Electrostatic chuck

• US 6,603,651 B2
• Filed: 05/31/2001
• Issued: 08/05/2003
• Est. Priority Date: 06/07/2000
• Status: Active Grant

• Current Assignee: Sumitomo Osaka Cement Company Limited
• Original Assignee: Sumitomo Osaka Cement Company Limited
• Inventors: Kosakai, Mamoru
• Primary Examiner(s): Berhane, Adolf D.
• Application Number:
  US09/872,355
• Publication Number:
  US 20020044404A1
• Time in Patent Office: 796 Days
• Field of Search: 361/230, 361/233, 361/234, 279/128
• US Class Current: 361/234
• CPC Class Codes: H01L 21/6831 using electrostatic chucks
• CPC Class Codes: H01L 21/6833 Details of electrostatic chucks
• CPC Class Codes: H02N 13/00 Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect

Abstract

The present invention provides an electrostatic chuck that is able to completely prevent abnormal discharge that not only causes damage and destruction of the electrostatic chuck, but also causes damage of the fixed substrate as well as the generation of particles. In the electrostatic chuck of the present invention, at least a first insulating member, on the side on which a fixed substrate is placed among a first insulating member and second insulating member disposed in mutual opposition between which an electrode is interposed, is composed of a compound sintered body having for its main components 4% by weight to 12% by weight silicon carbide particles and aluminum oxide particles, and the first insulating member has varistor characteristics such that the volumetric specific resistance value of the first insulating member is from 1×10⁹ to 1×10¹² Ω· cm when the potential difference between the surface of the first insulating member on which the fixed substrate is placed and the electrode is 1000 V or less, and from 1×10⁷ to 1×10⁸ Ω· cm when the potential difference between the surface of the first insulating member on the side on which the fixed substrate is placed and the electrode is 3000 V or more.

Claims

1. An electrostatic chuck provided with a pair of insulating members disposed in mutual opposition between which an electrode is interposed;

wherein,

a first insulating member of the pair of insulating members at least on the side on which a fixed substrate is placed is composed of a compound sintered body having for its main components 4% by weight to 12% by weight of silicon carbide particles and aluminum particles, and

the first insulating member has varistor characteristics.

2. The electrostatic chuck according to claim 1 wherein,

the varistor characteristics are such that the volumetric specific resistance value of the first insulating member is from 1× 10⁹ to 1×

10¹² Ω

·

cm when the potential difference between the surface of the first insulating member on which the fixed substrate is placed and the electrode is 1000 V or less,

and from 1×

10⁷ to 1×

10⁸ Ω

·

cm when the potential difference between the surface of the first insulating member on the side on which the fixed substrate is placed and the electrode is 3000 V or more.

3. The electrostatic chuck according to claim 1 wherein, the average particle size of the silicon carbide particles contained in the compound sintered body that composes the first insulating member is 0.5 μ

m or less.

4. The electrostatic chuck according to claim 1 wherein, the average particle size of the silicon carbide particles contained in the compound sintered body that composes at least the first insulating member is 0.2 μ

m or less.

5. The electrostatic chuck according to claim 1 wherein, the average particle size of the aluminum oxide particles contained in the compound sintered body that composes at least the first insulating member is 2 μ

m or less.

6. The electrostatic chuck according to claim 1 wherein, at least a portion of the silicon carbide particles are present within the aluminum oxide particles.

7. The electrostatic chuck according to claim 1 wherein, the content of metal impurities other than aluminum and silicon in the compound sintered body that composes at least the first insulating member is preferably 0.1% by weight or less.

8. The electrostatic chuck according to claim 1 wherein, a joining layer composed of an insulating material is formed around the electrode, and the pair of insulating members are joined by this joining layer.

9. The electrostatic chuck according to claim 1 wherein, the electrode contains as its main component electrically conductive ceramics.