Stage assembly including a reaction assembly that is connected by actuators

• US 6,603,531 B1
• Filed: 11/16/2000
• Issued: 08/05/2003
• Est. Priority Date: 11/16/2000
• Status: Expired due to Fees

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Binnard, Mike
• Primary Examiner(s): NGUYEN, HUNG
• Application Number:
  US09/713,910
• Time in Patent Office: 992 Days
• Field of Search: 355/53, 355/72-76, 310/10, 310/12, 318/649, 318/687, 378/34, 378/35
• US Class Current: 355/53
• CPC Class Codes: G03B 27/42 for automatic sequential copying of the same original G03B27/34, G03B27/53 take precedence
• CPC Class Codes: G03F 7/70766 Reaction force control means, e.g. countermass

Abstract

A stage assembly (10) for moving and positioning a device (26) is provided herein. The stage assembly (10) includes a stage base (12), a stage (14), a stage mover assembly (16), and a reaction assembly (18). The stage mover assembly (16) moves the stage (14) along an X axis and along a Y axis relative to the stage base (12). The reaction assembly (18) is coupled to the stage mover assembly (16). Uniquely, the reaction assembly (18) reduces the reaction forces created by the stage mover assembly (16) in three degrees of freedom that are transferred to the stage base (12). As provided herein, the reaction assembly (18) includes a first reaction mass (88) and a second reaction mass (90) that move independently along the X axis, along the Y axis and about a Z axis. With this design, stage mover assembly (16) has less influence upon the position of the stage base (12). These features allow for more accurate positioning of the device (26) by the stage assembly (10) and better performance of the stage assembly (10).

Claims

1. A stage assembly that moves a device, the stage assembly comprising:

a stage that retains the device;

a stage mover assembly connected to the stage, the stage mover assembly moving the stage along an X axis and along a Y axis and generating reaction forces along the X axis and along the Y axis; and

a reaction assembly coupled to the stage mover assembly, the reaction assembly including a reaction base assembly, a first reaction mass and a second reaction mass, each reaction mass moving independently relative to the reaction base assembly along the X axis and along the Y axis to reduce reaction forces along the X axis and along the Y axis.

2. The stage assembly of claim 1 wherein each reaction mass moves independently relative to the reaction base assembly about a Z axis.

3. The stage assembly of claim 1 further comprising a reaction mover assembly that independently adjusts the position of the reaction masses relative to the reaction base assembly along the X axis, along the Y axis and about a Z axis.

4. The stage assembly of claim 3 wherein the reaction mover assembly includes a planar motor that adjusts the position of the first reaction mass relative to the reaction base assembly.

5. The stage assembly of claim 1 wherein the reaction mover assembly includes a first pair of planar motors for adjusting the position of the first reaction mass.

6. The stage assembly of claim 5 wherein the reaction mover assembly includes a second pair of planar motors for adjusting the position of the second reaction mass.

7. The stage assembly of claim 1 further comprising a guide assembly, a first Y guide mover, and a second Y guide mover that cooperate to connect the first reaction mass to the second reaction mass.

8. An exposure apparatus including the stage assembly of claim 1.

9. A device manufactured with the exposure apparatus according to claim 8.

10. A wafer on which an image has been formed by the exposure apparatus of claim 8.

11. A stage assembly that moves a device, the stage assembly comprising:

a device table that retains the device;

a mover assembly connected to the device table, the mover assembly moving the device table and generating reaction forces in at least two degrees of freedom;

a first reaction mass secured to the mover assembly; and

a second reaction mass secured to the mover assembly, the second reaction mass moving with at least two degrees of freedom relative to the first reaction mass.

12. The stage assembly of claim 11 further comprising a stage base that supports the device table, wherein the first reaction mass moves in at least three degrees of freedom relative to the stage base.

13. The stage assembly of claim 11 further comprising a reaction base that supports the first reaction mass, wherein the first reaction mass moves with at least two degrees of freedom relative to the reaction base.

14. The stage assembly of claim 11 further comprising a reaction base that supports the first reaction mass, wherein the first reaction mass moves with at least three degrees of freedom relative to the reaction base.

