Diagnostic medical ultrasound systems and transducers utilizing micro-mechanical components

• US 6,605,043 B1
• Filed: 12/30/1998
• Issued: 08/12/2003
• Est. Priority Date: 11/19/1998
• Status: Expired due to Term

• Current Assignee: Siemens Medical Solutions USA Incorporated (Siemens AG)
• Original Assignee: Acuson Corporation (Siemens AG)
• Inventors: Sliwa, John W., Kling, Terry, Dreschel, William R., Carp, Stuart L.
• Primary Examiner(s): Lateef, Marvin M.
• Assistant Examiner(s): PATEL, MAULIN M
• Application Number:
  US09/223,257
• Time in Patent Office: 1,686 Days
• Field of Search: 600/443, 600/433, 600/459, 600/447, 600/444, 600/461, 600/438, 357/26, 357/51, 361/283
• US Class Current: 600/459
• CPC Class Codes: A61B 8/4483 characterised by features of the ultrasound transducer
• CPC Class Codes: B06B 1/00 Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
• CPC Class Codes: H01H 59/0009 making use of micromechanics

Abstract

The use of any micro-mechanical component in an ultrasound system is disclosed. In particular, the use of micro-relays, micro-switches and inductors in the transducer probe head, in the transducer connector, coupled with the system transducer connector(s) or anywhere else in the system. In an ultrasound system, micro-mechanical components such as micro-fabricated switches, relays and inductors permit impressive size reduction, cost reduction, signal-integrity enhancement and improved operational flexibility.

Claims

1. An ultrasound system for medical imaging or therapy comprising:

at least one ultrasonic acoustic element;

said at least one ultrasonic acoustic element comprising at least one micro-mechanical component coupled with said at least one ultrasonic acoustic element, said component comprising

at least one movable mechanical element fabricated on a substrate utilizing at least one integrated circuit manufacturing process wherein said at least one movable mechanical element is a member selected from the group consisting of a beam, cantilever, fluid and gas.

2. The invention of claim 1, wherein said at least one movable mechanical element moves by a motion selected from the group consisting of deflection, sliding, distortion, translation, rotation, torsion and deformation.

3. The invention of claim 1, wherein said at least one integrated circuit manufacturing process comprises:

formation of at least one thin film material on a substrate;

formation of a pattern in said at least one thin film material; and

etching of said at least one thin film material.

4. The invention of claim 3, wherein said formation of said at least one thin film material is by a process selected from the group consisting of deposition and growth.

5. The invention of claim 3, wherein said formation of said pattern is by a process selected from the group consisting of lithography, printing and mechanical pattern transfer.

6. The invention of claim 3, wherein said etching process is a process selected from the group consisting of wet chemical, plasma and laser etching.

7. The invention of claim 3, wherein said at least one thin film material is characterized by a thickness less than 25 microns.

8. The invention of claim 1, wherein said movable mechanical element is characterized by at least one physical dimension measuring less than 10 microns.

9. An ultrasound transducer comprising:

at least one array of at least one ultrasonic acoustic element; and

said at least one ultrasonic acoustic element comprising at least one micro-mechanical component coupled with said at least one ultrasonic acoustic element, said at least one micro-mechanical component comprising at least one movable mechanical element fabricated on a substrate utilizing integrated circuit manufacturing processes wherein said at least one movable mechanical element is a member selected from the group consisting a beam, cantiliever, fluid and gas.

10. The invention of claim 9, wherein said at least one movable mechanical element moves by a motion selected from the group consisting deflection, sliding, distortion, translation, rotation, torsion and deformation.

11. The invention of claim 9, wherein said integrated circuit manufacturing processes comprise substrate deposition and etching processes.

12. The invention of claim 9, wherein said movable mechanical element is characterized by at least one physical dimension measuring less than 10 microns.

13. The invention of claim 9, wherein said at least one micro-mechanical component comprises a device selected from the group consisting of a relay, switch, inductor, circuit-breaker and fuse.

14. The invention of claim 9 wherein said ultrasound transducer comprises a catheter mounted transducer.

15. The invention of claim 14, wherein said catheter mounted transducer is disposable.

16. The invention of claim 9, wherein said ultrasound transducer comprises a scope mounted transducer.

17. The invention of claim 16, wherein said transducer is disposable.

18. The invention of claim 9, wherein said at least one acoustic element of said transducer is fabricated utilizing micro-machining means.

19. The invention of claim 9, wherein said ultrasound transducer is provided in a hand held form factor.

20. The invention of claim 9, wherein said at least one micro-mechanical component switches 150 volts or greater.

21. The invention of claim 20, wherein said at least one micro-mechanical component switches bipolar voltage.

22. The invention of claim 20, wherein said at least one micro-mechanical component switches unipolar voltage.

23. The invention of claim 9, wherein said micro-mechanical component is operative to enable return of a greater harmonic acoustic signal.

24. The invention of claim 9, wherein said ultrasound transducer is a two-dimensional ultrasound transducer array comprising N×

M acoustic elements.

25. The invention of claim 24, wherein said at least one micro-mechanical component is operative to control the motion of a two dimensional transmit/receive scan plane emanating from/to said two-dimensional ultrasound transducer array.

26. The invention of claim 24, wherein a sub-set of said N×

M elements are utilized to provide a sparse two-dimensional ultrasound transducer array.

27. The invention of claim 9, wherein said at least one ultrasonic acoustic element is characterized by at least one electrical impedance and further wherein said at least one micro-mechanical component comprises at least one micro-mechanical inductor wherein said at least one micro-mechanical inductor is operative to better match said at least one electrical impedance of said at least one ultrasonic acoustic element to an electrical impedance characteristic of an ultrasound system.

