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System and method for in-line inspection of stencil aperture blockage

  • US 6,606,402 B2
  • Filed: 08/24/2001
  • Issued: 08/12/2003
  • Est. Priority Date: 12/18/1998
  • Status: Expired due to Term
First Claim
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1. A method for determining blockage of an aperture in a surface by a material comprising:

  • (a) providing a predetermined level and orientation of illumination to the surface having the aperture;

    (b) acquiring a pre image of the surface prior to application of material thereonto;

    (c) extracting pre-application image characteristics from the pre image, image characteristics including, (i) grayscale intensity values for each of a plurality of pixels and (ii) intensity variance values for each of the pixels based upon respective nearby pixels as a measure of surface texture, to form a histogram of the pre image. (d) applying material onto the surface;

    (e) acquiring a post image of the surface, after the act of applying;

    (f) extracting post-application image characteristics from the post image, image characteristics including, (i) grayscale intensity values for each of a plurality of pixels and (ii) intensity variance values for each of the pixels based upon respective nearby pixels as a measure of surface texture, both characteristics based upon a model established from the pre-application image characteristics; and

    (g) ascertaining blockage of the aperture by differentiating the grayscale intensity values for pixels representing the aperture from gray scale intensity values for pixels representing the material, the step of ascertaining including the steps of i) establishing an image intensity histogram including a first plurality of histogram bins each containing grayscale intensity values for each of pixels of the pre image and pixels of the post image, each of the pixels being placed within respective predetermined intensity value ranges and wherein the histogram includes a second plurality of histogram bins for each of the first plurality of histogram bins, each second bin containing pixel intensity variance values falling within a respective predetermined intensity variance ranges for each of the pixel intensity values, (ii) shifting histogram bins to a different value in response to measured bin values of other apertures so as to place each of the histogram bins at a similar location to thereby compensate for image characteristic differences between apertures in an overall surface.

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