Process and system for separation and recovery of perfluorocompound gases
First Claim
1. A process for the separation and recovery of SF6, which comprises contacting a gas mixture comprising a low concentration of SF6 and at least one carrier gas with a membrane selected from the group consisting of polyimides and cellulose acetates at conditions effective to obtain a permeate stream depleted in SF6 and a non-permeate stream rich in SF6.
0 Assignments
0 Petitions
Accused Products
Abstract
Processes and systems to recover at least one perfluorocompound gas from a gas mixture are provided. In one embodiment the inventive process comprises the steps of a) providing a gas mixture comprising at least one perfluorocompound gas and at least one carrier gas, the gas mixture being at a predetermined pressure; b) providing at least one glassy polymer membrane having a feed side and a permeate side; c) contacting the feed side of the at least one membrane with the gas mixture; d) withdrawing from the feed side of the membrane as a non-permeate stream at a pressure which is substantially equal to the predetermined pressure a concentrated gas mixture comprising essentially the at least one perfluorocompound gas; and e) withdrawing from the permeate side of the membrane as a permeate stream a depleted gas mixture comprising essentially the at least one carrier gas.
76 Citations
16 Claims
- 1. A process for the separation and recovery of SF6, which comprises contacting a gas mixture comprising a low concentration of SF6 and at least one carrier gas with a membrane selected from the group consisting of polyimides and cellulose acetates at conditions effective to obtain a permeate stream depleted in SF6 and a non-permeate stream rich in SF6.
- 3. A process for the on and recovery of SF6, which comprises contacting a gas mixture comprising a low concentration of SF6 and at least one carrier gas with a membrane at conditions effective to obtain a permeate stream depleted in SF6 and a non-permeate stream rich in SF6.
- 11. A process for the separation and recovery of SF6, which comprises contacting a gas mixture comprising SF6 and at least one carrier gas with a membrane selected from the group consisting of polyimides and cellulose acetates at conditions effective to obtain a permeate stream depleted in SF6 and a non-permeate stream rich in SF6.
Specification