28. The ultrasound transducer of claim 9, wherein said at least one array comprises at least 256 of said at least one ultrasonic acoustic element.

29. The ultrasound transducer of claim 9, wherein said at least one array comprises a one dimensional array.

30. An ultrasound system for medical imaging or therapy comprising:

at least one ultrasonic acoustic element; and

at least one micro-mechanical component coupled with said at least one ultrasonic acoustic element;

at least one substrate comprising a first and second section;

wherein said first section comprises said at least one micro mechanical-component and said second section comprises said at least one ultrasonic acoustic element.

31. The invention of claim 30, wherein said first and second sections are joined.

32. The invention of claim 30, wherein said first and second sections are joined via area-wise bump-array bonding.

33. The invention of claim 30, wherein said at least one acoustic element comprises a thin-film element.

34. The invention of claim 30, wherein said at least one acoustic element comprises an electrostatic capacitive micro-mechanical element.

35. The invention of claim 30, wherein said at least one substrate is located within a catheter mounted transducer.

36. The invention of claim 35, wherein said catheter mounted transducer is disposable.

37. An ultrasound transducer for medical imaging or therapy comprising:

at least one ultrasonic acoustic element;

at least one micro-mechanical component coupled with said at least one ultrasonic acoustic element;

at least one substrate comprising a first and second section;

wherein said first section comprises said at least one micro mechanical-component and said second section comprises said at least one ultrasonic acoustic element.

38. The invention of claim 37, wherein said first and second sections are joined.

39. The invention of claim 38, wherein said first and second sections are joined via area-wise bump-array bonding.

40. The invention of claim 37, wherein said at least one acoustic element comprises a thin-film element.

41. The invention of claim 37, wherein said at least one acoustic element comprises an electrostatic capacitive micro-mechanical element.

42. An ultrasound transducer comprising:

at least one array of at least one ultrasonic acoustic element, said at least one array arranged in at least one dimension and operative to provide harmonic image information wherein a first bias is provided to said at least one acoustic element during transmit and a second bias different from said first bias is provided to said at least one acoustic element during receive;

at least one micro-mechanical component coupled with said at least one acoustic element.

43. The invention of claim 42, wherein said ultrasound transducer array operates at a first frequency in transmit and a second frequency in receive.

44. The invention of claim 42, wherein said micro-mechanical component comprises a device selected from the group consisting of a micro-relay and micro-switch.

45. The invention of claim 42, wherein said at least one micro-mechanical component is operative to selectively connect and disconnect a voltage bias source forming a digital to analog converter used to vary the voltage bias provided to said at least one acoustic element.

46. The invention of claim 42, wherein said ultrasound transducer array has a crossed electrode arrangement.

47. The invention of claim 42, wherein said ultrasound transducer array has dedicated electrodes for each of said at least one acoustic element.

48. The invention of claim 42, wherein said at least one acoustic element comprises a property of spectral frequency and further wherein the spectral frequencies of at least two acoustic elements of said ultrasound transducer array are set to different values to attain broadband acoustic behavior.

49. The invention of claim 42, wherein said ultrasound transducer array is operative to produce a harmonic image wherein said array provides a higher voltage pulse to enhance at least one harmonic signal.

50. The invention of claim 42, wherein said at least one acoustic element is a micro-mechanical ultrasound element.

51. The invention of claim 50, wherein said micro-mechanical ultrasound element is a capacitive micro-mechanical ultrasound element.

52. The invention of claim 42, wherein said at least one acoustic element comprises a property of signal phase and further wherein said signal phase property comprises the phase of the transmit signal.

53. The invention of claim 52, wherein said signal phase is controlled for the purpose selected from the group consisting the purposes of beam-steering, signal-mixing and signal-manipulation.

54. The invention of claim 42, wherein said at least one acoustic element comprises a property of signal phase and further wherein said signal phase property comprises the phase of the receive signal.

55. The invention of claim 54, wherein said signal phase is controlled for the purpose selected from the group consisting the purposes of beam-steering, signal-mixing and signal-manipulation.

56. An ultrasound transducer comprising:

at least one array of at least one ultrasonic acoustic element, said at least one ultrasonic acoustic element comprising a micro-mechanical ultrasound element, said at least one array arranged in at least one dimension and operative to provide harmonic image information wherein a first bias is provided to said at least one acoustic element during transmit and a second bias different from said first bias is provided to said at least one acoustic element during receive.

57. The ultrasound transducer of claim 56 wherein said micro-mechanical ultrasound element is a capacitive micro-mechanical ultrasound element.

58. An ultrasound system for medical imaging or therapy comprising:

at least one ultrasonic acoustic element, said at least one ultrasonic element operative to transduce between an electrical signal and an acoustic energy;

at least one mirco-mechanical component coupled with said at least one ultrasonic acoustic element, said component comprising

at least one movable mechanical element fabricated on a substrate utilizing at least one integrated circuit manufacturing process;

wherein said at least one micro-mechanical component is operative to manipulate said electrical signal.

59. An ultrasound transducer comprising:

at least one array of at least one ultrasonic acoustic element, said at least one ultrasonic acoustic element operative to transduce between an electrical signal and an acoustic energy; and

at least one micro-mechanical component coupled with said at least one ultrasonic acoustic element, said at least one micro-mechanical component comprising at least one movable mechanical element fabricated on a substrate utilizing integrated circuit manufacturing processes, wherein said at least one micro-mechanical component is operative to manipulate said electrical signal.