15. The stage assembly of claim 11 further comprising a stage base that supports the device table, wherein the second reaction mass moves with at least two degrees of freedom relative to the stage base.

16. The stage assembly of claim 11 further comprising a stage base that supports the device table, wherein the second reaction mass moves in at least three degrees of freedom relative to the stage base.

17. The stage assembly of claim 11 further comprising (i) a stage base that supports the device table, and (ii) a reaction mover assembly including a first trim mover that is coupled to the first reaction mass, the first trim mover moving the first reaction mass with at least two degrees of freedom relative to the stage base.

18. The stage assembly of claim 17 wherein the first trim mover includes a first component and a second component, wherein current directed to the first component moves the first component with at least two degrees of freedom relative to the second component.

19. The stage assembly of claim 18 wherein current directed to the first component moves the first component with at least three degrees of freedom relative to the second component.

20. The stage assembly of claim 17 wherein the first trim mover includes a planar motor.

21. The stage assembly of claim 17 wherein the first trim mover moves the first reaction mass with at least three degrees of freedom relative to the stage base.

22. The stage assembly of claim 17 wherein the reaction mover assembly includes a second trim mover that is coupled to the second reaction mass, the second trim mover moving the second reaction mass with at least two degrees of freedom relative to the stage base and the first reaction mass.

23. The stage assembly of claim 22 further comprising a reaction base assembly that supports the first reaction mass and the second reaction mass, wherein the reaction base assembly is isolated from the stage base.

24. The stage assembly of claim 23 wherein the reaction base assembly includes a first mass guide that supports the first reaction mass and a second mass guide that supports the second reaction mass, wherein the first mass guide is isolated from the second mass guide.

25. The stage assembly of claim 22 wherein the reaction mover assembly adjusts the position of the first reaction mass relative to the stage base and the second reaction mass with at least two degrees of freedom, and the reaction mover assembly adjusts the position of the second reaction mass relative to the stage base and the first reaction mass with at least two degrees of freedom.

26. The stage assembly of claim 22 wherein the reaction mover assembly adjusts the position of the first reaction mass relative to the stage base and the second reaction mass with at least three degrees of freedom, and the reaction mover assembly adjusts the position of the second reaction mass relative to the stage base and the first reaction mass with at least three degrees of freedom.

27. An exposure apparatus including the stage assembly of claim 11.

28. A device manufactured with the exposure apparatus according to claim 27.

29. A wafer on which an image has been formed by the exposure apparatus of claim 27.

30. A stage assembly that moves a device, the stage assembly comprising:

a device table that retains the device;

a mover assembly connected to the device table, the mover assembly moving the device table and generating reaction forces with at least two degrees of freedom; and

a reaction assembly including a,first reaction mass coupled to the mover assembly, a second reaction mass coupled to the mover assembly, and a reaction base assembly that supports the first reaction mass and the second reaction mass, the first reaction mass moving with at least two degrees of freedom relative to the reaction base assembly and the second reaction mass moving with at least two degrees of freedom relative to the first reaction mass.

31. The stage assembly of claim 30 wherein the second reaction mass moves with at least two degrees of freedom relative to the reaction base assembly and the first reaction mass moves with at least two degrees of freedom relative to the second reaction mass.

32. The stage assembly of claim 30 further comprising (i) a first trim mover that moves the first reaction mass with at least two degrees of freedom relative to the reaction base assembly and the second reaction mass, and (ii) a second trim mover that moves the second reaction mass with at least two degrees of freedom relative to the reaction base assembly and the first reaction mass.

33. The stage assembly of claim 30 wherein the reaction base assembly includes a first mass guide that supports the first reaction mass, and a second mass guide that supports the second reaction mass, wherein the first mass guide is isolated from the second mass guide.

34. The stage assembly of claim 30 further comprising a stage base that supports the device table, wherein the first reaction mass moves with at least two degrees of freedom relative to the stage base.

35. The stage assembly of claim 34 wherein the first reaction base is isolated from the stage base.