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Variable capacitance pressure sensor

  • US 6,604,426 B2
  • Filed: 11/27/2001
  • Issued: 08/12/2003
  • Est. Priority Date: 11/27/2000
  • Status: Expired due to Fees
First Claim
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1. A pressure sensor comprising a first pole element and a second pole element spaced apart from each other and forming a capacitor, wherein said first pole element includes a substantially flat portion around which a portion of said second pole element is bent forming a bent edge portion of said second pole element, said bent edge portion located at a first distance (16) from said substantially flat portion which is greater than a second distance (d2) between said substantially flat portion and said first pole element when said pressure sensor is unloaded, a length of said first distance varying as a function of the loading state of said sensor.

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