side and a second side, the first side facing the cavity;

wherein

the gas inlet port further has a perimeter; and

wherein

the gas inlet port is disposed in a position between the point where the gas inlet port perimeter is adjacent to the first side of the window and the point where the gas inlet port center axis is 1.25 inches from the first side of the window.

6. A plasma applicator for use in connection with a precursor gas and a source of microwave energy, comprising:

a body having a cavity in which a plasma is generated from said precursor gas;

the body having a proximate end opening adapted to admit microwave energy from said source into the cavity and a distal end disposed generally on the opposite side of the cavity from the proximate end opening;

means for introducing the precursor gas into the cavity at a cavity entry point located between the proximate end opening of the body and the midpoint between the proximate end opening and the distal end of the body; and

means for removing an excited gas from the cavity.

7. A plasma applicator for use in connection with a precursor gas and a source of microwave energy, comprising:

a body having a cavity in which a plasma is generated from the precursor gas;

the body having opening means for admitting microwave energy from said source into the cavity wherein said energy exhibits a peak microwave energy level at a location within the cavity;

means for introducing the precursor gas into the cavity at said location of peak microwave energy level; and

means for removing an excited gas from the cavity.