Interposer and method for producing a light-guiding structure
First Claim
1. A method for producing light-guiding structure comprising:
- providing a substrate having a top substrate surface;
forming in the substrate a first cladding layer having a first porosity value, said first cladding layer having a body portion disposed below said top substrate surface and one or more end portions terminating in said top substrate surface;
forming in the substrate a waveguide core layer in contact with the first cladding layer and having a second porosity value less than the first porosity value, said waveguide layer having a body portion disposed below said top substrate surface and one or more portions terminating in said top substrate surface; and
forming in the substrate a second cladding layer in contact with the waveguide core layer and having a third porosity value greater than the second porosity value, said second cladding layer having a portion terminating in said top substrate surface.
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Abstract
An interposer and method for producing an interposer. The method comprises forming in a substrate a cladding layer having a known density value; and forming in the substrate a waveguide core layer in contact with the cladding layer and also having a known density value which is greater than the density value of the cladding layer. The method further includes forming in the substrate a second cladding layer in contact with the waveguide core layer and having a known density value less than the density value of the waveguide core layer. A method for producing a light-guiding structure comprising forming in a substrate a cladding layer having a top substrate surface and a porosity value; and forming in the substrate a waveguide core layer in contact with the cladding layer and having a porosity value less than the porosity value of the cladding layer. The method also includes forming in the substrate another cladding layer in contact with the waveguide core layer and having a porosity value greater than the porosity value of the waveguide core layer. The two cladding layers and the waveguide core layer terminate in the top substrate surface of the substrate.
203 Citations
14 Claims
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1. A method for producing light-guiding structure comprising:
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providing a substrate having a top substrate surface;
forming in the substrate a first cladding layer having a first porosity value, said first cladding layer having a body portion disposed below said top substrate surface and one or more end portions terminating in said top substrate surface;
forming in the substrate a waveguide core layer in contact with the first cladding layer and having a second porosity value less than the first porosity value, said waveguide layer having a body portion disposed below said top substrate surface and one or more portions terminating in said top substrate surface; and
forming in the substrate a second cladding layer in contact with the waveguide core layer and having a third porosity value greater than the second porosity value, said second cladding layer having a portion terminating in said top substrate surface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method for producing an interposer comprising:
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providing a substrate having a top substrate surface;
forming in the substrate a first cladding layer having a first density value, said first cladding layer having a body portion disposed below said top substrate surface and one or more end portions terminating in said top substrate surface;
forming in the substrate a waveguide core layer in contact with the first cladding layer and having a second density value greater than the first density value, said waveguide layer having a body portion disposed below said top substrate surface and one or more portions terminating in said top substrate surface; and
forming in the substrate a second cladding layer terminating in said top substrate surface and in contact with the waveguide core layer and having a third density value less than the second density value.
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11. An interposer comprising a silicon body having a silicon surface, a first cladding layer including a pair of first opposed cladding layer ends and a body portion extending through said silicon body, the first cladding layer having its body portion disposed below the silicon surface and having its opposed cladding layer ends terminating in said silicon surface;
- a core layer including a pair of opposed core layer ends and a body portion extending through said silicon body in contact with said first cladding layer, the core layer having its body portion disposed below the silicon surface and having its opposed core layer ends terminating in said silicon surface; and
a second cladding layer including a second cladding surface and disposed in said silicon body in contact with said core layer and such that said second cladding surface is generally aligned with said silicon surface. - View Dependent Claims (12, 13, 14)
- a core layer including a pair of opposed core layer ends and a body portion extending through said silicon body in contact with said first cladding layer, the core layer having its body portion disposed below the silicon surface and having its opposed core layer ends terminating in said silicon surface; and
Specification