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Method for fabricating planar optical waveguide devices

  • US 6,605,228 B1
  • Filed: 07/14/2000
  • Issued: 08/12/2003
  • Est. Priority Date: 10/19/1998
  • Status: Expired due to Fees
First Claim
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1. A method for fabricating a planar optical waveguide device having a plurality of core segments formed between a lower clad layer and an upper clad layer, comprising the steps of:

  • providing a lower clad layer;

    forming a recess corresponding to a desired pattern of core segments in said lower clad layer;

    forming a core layer on said lower clad layer including an interior of said recess;

    conducting a hot isostatic pressing process on an assembly of said lower clad layer and said core layer at a temperature higher than 800°

    C. and a pressure higher than 1,000 kgf/cm2;

    removing a surface layer from an assembly of said lower clad layer and said core layer until a surface of said lower clad layer is exposed, and said lower clad layer and said core layer in said recess jointly define a planar surface; and

    forming an upper clad layer on said planar surface jointly defined by said lower clad layer and said core layer.

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