Graded thickness optical element and method of manufacture therefor

• US 6,606,199 B2
• Filed: 10/10/2001
• Issued: 08/12/2003
• Est. Priority Date: 10/10/2001
• Status: Expired due to Term

• Current Assignee: II-VI Delaware, Inc. (Coherent Corp.)
• Original Assignee: Honeywell International Inc.
• Inventors: Wang, Tzu-Yu
• Primary Examiner(s): Epps, Georgia
• Assistant Examiner(s): HASAN, MOHAMMED A
• Application Number:
  US09/975,299
• Publication Number:
  US 20030067688A1
• Time in Patent Office: 671 Days
• Field of Search: 359/652, 359/653, 216/26, 430/321
• US Class Current: 359/652
• CPC Class Codes: G02B 3/0012 characterised by the manufacturing method
• CPC Class Codes: G02B 5/0883 with a refractive index gradient rugate filters G02B5/289
• CPC Class Codes: H01S 5/18388 Lenses

Abstract

A graded optical element is provided that includes graded layers of optical material, wherein the layers may or may not have different indexes of refraction. A method for making such a graded thickness optical element is also provided. A masking layer is preferably spaced above a substrate, where the masking layer has at least one aperture therein. Optical material is then deposited on the substrate through the aperture in the masking layer to form a layer of refr material that extends laterally beyond the aperture in the masking layer in at least one region.

Claims

1. A method of making a graded thickness optical element, the method comprising the steps of:

providing a first layer having an aperture spaced above a substrate;

providing one or more materials on the substrate through the aperture in the first layer to form a graded thickness optical element that extends laterally beyond the aperture in at least one region; and

providing an intermediate layer between the first layer and the substrate wherein the intermediate layer has an aperture that extends laterally beyond the aperture in the first layer in at least one region; and

wherein the steps of providing the first layer and the intermediate layer include the steps of;

applying the intermediate layer adjacent the substrate;

applying the first layer adjacent the intermediate layer;

applying a third layer adjacent the first layer;

creating an aperture in the third layer;

creating an aperture in the first layer; and

creating an aperture in the intermediate layer, wherein the aperture in the intermediate layer extends laterally beyond the aperture in the first layer in the at least one region.

2. The method of claim 1, wherein the third layer is a photo-resist layer, and the aperture in the third layer is created using photolithography.

3. The method of claim 1, wherein the aperture in the first layer is created using an etching process.

4. The method of claim 1, wherein the aperture in the intermediate layer is created using an isotropic etching process.

5. A method of making a graded thickness optical element, the method comprising the steps of:

providing a first layer having an aperture spaced above a substrate;

providing one or more materials on the substrate through the aperture in the first layer to form a graded thickness optical element that extends laterally beyond the aperture in at least one region; and

providing an intermediate layer between the first layer and the substrate wherein the intermediate layer has an aperture that extends laterally beyond the aperture in the first layer in at least one region, wherein the intermediate layer is a polymer.

6. The method of claim 5, wherein the polymer is polyimide.

7. A method of making a graded thickness optical element, the method comprising the steps of:

providing a first layer having an aperture spaced above a substrate; and

providing one or more materials on the substrate through the aperture in the first layer to form a graded thickness optical element that extends laterally beyond the aperture in at least one region; and

wherein;

the substrate includes an optical device under the optical layer;

the optical device is a light detector;

the light detector is a Resonant Cavity Photo Detector; and

the graded thickness optical element is a mirror that at least contributes to the reflectance of a top mirror of the Resonant Cavity Photo Detector.

8. The method of claim 7 wherein the reflectance of the graded thickness optical element changes across the graded thickness optical element.

9. The method of claim 8 wherein the reflectance of the graded thickness optical element decreases toward the lateral edges of the graded thickness optical element.

10. A method of making a graded thickness optical element, the method comprising the steps of:

providing a first layer having an aperture spaced above a substrate; and

providing one or more materials on the substrate through the aperture in the first layer to form a graded thickness optical element that extends laterally beyond the aperture in at least one region; and

wherein the step of providing one or more materials to the substrate through the aperture in the first layer to form a graded thickness optical layer comprises the steps of;

depositing a first layer of refractive material having a first index of refraction; and

depositing a second layer of refractive material having a second index of refraction.

11. A method of making a graded thickness optical element, the method comprising the steps of:

providing a first layer having an aperture spaced above a substrate; and

providing one or more materials on the substrate through the aperture in the first layer to form a graded thickness optical element that extends laterally beyond the aperture in at least one region; and

wherein the step of providing one or more materials to the substrate through the aperture in the first layer to form a graded thickness optical layer comprises the steps of alternately depositing a layer of refractive material having a first index of refraction and depositing a layer of refractive material having a second index of refraction.

12. The method of claim 11, wherein the first index of refraction is different from the second index of refraction.

13. A method of making a graded thickness optical element, the method comprising the steps of:

providing a first layer having an aperture spaced above a substrate;

providing one or more materials on the substrate through the aperture in the first layer to form a graded thickness optical element that extends laterally beyond the aperture in at least one region; and

providing an intermediate layer between the first layer and the substrate wherein the intermediate layer has an aperture that extends laterally beyond the aperture in the first layer in at least one region; and

wherein the first layer is a dielectric material.

14. A method of making a graded thickness optical element, the method comprising the steps of:

providing a first layer having an aperture spaced above a substrate; and

providing one or more materials on the substrate through the aperture in the first layer to form a graded thickness optical element that extends laterally beyond the aperture in at least one region; and

wherein;

the substrate includes an optical device under the optical layer;

the optical device is a light detector; and

the light detector is a Resonant Cavity Photo Detector.

15. An optical element comprising:

a plurality of refractive layers, each layer having a center region, an edge region and an index of refraction; and

wherein;

the center region of each layer is thicker than the edge region and selected layers have different indexes of refraction; and

at least one of the layers includes a dielectric material.